JPS5936319A - Magneto-resistance effect type magnetic head - Google Patents

Abstract

PURPOSE:To decrease the number of film forming processes and at the same time to shield effectively the leakage of magnetic flux from a medium which is not required for detection, by forming a shielding layer at the area near a magneto-resistance element excepting the effective sense part of the element. CONSTITUTION:A sense part (MR layer) 4 formed by an Ni(80%)-Fe(20%) alloy through an electron beam vapor deposition process, etc. is vapor deposited about 500Angstrom on a substrate 1 of glass, etc. A protecting film 5 of glass, etc. is adhered to the other side of the substrate 1. Then a rubbing surface is formed by the cylindrical grinding. A shielding layer 2 of ''Sendust'', etc. is vapor deposited with 0.5-1mum thickness on the entire rubbing surface by a sputtering process, etc. Then an opening part 7 having about 3mum width is formed at the position of the MR layer 4 by an etching process, etc. Thus the magnetic flux leaked out from a medium that is undesired for detection is effectively shielded by the shielding layer 2 formed on the head rubbing surface.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetoresistive magnetic head, and particularly to a thin film magnetic head in which a shield layer made of a high magnetic permeability layer is provided in the vicinity of a magnetoresistive element formed on a substrate.

Such a magnetoresistive magnet (hereinafter referred to as FMR) is a magnetoresistive element (hereinafter referred to as MH).

It is a magnetism using a magnetic element (called an element), and N=I I
The element utilizes the property that the resistance value changes depending on the strength of the magnetic field, and since the reproduction output depends on the medium speed and is determined only by the wavelength of the magnetic signal, sufficient reproduction output can be obtained even at low speeds. 1. Since it can be manufactured using the same thin film technology as C (integrated circuit), it has the advantage of being easy to create multi-tracks, and has recently attracted attention as a playback device for magnetic recording and playback devices. There is. When using such a head for reproduction up to short wavelengths, in order to improve resolution, seals 1 to 1 made of magnetic material with high permeability layers are placed on both sides of the M I'L element. is set up and used.

In other words, as shown in FIG. 1, a seal 1 and a layer 2 made of a high magnetic permeability material are formed on a substrate 1, and an insulating layer 3 is applied thereto. , followed by M
11. A layer 4 of the element is formed, and an insulating layer 3 is further formed on it.
', G) After forming one layer 2' of N4■ (1
・Constitutes ＼tuto. In addition, 6 indicates the recording medium"(
-8 In this way, in the shield type Mll, \SoI-, a ruled layer 2.2' consisting of a pair of high magnetic permeability layers is provided, 11 in the interval between the pair of nhrud layers. The current method is to detect the local magnetic field strength within a related range and essentially average the reproduction frequency characteristics over a wide range, and a shield layer is designed as shown in Figure 2. , the characteristics are averaged and 1
) 5o becomes wider and can be used even in the short wavelength region.

However, in the conventional MrL-\RAD as shown in Fig. 1, it is not only complicated due to the number of laminated layers and many steps, but also the internal stress of the film generated during film formation becomes large and the film is likely to peel off, and the substrate and If a magnetic material is used for the protection plate 5, there is a drawback that the bias magnetic field from the outside is also blocked.

Therefore, the present invention eliminates these conventional drawbacks, reduces the number of film forming steps, and also improves Ml, which can effectively seal the leakage of magnetic flux from the medium that is unnecessary for detection.・Make Kokichi who provides \tsuto' good luck.

In order to achieve this object, the first embodiment of the present invention employs a structure in which a root layer is provided except for the effective sensing portion of the magnetoresistive element.

Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.

FIG. 3 shows one embodiment of the present invention A1,
In the figure, for example, 80%N-20%Pc is deposited on a glass substrate using a thin film deposition technique such as electron beam evaporation.
Approximately 500 layers of a magnetoresistive element detection portion (hereinafter referred to as MR layer) 4 made of an alloy is deposited. After that, a protective plate 5 made of Sumukichi, which is also applied with force, is adhered from the opposite side, and a sliding surface is also formed by cylindrical grinding. On this sliding surface, a Nhult layer 2 made of, for example, centast, is vapor-deposited on the entire surface of the sliding surface to a thickness of 0.5 to 1 μIl+ using a spack-link method, etc., and then Ml (approximately 3μ
An opening 7 is formed to accommodate the width of Il+.

In this configuration, since the shield layer is provided on the head sliding surface, it is effective for effectively sealing off the leakage of magnetic flux from the medium that is unnecessary for detection, and at the same time, it is effective in preventing the bias magnetic field from reaching the medium surface. You can get the effect of being able to shield Kokichi.

In addition, in the above-described embodiment, the substrate 1 and the protection plate 5 are made of non-magnetic and i
It is also possible to use materials with excellent tl abrasion resistance. Also i
In addition to the above-mentioned materials, the 'vllL layer 4 may be made of a Ni--C0 alloy or an alloy film containing Ni--Fe or Ni--Co as its main components, and the thickness of the MAL layer is preferably 300 to 1000 Å.

In addition to centast, the shield layer 2 contains Ni − and 'e
Alloy high permeability ferrite, Fe-I'-C,Co-
An amorphous magnetic material such as Si-3 can be used, or preferably an amorphous material such as Senx I, ferrite, or an amorphous material with excellent corrosion resistance and wear resistance. The thicker the shield layer is, the greater the sealing effect will be.On the other hand, it will increase the space sink loss, so if the above materials are used, the O
:3 to 2 μm or appropriate. However, the thickness can of course be set to other values depending on the characteristics of each material. The width of the shield layer opening 7 must be at least twice the thickness of the shield layer, and should be 2 to 10μIll.
It is preferable to have a width of 100 mm, and the method for forming it may be a lift-off method in addition to etching.

FIG. 4 shows another embodiment of the present invention, and the same or similar parts in FIG. 3 are designated by the same reference numerals. In this embodiment, an amorphous ribbon (for example, Fe-P-C, alloy) is bonded to the end faces of the glass substrate 1 and the glass protector 5 in advance. Subsequently, an insulating layer 3 of 5io2 is deposited on the substrate 1 using a spackle link method.
311Il], electronic heater, evaporation method, and 80%N
i-20%Fe MR, layer 4 at 100A, and 5in2 insulating layer 3' by sputter link method at 3fUn 0)
IN Now, layer 1 is deposited. Furthermore, the protection plate 5 is bonded to the -14, and after forming the tank moving part 1, the layer 2 is formed on the sliding surface of the seal 1, and the layer 2 is fixed from the position of the NI It layer using a screw or the like. The shielding layer 2 having a width of 2 is removed until the insulating layer 3.3' and the MIt layer 4 are exposed.

In this way, similarly to the embodiment shown in Fig.
The shield layer 2 is formed on the sliding surface except for the effective sensing portion of the element. This Ml(,,
-＼' throat also obtains the same effect as N·11(, ＼ So1-, 1-6) in Fig. 3. Note that the material of M H, layer 4, and shield layer 2 is good. Any of the monthly rates shown in Figure 3 may be used, and 5iO1SI and N4 are very good for the insulating layer, and preferably the thickness is 2 to 5μI11.The upper insulating layer 3' is also used as the adhesive for the protective plate 5. It is also possible.

As explained above, the head according to the present invention has a single layer of seal 1 on the sliding surface except for the effective detection part of the N=I 1.L element, which eliminates the structure required in the past. The film process can be considerably reduced, and leakage of magnetic flux from the medium that is unnecessary for sensing can be effectively shielded, and the bias magnetic field generally used for using the l'v1 layer in the linear region can be significantly reduced. It is possible that it does not have the effect of shielding leakage to the medium surface.

In the embodiments of the present invention, the case where the recording medium is brought into contact with the spatula 1 has been described, but it is clear that the present invention can also be applied to a case where the recording medium is not brought into contact with the spatula 1.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional view showing the configuration of a conventional MIL head, Fig. 2 is a characteristic diagram showing the relationship between the reproduction wavelength and reproduction output of MR.\rad, and Figs. 3 and 4 are N. 1lL-. FIG. 4 is a cross-sectional view showing the configuration of different embodiments of the socket. 1...Substrate 2.2'...Shield layer 3.3'...Insulating layer 4-M T1. Layer 5...
・Protection plate 6...Recording medium 7...Aperture procedure amendment (self-effective date of October 26, 1980, Mr. Commissioner of the Japan Patent Office 1, Indication of the case, Patent Application No. 145518, 1982, 2)
Name of the invention Magnetoresistive magnetic head 3, Relationship to the person making the correction Case Patent applicant name (100) Canon Co., Ltd. 4, agent Telephone: 03 (268) 2481
(As per Column 6 of the Detailed Description of the Invention of the Specification, Contents of the Amendment in the Attachment l) "Glass substrate l" on page 6, line 16 of the specification [Glass substrate formed by grinding as a sliding part] Corrected to 1. 2) On page 6, line 17, "adhere to" is corrected to "adhere to the shield layer 2." 3) 400 pairs in the 20th line of the same line is r400λ)
After creating a pattern, correct it. 4) On page 7, lines 3 to 7, “Suri animation...
···remove. '' is lightly ground to the extent that the unevenness on the sliding surface is flattened by r+i. ” is corrected. 5) "MR layer J rMR element r-" on page 8, line 2
Correct. 6) Change "It is possible to apply a bias magnetic field" in lines 3 to 5, line 11 of page 8, to [The bias magnetic field must be applied effectively to the child without shielding. is possible. ” is corrected. ~92

Claims (3)

[Claims] (1) In a magnetoresistive magneto-to-layer in which a #-root layer made of a high magnetic permeability layer is provided in the vicinity of a magnetoresistive element formed on a substrate, the railt layer is attached to the magnetoresistive element. A magnetoresistance effect type magnet, which is characterized in that it is formed without the effective detection part. (2) The magnetoresistive magnet according to claim 1, wherein the high permeability magnetic material is a Ni--Fe alloy. (3) The high magnetic permeability magnetic material is a ferrite material. is an amorphous magnetic material of Fc-P-C.
) A patent characterized in that the high permeability magnetic material is an amorphous magnetic material of Co-8i-IF, Claim 1
Magnetoresistive magnetism described in Section 1-6