JPS593579Y2 - 露光装置 - Google Patents

露光装置

Info

Publication number
JPS593579Y2
JPS593579Y2 JP1981134863U JP13486381U JPS593579Y2 JP S593579 Y2 JPS593579 Y2 JP S593579Y2 JP 1981134863 U JP1981134863 U JP 1981134863U JP 13486381 U JP13486381 U JP 13486381U JP S593579 Y2 JPS593579 Y2 JP S593579Y2
Authority
JP
Japan
Prior art keywords
mask
ray
exposure
lens barrel
ray source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981134863U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5783744U (show.php
Inventor
久男 伊沢
伸弥 篠山
保直 斉藤
了 中山
清 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1981134863U priority Critical patent/JPS593579Y2/ja
Publication of JPS5783744U publication Critical patent/JPS5783744U/ja
Application granted granted Critical
Publication of JPS593579Y2 publication Critical patent/JPS593579Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Radiography Using Non-Light Waves (AREA)
JP1981134863U 1981-09-10 1981-09-10 露光装置 Expired JPS593579Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981134863U JPS593579Y2 (ja) 1981-09-10 1981-09-10 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981134863U JPS593579Y2 (ja) 1981-09-10 1981-09-10 露光装置

Publications (2)

Publication Number Publication Date
JPS5783744U JPS5783744U (show.php) 1982-05-24
JPS593579Y2 true JPS593579Y2 (ja) 1984-01-31

Family

ID=29495056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981134863U Expired JPS593579Y2 (ja) 1981-09-10 1981-09-10 露光装置

Country Status (1)

Country Link
JP (1) JPS593579Y2 (show.php)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113167A (en) * 1976-03-19 1977-09-22 Nippon Telegr & Teleph Corp <Ntt> X-ray exposing device

Also Published As

Publication number Publication date
JPS5783744U (show.php) 1982-05-24

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