JPS5933839A - Metal mold for resin sealing of semiconductor - Google Patents
Metal mold for resin sealing of semiconductorInfo
- Publication number
- JPS5933839A JPS5933839A JP14371282A JP14371282A JPS5933839A JP S5933839 A JPS5933839 A JP S5933839A JP 14371282 A JP14371282 A JP 14371282A JP 14371282 A JP14371282 A JP 14371282A JP S5933839 A JPS5933839 A JP S5933839A
- Authority
- JP
- Japan
- Prior art keywords
- mold
- cavity
- resin
- bottom force
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/40—Removing or ejecting moulded articles
- B29C45/4005—Ejector constructions; Ejector operating mechanisms
Abstract
Description
【発明の詳細な説明】 〔発明の技術分野〕 本発明は、半導体樹脂封止用金型に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a mold for resin encapsulating a semiconductor.
従来、所望の素子を樹脂封止体で封止した樹脂封止型の
半導体装置が使用されている。樹脂封止型の半導体装置
は、第1図(A)及び同図(B)に示す如く、素子をマ
ウントしたリードフレーム1を半導体樹脂封止用金型(
以下、単に金型と記す。)に設置し、これに樹脂封止体
2を形成してリードフレーム1の余分な枠部を切断する
ことによシ製造されている。得られた半導体装置には、
第2図に示す如く、樹脂封止体2内に素子3だけを埋設
したものや、第3図に示す如く、樹脂封止体2内に素子
3と放熱フィン4の一部分とを埋設したものとがある。2. Description of the Related Art Conventionally, resin-sealed semiconductor devices have been used in which desired elements are sealed with a resin-sealed body. As shown in FIGS. 1(A) and 1(B), a resin-sealed semiconductor device is manufactured by placing a lead frame 1 on which an element is mounted into a semiconductor resin-sealing mold (
Hereinafter, it will simply be referred to as a mold. ), a resin sealing body 2 is formed thereon, and the excess frame portion of the lead frame 1 is cut off. The obtained semiconductor device has
As shown in FIG. 2, only the element 3 is buried in the resin molding body 2, and as shown in FIG. 3, the element 3 and a part of the radiation fin 4 are buried in the resin molding body 2. There is.
而して、素子3だけを埋設した構造の半導体装置Aの成
型には、第4図に示す如く、樹脂封止体2の外形に略等
しい形状の中空部(以下、単にキャビティ)7にエジェ
クタビン8の先端部が幅L10.05〜015朋程度突
出するようにした構造の金型1oを使用している。また
、放熱フィン4の一部分と素子3とを埋設した構造の半
導体装置6の成型には、第5図に示す如く、キャビティ
7の底部から0.05〜0.15+mn程度の幅L2だ
けエジェクタビン8の先端部を下げた構造の金型1ノを
使用している。なお、第4図、第5図中10a。In order to mold the semiconductor device A in which only the element 3 is buried, as shown in FIG. A mold 1o having a structure in which the tip of the bottle 8 protrudes by a width L10.05 to 015 mm is used. In addition, in order to mold the semiconductor device 6 having a structure in which a part of the radiation fin 4 and the element 3 are buried, an ejector bin is used, as shown in FIG. A mold No. 1 with a structure in which the tip of No. 8 is lowered is used. Note that 10a in FIGS. 4 and 5.
11aは上型、10b、11bは下型である。11a is an upper mold, and 10b and 11b are lower molds.
このように製造する半導体装置5.6の構造に応じて適
した構造の金型ユ0,11を用意しなければならなかっ
た。金型10,11は高価であり、製造コストを高くす
る原因となっていた。この欠点を解消するために、第6
図に示す如く、エジェクタビン8の下端部金工型12が
ら取出して昇降台13に接続し、昇降台13と下型12
間にばね14を介在させると共に、昇降台13をその裏
面側から貫挿して下型12の下部に吊シポルト15會取
付けることによシ、キャビティ7内に出入するエジェク
タビン8の長さ全調節できるようにした金型上Jが開発
されている。また、これに昇降台13の下面にスペーサ
17を介して基台18を設けて同様にエジェクタビン8
を昇降動されるのも開発されている。このような金型1
6では、吊シカルト15の締付は量の調節操作酸はスペ
ーサ17の介在操作に多くの手間を要し、作業性が悪い
欠点があった。It was necessary to prepare mold units 0 and 11 having an appropriate structure according to the structure of the semiconductor device 5.6 to be manufactured in this manner. The molds 10 and 11 are expensive and cause high manufacturing costs. In order to eliminate this drawback, the sixth
As shown in the figure, the lower end metal mold 12 of the ejector bin 8 is taken out and connected to the lifting table 13, and the lifting table 13 and the lower mold 12 are connected to the lifting table 13.
The length of the ejector bin 8 that moves in and out of the cavity 7 can be fully adjusted by inserting a spring 14 between them and attaching a lifting support 15 to the lower part of the lower mold 12 by penetrating the lifting platform 13 from the back side thereof. A mold holder J has been developed that allows this. Further, a base 18 is provided on the lower surface of the lifting table 13 via a spacer 17, and the ejector bin 8 is
It has also been developed to be able to move up and down. Such mold 1
In No. 6, the tightening of the hanging capacitor 15 required a lot of effort to adjust the amount of the acid and the intervening operation of the spacer 17, which had the disadvantage of poor workability.
本発明は、放熱フィン埋設型の樹脂封止製品等を容易に
製造することができる半導体樹脂封止用金型を提供する
ことをその目的とするものである。SUMMARY OF THE INVENTION An object of the present invention is to provide a mold for resin-sealing semiconductors that can easily manufacture resin-sealed products with embedded heat dissipation fins.
本発明は、金型本体内にエジェクタビンをその一端部が
キャビティ内に所定量だけ出入できるようにして、放熱
フィン埋設型の樹脂封止製品等を容易に製造できるよう
にした半導体樹脂封止用金型である。The present invention provides semiconductor resin encapsulation that allows an ejector bin to be placed in the mold body so that one end of the ejector bin can move in and out of the cavity by a predetermined amount, thereby making it possible to easily manufacture resin-sealed products with embedded radiation fins. This is a mold for use.
以下、本発明の実施例について図面を参照して説明する
。Embodiments of the present invention will be described below with reference to the drawings.
第7図は、本発明の一実施例の断面図である。FIG. 7 is a cross-sectional view of one embodiment of the present invention.
図中20は、金型本体を構成する下型である。In the figure, 20 is a lower mold that constitutes the mold body.
下型20の上部には、樹脂封止製品の外形をなす中空部
21(以下、キャビティと記す。)が形成されている。A hollow portion 21 (hereinafter referred to as a cavity) forming the outer shape of the resin-sealed product is formed in the upper part of the lower mold 20.
下型20には、キャビティ21の底部に連通ずるビン挿
入孔22が貫挿されている。ビン挿入孔22には、エジ
ェクタビン23が一端部を下型20から導出するように
して摺動自在に挿入されている。導出した一端部は、下
型20の下面に対向して設けられた昇降台24に取付け
られている。昇降台24と下型20の間には、ばね25
が介在されておシ、昇降台24は、下地20の下面から
所間隔で離間している。昇降台24は、昇降機構によっ
て昇降自在に基台26上に設けられている。昇降機構は
、周側面を基台260表面に当接するようにして昇降台
24の側面に回転自在に取付けられたカム27と、この
カム27に取付けられた回転レバー28とで構成されて
いる。A bottle insertion hole 22 that communicates with the bottom of the cavity 21 is inserted through the lower mold 20 . An ejector bin 23 is slidably inserted into the bin insertion hole 22 so that one end of the ejector bin 23 is led out from the lower die 20 . The led-out end portion is attached to a lifting platform 24 provided opposite to the lower surface of the lower mold 20. A spring 25 is installed between the lifting platform 24 and the lower mold 20.
The lifting platform 24 is spaced apart from the lower surface of the base 20 at a predetermined distance. The elevating table 24 is provided on a base 26 so as to be movable up and down by an elevating mechanism. The elevating mechanism includes a cam 27 that is rotatably attached to the side surface of the elevating table 24 so that its circumferential side abuts the surface of the base 260, and a rotation lever 28 that is attached to the cam 27.
このように構成された半導体樹脂封酬金m30によれば
、回転レバー28を操作するだけの極めて簡単な操作に
よって昇降台24を介してエ5−
ジェクタビン23のキャビティ21内の突出量、或はキ
ャビティ21からの導出量を所定値に設定することがで
きる。その結果、樹脂封止体内に素子のみを埋設した樹
脂封止製品、或は、素子及び放熱フィンを埋設するよう
にした樹脂封止製品を1台の金型で容易に製造して製造
コストを低減させることができると共に、生産性を向上
させることができる。According to the semiconductor resin encapsulant m30 configured in this way, the amount of protrusion into the cavity 21 of the ejector bin 23 or the amount of the cavity can be adjusted via the lifting platform 24 by an extremely simple operation of only operating the rotary lever 28. The amount derived from 21 can be set to a predetermined value. As a result, a resin-sealed product in which only an element is embedded in a resin-sealed body, or a resin-sealed product in which an element and heat dissipation fins are embedded, can be easily manufactured using a single mold, reducing manufacturing costs. It is possible to reduce this and improve productivity.
なお、キャビティ21の底部からエジェクタビン23の
先端面までの離間距離を所定値に設定することによシ、
第8図に示す如く、樹脂封止製品の下面に突起体31を
形成したもの等所望形状の樹脂封止製品32を容易に形
成することができる。Note that by setting the distance from the bottom of the cavity 21 to the tip surface of the ejector bin 23 to a predetermined value,
As shown in FIG. 8, it is possible to easily form a resin-sealed product 32 in a desired shape, such as one in which protrusions 31 are formed on the lower surface of the resin-sealed product.
以上説明した如く、本発明に係る半導体樹脂封止用金型
によれば、放熱フィン埋設型の樹脂封止製品等を容易に
製造することができる等顕著な効果を奏するものである
。As explained above, the mold for semiconductor resin encapsulation according to the present invention has remarkable effects such as being able to easily manufacture resin-sealed products with embedded radiation fins.
−6=−6=
第1図(4)は、リードフレームに樹脂封止体を形成し
た状態を示す平面図、同図(B)は、同リードフレーム
の正面図、第2図は、樹脂封止半導体装置の断面図、第
3図は、放熱フィンを埋設した樹脂封止半導体装置の断
面図、第4図は、第2図に示す樹脂封止半導体装置を成
型する従来の金型の断面図、第5図は、第3図に示す樹
脂封止半導体装置を成型する従来の金型の断面図、第6
図は、エジェクタピンの昇降機構を設けた従来の金型の
断面図、第7図は、本発明の一実施例の断面図、第8図
は、同実施例の半導体樹脂封止用金型で成形された樹脂
封止製品の説明図である。
20・・・下型、21・・・キャビティ、22・・・ピ
ン挿入孔、23・・・エジェクタピン、24・・・昇降
台、25・・・ばね、26・・・基台、27・・・カム
、28・・・回転レバー、30−・・・半導体樹脂封止
用金型、31・・・突起体、32・・・樹脂封止製品。
=7−
オ6図
オフ1
13−O
/
6
オ8図
2Fig. 1 (4) is a plan view showing a state in which a resin molded body is formed on a lead frame, Fig. 1 (B) is a front view of the lead frame, and Fig. 2 is a cross section of a resin molded semiconductor device. Fig. 3 is a sectional view of a resin-sealed semiconductor device with embedded radiation fins, Fig. 4 is a sectional view of a conventional mold for molding the resin-sealed semiconductor device shown in Fig. 2, and Fig. 5 6 is a cross-sectional view of a conventional mold for molding the resin-sealed semiconductor device shown in FIG.
The figure is a sectional view of a conventional mold provided with an ejector pin elevating mechanism, FIG. 7 is a sectional view of an embodiment of the present invention, and FIG. 8 is a mold for semiconductor resin encapsulation of the same embodiment. It is an explanatory view of a resin-sealed product molded with. 20... Lower mold, 21... Cavity, 22... Pin insertion hole, 23... Ejector pin, 24... Lifting platform, 25... Spring, 26... Base, 27... ...Cam, 28--Rotary lever, 30--Mold for semiconductor resin sealing, 31--Protrusion, 32--Resin-sealed product. =7- O6 figure off 1 13-O / 6 O8 figure 2
Claims (2)
、前記中空部に連通ずるように前記金型本体に形成され
たビン挿入孔と、該ピン挿入孔内に摺動自在に挿入され
たエジェクタビンと、前記金型本体から導出した前記エ
ジェクタビンの一端部が接続された昇降台と、該昇降台
に取付けられた昇降機構とを具備することを特徴とする
半導体樹脂封止用金型。(1) A mold body having a hollow part forming the outer shape of the molded product, a bottle insertion hole formed in the mold body so as to communicate with the hollow part, and a pin insertion hole that can freely slide into the pin insertion hole. A semiconductor resin encapsulation characterized by comprising an inserted ejector bin, an elevating table connected to one end of the ejector bin led out from the mold body, and an elevating mechanism attached to the elevating table. Mold for use.
を当接して回転自在に取付けられたカムと、該カムに取
付けられた回転レバーとで構成されている特許請求の範
囲第1項記載の半導体樹脂封止用金型。(2) The elevating mechanism is composed of a cam rotatably attached to the surface of the base on which the elevating table is placed, and a rotary lever attached to the cam. A mold for semiconductor resin encapsulation according to scope 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14371282A JPS5933839A (en) | 1982-08-19 | 1982-08-19 | Metal mold for resin sealing of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14371282A JPS5933839A (en) | 1982-08-19 | 1982-08-19 | Metal mold for resin sealing of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5933839A true JPS5933839A (en) | 1984-02-23 |
Family
ID=15345218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14371282A Pending JPS5933839A (en) | 1982-08-19 | 1982-08-19 | Metal mold for resin sealing of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5933839A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62173000U (en) * | 1986-04-18 | 1987-11-02 | ||
KR20020027291A (en) * | 2000-10-06 | 2002-04-13 | 가네꼬 히사시 | Resin encapsulation mold |
-
1982
- 1982-08-19 JP JP14371282A patent/JPS5933839A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62173000U (en) * | 1986-04-18 | 1987-11-02 | ||
KR20020027291A (en) * | 2000-10-06 | 2002-04-13 | 가네꼬 히사시 | Resin encapsulation mold |
US6641382B2 (en) * | 2000-10-06 | 2003-11-04 | Nec Corporation | Resin encapsulation mold |
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