JPS5933629A - Manufacture of vertical magnetic recording medium - Google Patents

Abstract

PURPOSE:To obtain a magnetic recording medium superior in recording and reproducing characteristics, by applying a magnetic field in the direction vertical to the directions of movement and thickness of a substrate in forming a ''Permalloy'' thin film on the substrate being moved, and vapor depositing a vertically magnetized film. CONSTITUTION:A substrate film 1 is being moved from an unwinding roll 4 along a can 2 to a winding roll 5, and a magnetic field is applied vertically to the directions of movement and thickness of the substrate 1 using an electromagnet 7 or a permanent magnet, and in this state, the Permalloy film is vapor deposited through the slit of a mask from an evaporation source 6 to the substrate 1. The magnetic field is applied by regulating the distance between the central axis of the magnetic field and the substrate 1 to <= about 1/2 of the distance beween said axis to the source 3. As a result, magnetic permeability of the Permalloy film in the direction in parallel to that of movement of the substrate 1, and the recording and reproducing characteristics of the vertical magnetic recording medium is enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a recording medium having a two-layer film structure and suitable for perpendicular magnetic recording.

Conventional configuration and its problems When performing magnetic recording with a short recording wavelength, perpendicular magnetic recording is 41 effective. As a recording medium for perpendicular magnetic recording, there is a recording medium in which the direction of easy magnetization is perpendicular to the surface of the medium film. As one of the recording materials having such characteristics, a recording medium whose magnetized film is mainly composed of Go and Cr is used.

When using a recording medium containing CO and Or as main components for overlapping recording, first a permalloy film is formed on the substrate, and then a Co-Or recording medium is formed on top of the permalloy film, and a closed magnetic path is formed during recording and reproduction. It has been found that the reproduction characteristics are improved (hereinafter, this medium will be referred to as a two-layer film medium). In this case, the characteristics of the permalloy film greatly affect the recording and reproducing characteristics.

That is, as a result of experiments, it has been found that when the magnetic permeability of the permalloy film in the plane f7' direction is high in the direction of movement of the recording medium during recording and reproduction, V1 is oriented in the direction of V1 during recording and reproduction.

The two-layer film medium can be produced by either the spuck rinsing method or the vacuum evaporation method. In particular, with the latter method, a long perpendicular magnetic recording medium can be stably produced with a deposition rate of several thousand persons/second, for example, with a configuration as shown in FIG. That is, as shown in FIG. 1, the plate 1 is placed in a vacuum chamber 12 evacuated to a high vacuum by the υ1 air thread 13, and unwound from the unwinding system 4. When the mask 6 is opened, the film is vacuum-deposited by the evaporator 15i 3 into which the electric beam 11 is incident from the commercial gun 10, and then wound onto the winding system.

However, when forming the permalloy layer, the permalloy layer is
If only the permalloy film is vapor-deposited, the magnetic permeability of the permalloy film becomes almost isotropic within the film plane, so it cannot be said that the advantages of the two-layer film medium are fully utilized.

[1] The present invention increases the magnetic permeability in the A/P direction in magnetic recording beef cattle of a permalloy film constituting a two-layer film, thereby providing an excellent perpendicular recording device of [1]. The purpose of this invention is to make it easy to obtain a layer-j imitation medium.

Structure of the Invention The present invention applies a magnetic field to a moving substrate in the perm direction and in the flat curve direction using the steam shield method.

Note that when forming a permalloy film here, if a magnetic field is applied perpendicularly to the running direction and thickness direction of the substrate, the magnetic field of the permalloy film is in the direction of the magnetic field and the 51' row direction.
The direction of magnetization is the A1 direction of the substrate and the IJI direction.

Therefore, the magnetic permeability in the direction parallel to the running direction of the second plate is higher than that in the case where no magnetic field is applied.

DESCRIPTION OF EMBODIMENTS FIG. 2 shows a case in which a magnetic recording medium is manufactured by passing a current through a coil to generate a magnetic field in continuous winding vacuum evaporation. 7) Waste.

As shown in the figure, the substrate 1 unwound from the unwinding system 4 is moved to the can 2, and the magnetic field generated by the coil at the opening 11 of the mask 6 is returned to the evaporation source 3. A permalloy film is vacuum-deposited and wound onto a winding thread 6.

By kneading, the high magnetic permeability is increased by 1 in the direction parallel to the board running direction.
-11" permalloy membrane can be produced.

FIG. 3 shows an example in which a magnetic field is generated using a permanent magnetic field instead of the coil in Example 11, and shows how magnetic lines of force 9 are generated by the permanent magnetic field 18.

In order to produce the effect of applying a magnetic field, the strength of the magnetic field at the part where the film is deposited on the substrate must be at least 200
More than 100 students are required. .

It is still the 1F) linear dimension connecting the centers of the coils d: + of the magnet
: The distance between the straight line connecting ll + 9 (these are called the magnetic field/U axis) and the No. The effect of applying may not be obtained sufficiently.

(With the direction of the running force of the board) 3. By applying a magnetic field in the perpendicular direction in the J-mino-j direction, the magnetic permeability d in the permalloy film substrate travel direction
Compared to about 100 when no magnetic field is applied, it increased to about 906, which is about 9 times. Still perm 1 on polyimide hair roots
A Co film was deposited on 2,000 people's offices.
-If Cr film is deposited to a thickness of 2000, 50KF
When a signal of RPI (digital signal recording density with 50,000 magnetization reversals per inch) is recorded with a known 611 auxiliary pole excitation type head and rewritten, the result is as follows: Record 1
・8th degree: 1, l: increased by 146dB, 7Ti: /,
1 output increased by about 3 dB.

Effects of the Invention As described above, according to the present invention, a perpendicular magnetic recording medium with excellent recording properties can be easily obtained.

[Brief explanation of drawings]

Figure 1 shows the conventional manufacturing method of perpendicular magnetic recording media N'r(
Figures 2 and 3 are respectively illustrative diagrams illustrating the method of manufacturing a magnetic recording medium according to the present invention. 1. ...board, 2...can, 3...
Evaporator, 4... Unwinding system, 5... Winding system, 6
...Mask, 7...Coil, 8...Permanent magnet i, 9...Magnetic field lines, 10-...Electrical
R gun, 11... City: Ryobi 1. ．． 12...L
(Empty tank, 13...exhaust system, etc.) Name of attorney: Satoshi Nakao and 1 other person No. 1
Figure 2

Claims (2)

[Claims] (1) A permalloy film and a direct magnetization film are sequentially formed on a moving substrate by vapor deposition, and when forming the permalloy film, a magnetic field is applied in a perpendicular direction to the moving force direction and the thickness direction of the substrate. 1. A method of manufacturing a perpendicular magnetic recording medium, the method comprising: applying . (2) Manufacturing a perpendicular magnetic recording medium according to claim 1, wherein the distance from the central axis of the magnetic field to the base tfi is approximately less than the distance from the central axis of the magnetic field to the evaporation source. Method.