JPS5971128A - Vertical magnetic recording medium - Google Patents

Vertical magnetic recording medium

Info

Publication number
JPS5971128A
JPS5971128A JP57180719A JP18071982A JPS5971128A JP S5971128 A JPS5971128 A JP S5971128A JP 57180719 A JP57180719 A JP 57180719A JP 18071982 A JP18071982 A JP 18071982A JP S5971128 A JPS5971128 A JP S5971128A
Authority
JP
Japan
Prior art keywords
film
permalloy
medium
layered
construction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57180719A
Other languages
Japanese (ja)
Inventor
Ryuji Sugita
龍二 杉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57180719A priority Critical patent/JPS5971128A/en
Publication of JPS5971128A publication Critical patent/JPS5971128A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/64Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/66Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers

Landscapes

  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain an excellent recording and reproducing characteristic by forming the ''Permalloy'' film in a double layered film medium formed with the ''Permalloy'' film between a substrate consisting of a non-magnetic material and a Co-Cr vertically magnetized film into a multi-layered film construction. CONSTITUTION:A ''Permalloy'' film 10 of the three-layered construction wherein three layers of ''Permalloy'' films of 400Angstrom for each one layer are superposed via a Co-Cr vertically magnetized film having 0.1mum film thickness is disposed on a film substrate 8 consisting of a heat resistant high polymer material having 18mum film thickness. If a signal of 100 KFRPI is recorded and reproduced by a vertical head of an auxiliary magnetic pole excitation type in the two-layered film medium having such construction, a reproduction output higher by 20dB is obtd. as compared with a conventional medium coated with iron oxide contg. Co. A reproduction output higher by 6dB is obtd. as well with the two-layered film medium of the same construction except that the ''Permalloy'' film is of a single layered construction and has 1,200Angstrom film thicness.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度記録特性の優れた、垂直磁気記録用の媒
体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a medium for perpendicular magnetic recording that has excellent high-density recording characteristics.

従来例の構成とその問題点 短波長記録特性の優れた磁気記録方式として、垂直磁気
記録方式がある。この方式においては、媒体の膜面に略
垂直方向が磁化容易軸である垂直磁気記録媒体が必要と
なる。このような媒体に信号を記録すると残留磁化は媒
体の膜面に略垂直方向を向き、従って信号が短波長にな
る程媒体内反  − 磁界は減少し、優れた再生出力が得られる。単層膜媒体
と呼ばれるCo−Cr垂直磁気記録媒体は、非磁性材料
より成る基板上に、Co−Crを主成分とする垂直磁化
膜を、スパッタリング法や真空蒸着法(イオンブレーテ
ィング法のように蒸発原子の一部をイオン化して蒸着す
る方法も含む)で形成したものである。このようが構造
の単層膜媒体に対し、第1図に示すような非磁性材料よ
り成る基板1とCo−Cr垂直磁化膜2との間に、パー
マロイ膜3を設けた、いわゆる2層膜媒体と呼ばれる構
造にすることにより、記録効率及び再生出力が向上する
ことが知られている。特に公知の補助磁極励磁型垂直ヘ
ッドを用いて記録再生を行なう際には、記録効率が約2
0dB改善され、再生出力が約20dB向上する。
Conventional Structure and Problems There is a perpendicular magnetic recording system as a magnetic recording system with excellent short wavelength recording characteristics. This method requires a perpendicular magnetic recording medium whose axis of easy magnetization is approximately perpendicular to the film surface of the medium. When a signal is recorded on such a medium, the residual magnetization is oriented in a direction substantially perpendicular to the film surface of the medium, so that the shorter the signal wavelength, the smaller the medium's internal repulsive magnetic field and the better the reproduced output. A Co-Cr perpendicular magnetic recording medium, which is called a single-layer film medium, is a perpendicularly magnetized film mainly composed of Co-Cr, which is deposited on a substrate made of a non-magnetic material by a sputtering method or a vacuum evaporation method (such as an ion-blating method). (including a method in which some of the evaporated atoms are ionized and deposited). In contrast to a single-layer film medium having such a structure, a so-called two-layer film in which a permalloy film 3 is provided between a substrate 1 made of a non-magnetic material and a Co-Cr perpendicularly magnetized film 2 as shown in FIG. It is known that recording efficiency and reproduction output can be improved by using a structure called a medium. In particular, when recording and reproducing using a known auxiliary pole excitation type vertical head, the recording efficiency is approximately 2.
The result is an improvement of 0 dB, and the reproduction output is improved by approximately 20 dB.

以上のように、2層膜媒体を用いることにより、優れた
記録再生特性が得られるが、磁気記録再生装置の高密度
化、小型化を考えると、壕だ十分な特性ではなく、更に
優れた特性が要求されていた。
As mentioned above, excellent recording and reproducing characteristics can be obtained by using a double-layer film medium, but considering the increasing density and miniaturization of magnetic recording and reproducing devices, the characteristics are not sufficient and even better characteristics are required. characteristics were required.

発明の目的 3べ一゛ 本発明は従来の2層膜媒体よりも更に優れた記録再生特
性を有する2層膜媒体を提供することを目的とする。、 発明の構成 本発明は非磁性材料より成る基&”c o −Cr垂直
磁化膜との間に、パーマロイ膜が形成された2層膜媒体
において、このパーマロイ膜が多層構造をしていること
を特徴とするものである。
OBJECTS OF THE INVENTION 3. It is an object of the present invention to provide a two-layer film medium having recording and reproducing characteristics even better than conventional two-layer film media. , Structure of the Invention The present invention provides a two-layer film medium in which a permalloy film is formed between a perpendicularly magnetized base film made of a nonmagnetic material and a perpendicularly magnetized film made of a non-magnetic material, in which the permalloy film has a multilayer structure. It is characterized by:

実施例の説明 第2図、第3図を用いて本発明の詳細な説明を行なう。Description of examples The present invention will be explained in detail using FIGS. 2 and 3.

従来の2層膜媒体におけるパーマロイ膜3は単層構造に
なっているのに対しくここで言う単層構造とは、パーマ
ロイの全膜厚にわたって連続的に、スパッタリング法や
真空蒸着法により析出された構造のことである)、本発
明による2層膜媒体は例えば第2図に示すような構造に
なっている。第2図においては、パーマロイ膜4が単層
構造ではなく、2層構造になっている。なお、2層以上
の構造を多層構造と称する。また、2層構造とはパーマ
ロイの全膜厚にわたって、連続的に膜を析出するのでは
なく、析出途中で一旦析出を停止し、再び析出を開始し
て作製された膜のことである。3層以上の構造の膜も同
様である。このように析出途中で一旦析出を停止すると
、析出が停止している間に、表面酸化1表面温度の低下
等が生じ、再び析出を開始して、全膜厚を形成しても、
析出を停止した部分に境界層が生じる。この層はSEM
(走査型電子顕微鏡)等により観察される。
While the permalloy film 3 in conventional two-layer film media has a single-layer structure, the single-layer structure referred to here means that the permalloy film 3 is continuously deposited over the entire thickness of the permalloy film by sputtering or vacuum evaporation. The two-layer film medium according to the present invention has a structure as shown in FIG. 2, for example. In FIG. 2, the permalloy film 4 has a two-layer structure instead of a single-layer structure. Note that a structure with two or more layers is referred to as a multilayer structure. Furthermore, the two-layer structure refers to a film produced by not depositing a film continuously over the entire thickness of permalloy, but by stopping the deposition midway through the deposition and then starting the deposition again. The same applies to films with a structure of three or more layers. In this way, if the precipitation is stopped midway through the deposition, the surface oxidation 1 surface temperature will drop while the precipitation is stopped, and even if the precipitation is started again and the entire film thickness is formed,
A boundary layer is formed where precipitation has stopped. This layer is SEM
(scanning electron microscope) etc.

パーマロイ膜を多層構造にして、2層膜媒体を作製し、
記録再生特性を測定すると、パーマロイ膜が単層構造の
場合に比べ、再生出力が増加することが確かめられた。
A permalloy film is made into a multilayer structure to create a two-layer film medium,
When recording and reproducing characteristics were measured, it was confirmed that the reproducing output was increased compared to when the permalloy film had a single layer structure.

以下にこのことを説明する。This will be explained below.

第3図は2層膜媒体において、パーマロイ膜の全膜厚と
構造を変えた場合の再生出力を示している。
FIG. 3 shows the reproduction output when the total film thickness and structure of the permalloy film are changed in a two-layer film medium.

なお、Co−Cr垂直磁化膜の膜厚は0.16μm一定
としである。また、信号の記録再生は補助磁極励磁型垂
直ヘッドで行ない、記録密度は50KFRPIとした。
Note that the thickness of the Co--Cr perpendicular magnetization film is constant at 0.16 μm. Further, recording and reproduction of signals was performed using an auxiliary magnetic pole excitation type vertical head, and the recording density was set to 50 KFRPI.

なお、50KFRPIとは1インチ当たり50000回
磁化反転のあるディジタル信号の記61、−ジ 録状態である。第3図の曲線6,6及び7は、それぞれ
パーマロイ膜の構造が単層構造、2層構造及び3層構造
の2層膜媒体における、パーマロイ膜の全膜厚と、再生
出力との関係を示す。この図から、パーマロイ膜の全膜
厚が一定である場合には、パーマロイ膜を多層構造にし
、暦数が多い程、再生出力も高くなることがわかるうこ
のようになル原因はパーマロイ膜の透磁率μの大きさに
あり、膜を多層構造にし、1層当たりの膜厚を薄くする
程、膜のμが大きくなるためだと考えられる1次により
具体的な実施例の説明を行う。
Note that 50KFRPI is a recording state of a digital signal in which magnetization is reversed 50,000 times per inch. Curves 6, 6, and 7 in Figure 3 represent the relationship between the total film thickness of the permalloy film and the reproduction output for two-layer media in which the permalloy film has a single-layer structure, a two-layer structure, and a three-layer structure, respectively. show. This figure shows that if the total thickness of the permalloy film is constant, the permalloy film has a multilayer structure, and the higher the number of calendars, the higher the reproduction output. A more specific example will be described below, which is believed to be due to the fact that the magnetic permeability μ is large, and as the film is made into a multilayer structure and the film thickness per layer is thinner, the μ of the film becomes larger.

第1の実施例 第4図を用いて本発明の第1の実施例について説明する
。同図において、8は膜厚18μmの耐熱性高分子材料
より成るフィルム基板、9は膜厚0.1μmのC0−C
r垂直磁化膜、10は1層当たり40oへのパーマロイ
膜を3層重ねた、3層構造のパーマロイ膜である。この
様な構造の2層膜媒体に補助磁極励磁型垂直ヘッドで1
00KFRPIの信号を記録し再生すると、従来のCo
含有酸化1− 鉄塗布型媒体に対し20 dB高い再生出力が得られた
。また、パーマロイ膜が単層構造で膜厚120o人であ
る以外は第4図と同じ構造の2層膜媒体に対しても、e
dB高い再生出力が得られた。
First Embodiment A first embodiment of the present invention will be described with reference to FIG. In the figure, 8 is a film substrate made of a heat-resistant polymer material with a film thickness of 18 μm, and 9 is a C0-C film with a film thickness of 0.1 μm.
The perpendicular magnetization film 10 is a permalloy film with a three-layer structure in which three permalloy films are stacked at 40° per layer. An auxiliary pole excitation type perpendicular head is used to perform one
When recording and reproducing 00KFRPI signals, conventional Co
A reproduction output 20 dB higher than that of the media coated with 1-iron oxide was obtained. In addition, e
A dB higher reproduction output was obtained.

第2の実施例 第6図を用いて本発明の第2の実施例について説明する
。この場合、パーマロイ膜とC0−Cr垂直磁化膜との
間に膜厚400人のTi膜11が存在する以外は、第4
図と同じ構造である。ここで、Ti膜11はCo−Cr
垂直磁化膜の配向性を良くするために設けである。この
様な構造の2層膜媒体に補助磁極励磁型垂直ヘッドで1
00KFRPIの信号を記録し再生すると、従来のCO
含有酸化鉄塗布型媒体に対し23 dB高い再生出力が
得られた。
Second Embodiment A second embodiment of the present invention will be described with reference to FIG. In this case, the fourth
It has the same structure as the figure. Here, the Ti film 11 is Co-Cr
This is provided to improve the orientation of the perpendicularly magnetized film. An auxiliary pole excitation type perpendicular head is used to perform one
When recording and reproducing the 00KFRPI signal, the conventional CO
A reproduction output 23 dB higher than that of the coated medium containing iron oxide was obtained.

発明の効果 本発明によれば、記録再生特性の優れた垂直磁気記録媒
体を提供できる。
Effects of the Invention According to the present invention, a perpendicular magnetic recording medium with excellent recording and reproducing characteristics can be provided.

【図面の簡単な説明】[Brief explanation of drawings]

7ページ 第1図は従来の磁気記録媒体の構成を示す断面図、第2
図は本発明による磁気記録媒体の構成の1例を示す断面
図、第3図は本発明の詳細な説明するだめのものでパー
マロイ膜の全膜厚と再生出力との関係を示す図、第4図
及び第5図はそれぞれ本発明の第1.第2の実施例であ
る磁気記録媒体の断面図である。 1.8・・・・・・基板、2,9・・・・・・垂直磁化
膜、3゜4.1o・・・・・・パーマロイ膜。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名恢 
           保 区 5  7   k Oつ
Page 7 Figure 1 is a cross-sectional view showing the structure of a conventional magnetic recording medium, Figure 2
3 is a cross-sectional view showing an example of the structure of a magnetic recording medium according to the present invention, FIG. 4 and 5 respectively show the first embodiment of the present invention. FIG. 3 is a cross-sectional view of a magnetic recording medium according to a second example. 1.8...substrate, 2,9...perpendicular magnetization film, 3°4.1o...permalloy film. Name of agent: Patent attorney Toshio Nakao and one other person
Hoku 5 7k Otsu

Claims (1)

【特許請求の範囲】[Claims] 非磁性基板上にパーマロイ膜が形成され、かつ前記パー
マロイ膜上に直接あるいは非磁性層を介してCOとCr
を主成分とする垂直磁化膜が形成され、前記パーマロイ
膜が多層構造を有することを特徴とする垂直磁気記録媒
体。
A permalloy film is formed on a non-magnetic substrate, and CO and Cr are formed on the permalloy film directly or through a non-magnetic layer.
What is claimed is: 1. A perpendicular magnetic recording medium, characterized in that a perpendicular magnetization film containing as a main component is formed, and the permalloy film has a multilayer structure.
JP57180719A 1982-10-14 1982-10-14 Vertical magnetic recording medium Pending JPS5971128A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57180719A JPS5971128A (en) 1982-10-14 1982-10-14 Vertical magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57180719A JPS5971128A (en) 1982-10-14 1982-10-14 Vertical magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS5971128A true JPS5971128A (en) 1984-04-21

Family

ID=16088115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57180719A Pending JPS5971128A (en) 1982-10-14 1982-10-14 Vertical magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5971128A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249215A (en) * 1988-05-27 1990-02-19 Hitachi Ltd Magnetic recording medium and production thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249215A (en) * 1988-05-27 1990-02-19 Hitachi Ltd Magnetic recording medium and production thereof

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