JPS5932588Y2 - ワ−クホルダ装置 - Google Patents

ワ−クホルダ装置

Info

Publication number
JPS5932588Y2
JPS5932588Y2 JP1980022376U JP2237680U JPS5932588Y2 JP S5932588 Y2 JPS5932588 Y2 JP S5932588Y2 JP 1980022376 U JP1980022376 U JP 1980022376U JP 2237680 U JP2237680 U JP 2237680U JP S5932588 Y2 JPS5932588 Y2 JP S5932588Y2
Authority
JP
Japan
Prior art keywords
shaft
shaft member
holding
holding frame
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980022376U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56126476U (enrdf_load_stackoverflow
Inventor
保雄 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Shinku Co Ltd
Original Assignee
Showa Shinku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Shinku Co Ltd filed Critical Showa Shinku Co Ltd
Priority to JP1980022376U priority Critical patent/JPS5932588Y2/ja
Publication of JPS56126476U publication Critical patent/JPS56126476U/ja
Application granted granted Critical
Publication of JPS5932588Y2 publication Critical patent/JPS5932588Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1980022376U 1980-02-25 1980-02-25 ワ−クホルダ装置 Expired JPS5932588Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980022376U JPS5932588Y2 (ja) 1980-02-25 1980-02-25 ワ−クホルダ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980022376U JPS5932588Y2 (ja) 1980-02-25 1980-02-25 ワ−クホルダ装置

Publications (2)

Publication Number Publication Date
JPS56126476U JPS56126476U (enrdf_load_stackoverflow) 1981-09-26
JPS5932588Y2 true JPS5932588Y2 (ja) 1984-09-12

Family

ID=29618502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980022376U Expired JPS5932588Y2 (ja) 1980-02-25 1980-02-25 ワ−クホルダ装置

Country Status (1)

Country Link
JP (1) JPS5932588Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59118882A (ja) * 1982-12-27 1984-07-09 Hitachi Ltd 成膜装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4716958U (enrdf_load_stackoverflow) * 1971-04-06 1972-10-27

Also Published As

Publication number Publication date
JPS56126476U (enrdf_load_stackoverflow) 1981-09-26

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