JPS5932006B2 - Manufacturing method of piezoelectric vibrator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a piezoelectric vibrator using a connecting plug.

An object of the present invention is to provide a low-cost piezoelectric vibrator by streamlining the manufacturing process using a connecting plug.

The present invention relates to the production of piezoelectric vibrators, in contrast to the conventional method in which each component was supplied individually in each step.
This is a method of manufacturing a piezoelectric vibrator using a connecting plug.

The connection plug used in the present invention will be explained with reference to FIG.

FIG. 1 is a perspective view. This connection plug consists of a plurality of lead terminals 1 extracted from a single thin plate by photo-etching or press processing, a connection frame 2 connected to the lead terminals, and a deformation-preventing structure connected to the connection frame via a connection part 3. It has a structure in which an airtight terminal 5 penetrates and is fixed to the middle part of the lead terminal.

The tips of the lead terminals are connected by a connecting portion 1a for reinforcement before mounting.

Further, the connecting frame 2 is provided with a through hole 6 for positioning in each process.

Each step of the manufacturing method of the present invention will be explained below.

FIG. 2 is an explanatory view of the mounting process, FIG. 2A is a plan view, and FIG. 2B is a front view from the direction of the arrow.

In FIG. 2A, the piezoelectric vibrating piece 10 is set on a mounting jig 11 (not shown), and after a eutectic material such as Au-8n is supplied to the mounting part, the connection plug is connected to the through hole 6 and the through hole is Align the pins 12 of the jig with the mounts 1, which are planted at the same pitch as the mounting jig, and set them on the mounting jig.

In this case, the eutectic material 13 of the piezoelectric vibrating piece and the lead terminal 1 are in a laminated position, and the state at this time is shown in FIG. 2B.

10 is a piezoelectric vibrating piece, 11 is a mounting jig, 12 is a positioning pin, 13 is a eutectic material, and 14 is a pressure device such as a spring.

The mount is completed by passing it through a furnace at 300 to 400 DEG C. in the state shown in FIG. 2B, and fixing the piezoelectric vibrating piece and the lead terminals with a eutectic material.

After the mounting of the connecting plug is completed, the connecting portion 3 is cut off in order to prepare for the F key, allowing the piezoelectric vibrating piece to oscillate independently.

The mount manufacturing method of this example has the following advantages.

1. Since several pieces can be set and removed from the jig at once, processing time can be shortened.

2. Since the mounting positions of multiple piezoelectric vibrators are determined at the same time by positioning pins and through holes, quality can be stabilized.

The F tuning (frequency adjustment) process will be explained with reference to FIG.

This figure shows the vapor deposition method.

16 is an oscillation circuit, 17 is a control circuit, 1B is a deposition source, 19
is a metal vapor.

Pin 1 is provided on the outer periphery of a cylindrical jig (not shown).
5 and the through hole 6, and set a number of connecting plugs (with piezoelectric vibrators) on the circumference of the jig.

Then, the terminals 16 a > 16 b of the oscillation circuit are brought into contact with the connecting frame.

The oscillation circuit 16 causes the piezoelectric vibrating piece 10 to oscillate, and the vapor deposition source 1
A metal film is attached to the tip of the piezoelectric vibrating piece 10 by generating metal vapor 19 by B, and when the frequency reaches a set value, the control circuit 17 terminates the vapor deposition and moves one pitch rotation in the direction of the arrow. , to perform the following F key.

The F power method of this example has the following advantages.

1. Compared to the conventional method of setting each piezoelectric vibrator one by one by inserting lead terminals around a cylindrical jig, multiple piezoelectric vibrators can be set at the same time, reducing processing time. .

2. Conventional piezoelectric vibrator sets have a degree of freedom in the setting position in the front/rear, left/right, and up/down directions to make setting easier, so the F-tuning area varies and the F-tuning precision decreases. According to this example in which a plurality of keys are set at the same time, variations in setting positions are reduced and the F key area is stabilized, so that the F key accuracy can be improved.

3. Conventionally, the connection terminals for the oscillation circuit were in contact with individual lead terminals, which caused oscillation failures due to poor contact, but in this example, the connection terminals for the oscillation circuit are in contact with the connecting frame, which has a wide area. Poor contact is eliminated and quality is improved.

Further, since there is a margin in the positioning accuracy of the connection terminals of the oscillation circuit, work efficiency is significantly improved.

As described above, the integrated manufacturing method from the mounting process to the F adjustment process using a connecting plug based on the embodiment of the present invention is as follows:
Compared to the conventional method using a single hermetic terminal, this method is significantly more rational and can provide a piezoelectric vibrator at a lower cost.

Further, according to the present invention, the piezoelectric vibrator which has been subjected to vapor deposition F-tone is completed by press-fitting and sealing the case in a vacuum, but the effect will be further improved if a connecting plug is also applied to the sealing process.

FIG. 4 shows an embodiment of the sealing process. A connecting plug (with a piezoelectric vibrator) is set in a sealing jig (for example, a jig that uses a split mold to position the connecting frame and clamp it with the bottom of the airtight terminal as a reference surface), and the case 20 is set at the same pitch as the plug. The sealing is performed using an upper mold made of .

The sealing method of this example has the following advantages.

Compared to the conventional method in which each piezoelectric vibrator is set in a sealing jig, a plurality of piezoelectric vibrators can be set at the same time, reducing processing time.

Furthermore, if the connection plug cannot be sealed as it is due to bending in the previous step of the sealing process, the connection frame and the lead terminals can be cut and separated before sealing, and the vacuum sealing can be performed as a single unit.

As described above, according to the present invention, in the method for manufacturing a piezoelectric vibrator in which two lead wires pass through a cylindrical airtight terminal and a piezoelectric vibrator piece is fixed to one end, the two lead wires are integrally connected at least one end by a connecting portion, and each of the pair of lead wires passing through the airtight terminal is connected to one of the lead wires passing through the other airtight terminal by a connecting frame. , a plurality of lead wires are integrally formed, and after an airtight terminal is penetrated and fixed to the integrated lead wire, the connecting portion is removed and the plurality of pairs of lead wires are integrally connected by the airtight terminal and the connecting frame. Then, when adjusting the frequency by fixing piezoelectric vibrators to the ends of multiple pairs of lead wires, the terminals of the oscillation circuit are brought into contact with the connecting frame to excite the piezoelectric vibrators, and after the frequency adjustment is completed. Since this is a method of manufacturing a piezoelectric vibrator by cutting or removing the connecting frame, it has the following effects.

In other words, after removing the connection part that united the pair of lead wires, the multiple pairs of lead wires are integrated by the connecting frame that connects the lead wire of one airtight terminal to the lead wire of another airtight terminal, and the airtight terminal. Because of this configuration, the connecting frame has the advantage that a plurality of vibrators can be handled as one unit even during frequency adjustment, and the terminals of the oscillation circuit are brought into contact with the connecting frame. Since the connecting frame has a large area, it is easy to position the oscillation circuit terminals, increasing work efficiency.Furthermore, the connecting frame is strong, and there is no deformation of the lead wires even when the oscillation circuit terminals come into contact with each other. It does not occur.

[Brief explanation of drawings]

FIG. 1 shows a perspective view of a connecting plug used in the present invention. FIG. 2 shows an explanatory diagram of the mounting process. FIG. 3 is an explanation of the F key process. FIG. 4 shows an example of application to vacuum sealing. DESCRIPTION OF SYMBOLS 1...Lead terminal, 2...Connection frame, 3...Connection part, 4...Reinforcement frame, 5...Airtight terminal, 6...Through hole, 1
0... Piezoelectric vibrating piece, 11... Mount jig, 12... Pin, 13... Eutectic material, 14... Processing pressure device, 15...pin,
16...--Oscillation circuit, 17... Control circuit, 18... Evaporation source, 19... Metal vapor, 20... Case.

Claims (1)

[Claims] 1. In a method for manufacturing a piezoelectric vibrator in which two lead wires pass through a cylindrical airtight terminal and a piezoelectric vibrator piece is fixed to one end, the two lead wires pass through at least one end of the piezoelectric vibrator. After the airtight terminal is fixed to the integrated lead wire by being integrally connected by a connecting part at the end and being connected by a connecting frame to one of the lead wires passing through the airtight terminal, the connecting part is removed so that the plurality of pairs of lead wires are integrally connected by the airtight terminal and the connecting frame, and then the terminals of the oscillation circuit are brought into contact with the ends of the plurality of pairs of lead wires and the connecting frame. A method for manufacturing a piezoelectric vibrator, characterized in that the piezoelectric vibrator is excited by the following steps, and after frequency adjustment, the connecting frame is cut or removed.