JPS6046853B2 - Manufacturing method of piezoelectric vibrator - Google Patents
Manufacturing method of piezoelectric vibratorInfo
- Publication number
- JPS6046853B2 JPS6046853B2 JP6690177A JP6690177A JPS6046853B2 JP S6046853 B2 JPS6046853 B2 JP S6046853B2 JP 6690177 A JP6690177 A JP 6690177A JP 6690177 A JP6690177 A JP 6690177A JP S6046853 B2 JPS6046853 B2 JP S6046853B2
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- fork type
- type piezoelectric
- piezoelectric vibrator
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000005394 sealing glass Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
本発明は、腕時計等に用いられる音叉型の圧電振動子
ユニットの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a tuning fork-shaped piezoelectric vibrator unit used in wristwatches and the like.
振動子ユニットの構成は、一般的には、振動子、該振
動子を支持し、外部への導出線を兼ねる支持部材、該支
持部材を絶縁気密封止するプラグ枠と絶縁気密ガラス乃
び、真空中等でパッケージするための容器により構成さ
れている。The configuration of a vibrator unit generally includes a vibrator, a support member that supports the vibrator and also serves as a lead wire to the outside, a plug frame and an insulating hermetic glass that hermetically seals the support member, and It consists of a container for packaging in a vacuum or the like.
その製造方法は、１個１個バラバラになつて存在してい
る部品を夫々の工程で１個１個組みこみ完成させていく
という手順をとつている。従来から、廉価に製造するた
めに、個々の部品を能率良く組み込む方法については、
いろいろな形で、くふうされ、かなり廉価な振動子ユニ
ットができあがつているが、その製造方法は、ほぼ限界
にきていると云える。 本発明は、従来の方法の限界を
乗り越えるべふ発想に立つて発明した方法で、従来１個
１個バラバラに存在していた部品を、極力連続させて製
造しておき、圧電振動子ユニットとしてほぼ完成するま
て多数個部品を一連で処理したものてある。The manufacturing method uses a procedure in which the parts, which already exist in pieces, are assembled one by one in each process to complete the product. Traditionally, methods for efficiently assembling individual parts in order to manufacture them at low cost have been discussed.
Although fairly inexpensive resonator units have been produced in various forms, it can be said that the manufacturing methods have almost reached their limits. The present invention is a method invented based on the concept of overcoming the limitations of conventional methods, by manufacturing parts that were conventionally separated one by one in a continuous manner as much as possible to create a piezoelectric vibrator unit. It is almost completed and consists of a large number of parts that have been processed in series.
例えば、プラグ枠とガラスとリード端子からなるプラグ
を１５〜２咋一連で製造し、又、音叉型振動子の基部両
側面に於いて多数個を連続させて成形させ、前記プラグ
とを支持治具にセットして、一度処理を行なう等の方法
をとることにより従来、１個１個セットする能率の限界
を乗りこえる。非常に能率の良い製造方法である。 以
下具体的実施例について、図面により説明する。For example, a plug consisting of a plug frame, glass, and a lead terminal is manufactured in a series of 15 to 2 pieces, and a large number of plugs are successively molded on both sides of the base of a tuning fork vibrator, and the plug is supported and fixed. By using a method such as setting it in a tool and processing it once, it is possible to overcome the efficiency limit of conventionally setting each piece one by one. This is a very efficient manufacturing method. Specific examples will be described below with reference to the drawings.
本発明の圧電振動子ユニットを構成する部品は音叉型圧
電振動子１、プラグ枠３ａと絶縁気密封止ガラス３ｂと
リード端子２より構成するプラグ３、乃び真空中等でパ
ッケージするためのキャップ４より成る。音叉型圧電振
動子１は、所定のカットアングルで切り出され、５０−
−１００μ程度の薄く加工されたウェハー５に、物理的
あるいは化学的エッチング技術を使い、音叉型の形状と
該音叉型の圧電振動子１に所定の電極６を形成する。前
記ウェハー５に於ける。音叉型振動子１の配置は、第２
図に示すとおり、音叉方向を交互に配置するようにして
ある。又個々の音叉型圧電振動子１の接続は、音叉型圧
電振動子１の基部両側面で接続されている。以上の接続
配置で作られた音叉型圧電振動子は、ウェハー５より横
にならんだ端部の２個夫々外側５ａで切断され、１５〜
５柵の連続された圧電振動子ができる。又音叉型圧電振
動子を支持するリード端子２をもつプラグ３は、板材よ
り物理的あるいは化学的エッチング又は、ブレス加工に
よソー連ものとして加工されている。又個々のプラグは
リード端子２の２本をプラグ枠３ａ１ガラス３ｂにより
夫々絶縁気密封止して作られ、リード端子２の、インナ
ー側に於いては、所定の位置にハーフエッチング２ａを
ほどこし、該ハーフエッチング部を板厚方向に９００程
度曲げる。以上の様に連続されてできあがつているプラ
グ３と、前記連続されてできあがつている音叉型圧電振
動子１は、あらかじめ、相互の位置関係に於いて、配慮
し寸法を設定する。音叉型圧電振動子１とプラグ３との
支持方式は、前記プラグ３にあるリード端子２の９０げ
た部分に、あらかじめハンダメッキ等をほどこしておき
該曲げ部に、前記音叉型圧電振動子の基部両側面にある
連結部を乗せる。The parts constituting the piezoelectric vibrator unit of the present invention are a tuning fork type piezoelectric vibrator 1, a plug 3 consisting of a plug frame 3a, an insulating hermetic sealing glass 3b, and a lead terminal 2, and a cap 4 for packaging in a vacuum or the like. Consists of. The tuning fork type piezoelectric vibrator 1 is cut out at a predetermined cut angle and has a diameter of 50-
A predetermined electrode 6 is formed on a tuning fork-shaped piezoelectric vibrator 1 on a wafer 5 processed to be as thin as -100 μm using a physical or chemical etching technique. In the wafer 5. The arrangement of the tuning fork type vibrator 1 is as follows.
As shown in the figure, the directions of the tuning forks are arranged alternately. Further, the individual tuning fork type piezoelectric vibrators 1 are connected at both sides of the base of the tuning fork type piezoelectric vibrator 1. The tuning fork type piezoelectric vibrator made with the above connection arrangement is cut at the outer side 5a of the two end portions that are lined up laterally from the wafer 5.
A piezoelectric vibrator with five consecutive fences is created. Further, the plug 3 having the lead terminal 2 that supports the tuning fork type piezoelectric vibrator is processed from a plate material by physical or chemical etching or press processing to form a saw connection. Each plug is made by insulating and hermetically sealing two lead terminals 2 with plug frames 3a and glass 3b, and on the inner side of the lead terminals 2, half-etching 2a is applied at predetermined positions. The half-etched portion is bent by about 900 degrees in the thickness direction. The dimensions of the plug 3, which is manufactured in series as described above, and the tuning fork type piezoelectric vibrator 1, which is manufactured in series, are determined in advance with consideration given to their mutual positional relationship. The method of supporting the tuning fork type piezoelectric vibrator 1 and the plug 3 is to apply solder plating or the like in advance to the bent part of the lead terminal 2 on the plug 3, and then attach the base of the tuning fork type piezoelectric vibrator to the bent part. Place the connecting parts on both sides.
以上の状態で、音叉型圧電振動子１の音叉部を下に治具
にセットし、ハンダの融点より若干高い温度雰囲気に所
定の時間保持すると、リード端子２にあるハンダが溶融
し、支持している音叉型圧電振動子の基部にある。２極
の電極に夫々に接続される。In the above state, when the tuning fork part of the tuning fork type piezoelectric vibrator 1 is set in a jig with the tuning fork part facing down and held in an atmosphere at a temperature slightly higher than the melting point of the solder for a predetermined period of time, the solder on the lead terminal 2 will melt and provide support. At the base of the tuning fork type piezoelectric vibrator. They are respectively connected to two electrodes.
その後、第４図に示す様に、リード端子２の外側の一方
と、音叉型圧電振動子の夫々を切断し、周波数調整を行
ない、その後、圧入治具に、リード端子２によりつなか
つたままセットし、キャップ４を真空中に於いて、圧人
気密封止を行なう。最後にリード端子２のもう一方を切
断し、圧電振動子ユニットとして完成する。以上の製造
方法によると、従来最も加工数の多かつた１個１個部品
をならべる方法が改善されることを始めとして種々の効
果がでてくる。Thereafter, as shown in Fig. 4, one of the outer ends of the lead terminal 2 and the tuning fork type piezoelectric vibrator are cut, frequency adjustment is performed, and the lead terminal 2 is left connected to the press-fitting jig. The cap 4 is placed in a vacuum and sealed under pressure. Finally, the other end of the lead terminal 2 is cut to complete the piezoelectric vibrator unit. According to the above-described manufacturing method, various effects can be obtained, including the improvement of the method of arranging parts one by one, which conventionally required the most processing.
（１）振動子を一度に実装できる。(1) Vibrators can be mounted at once.
（２）プラグと振動子の支持が簡単になる。(2) Supporting the plug and vibrator becomes easier.
（３）プラグと振動子の支持強度が増す。（４）表裏の
電極の持続が容易にできる。(3) The support strength of the plug and vibrator is increased. (4) The front and back electrodes can be easily maintained.
（５）圧人気密封止の際、セットに時間がかからない。(5) It does not take much time to set when pressure-sealing.
等大巾な工数低減に寄与する。Contributes to a uniform reduction in man-hours.
第１図は、本発明の音叉型圧電振動子である。
第２図は、第１図音叉型圧電振動子のウェハー状態を示
す。第３図は、前記音叉型圧電振動子と、連続されたプ
ラグとの実装状態を示し、第４図はその後、周波数調整
、圧人気密封止した状態を示す。１・・・・・・音叉型
圧電振動子、２・・・・・・リード端子、３・・・・・
・プラグ、４・・・・・・キャップ、５・・・・・・ウ
ェハー、６・・・・・・電極。FIG. 1 shows a tuning fork type piezoelectric vibrator of the present invention. FIG. 2 shows the wafer state of the tuning fork type piezoelectric vibrator shown in FIG. FIG. 3 shows a state in which the tuning fork type piezoelectric vibrator and a continuous plug are mounted, and FIG. 4 shows a state in which the frequency has been adjusted and sealed under pressure. 1... Tuning fork type piezoelectric vibrator, 2... Lead terminal, 3...
- Plug, 4... Cap, 5... Wafer, 6... Electrode.
Claims (1)
製造方法において、音叉方向を順次互い違いに配列され
、夫々音叉方向が同一方向にある音叉型圧電振動の基部
が連結するようにエッチング加工する工程と、各音叉型
振動子面に励振電極を付ける工程と前記音叉方向が同一
方向に配列された音叉型圧電振動子をその配列毎に圧電
板材より分離する工程と、前記配列毎に分離された音叉
型圧電振動子の各連結基部を、同じく連結形成されたプ
ラグリード部材に同時に固定する工程および前記配列さ
れた音叉型圧電振動子をプラグリード部材と共に個々に
分離する工程とからなることを特徴とする圧電振動子の
製造方法。1. In a manufacturing method for obtaining a plurality of tuning fork type piezoelectric vibrators from a single piezoelectric plate material, an etching process is performed so that the bases of the tuning fork type piezoelectric vibrators whose tuning fork directions are sequentially arranged alternately and whose tuning fork directions are in the same direction are connected. a step of attaching an excitation electrode to the surface of each tuning fork type vibrator; a step of separating the tuning fork type piezoelectric vibrators whose tuning fork directions are arranged in the same direction from a piezoelectric plate material for each arrangement; and a step of separating each arrangement for each arrangement. The method comprises the steps of simultaneously fixing each connecting base of the tuned tuning fork type piezoelectric vibrators to the plug lead member which is also connected, and the step of individually separating the arranged tuning fork type piezoelectric vibrators together with the plug lead member. A method for manufacturing a piezoelectric vibrator characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6690177A JPS6046853B2 (en) | 1977-06-07 | 1977-06-07 | Manufacturing method of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6690177A JPS6046853B2 (en) | 1977-06-07 | 1977-06-07 | Manufacturing method of piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS542087A JPS542087A (en) | 1979-01-09 |
| JPS6046853B2 true JPS6046853B2 (en) | 1985-10-18 |
Family
ID=13329295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6690177A Expired JPS6046853B2 (en) | 1977-06-07 | 1977-06-07 | Manufacturing method of piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6046853B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5621198A (en) * | 1979-07-27 | 1981-02-27 | Nippon Musical Instruments Mfg | Modulation device for electronic musical instrument |
-
1977
- 1977-06-07 JP JP6690177A patent/JPS6046853B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS542087A (en) | 1979-01-09 |
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