JPS5931546A - 多重極電極 - Google Patents

多重極電極

Info

Publication number
JPS5931546A
JPS5931546A JP57140768A JP14076882A JPS5931546A JP S5931546 A JPS5931546 A JP S5931546A JP 57140768 A JP57140768 A JP 57140768A JP 14076882 A JP14076882 A JP 14076882A JP S5931546 A JPS5931546 A JP S5931546A
Authority
JP
Japan
Prior art keywords
electrode
insulator
deflection
space
multipolar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57140768A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355744B2 (enrdf_load_stackoverflow
Inventor
Masanori Idesawa
正徳 出澤
Takashi Soma
相馬　嵩
Hidekazu Goto
英一 後藤
Akira Shiraishi
明 白石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP57140768A priority Critical patent/JPS5931546A/ja
Publication of JPS5931546A publication Critical patent/JPS5931546A/ja
Publication of JPS6355744B2 publication Critical patent/JPS6355744B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP57140768A 1982-08-13 1982-08-13 多重極電極 Granted JPS5931546A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57140768A JPS5931546A (ja) 1982-08-13 1982-08-13 多重極電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57140768A JPS5931546A (ja) 1982-08-13 1982-08-13 多重極電極

Publications (2)

Publication Number Publication Date
JPS5931546A true JPS5931546A (ja) 1984-02-20
JPS6355744B2 JPS6355744B2 (enrdf_load_stackoverflow) 1988-11-04

Family

ID=15276291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57140768A Granted JPS5931546A (ja) 1982-08-13 1982-08-13 多重極電極

Country Status (1)

Country Link
JP (1) JPS5931546A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007184215A (ja) * 2005-12-06 2007-07-19 Topcon Corp 荷電ビーム照射装置、静電偏向器、静電偏向器の製造方法
JP2009076474A (ja) * 2002-06-13 2009-04-09 Toudai Tlo Ltd 電子光学鏡筒およびその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5093831B2 (ja) * 2005-10-04 2012-12-12 日本電子株式会社 静電偏向装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009076474A (ja) * 2002-06-13 2009-04-09 Toudai Tlo Ltd 電子光学鏡筒およびその製造方法
JP2007184215A (ja) * 2005-12-06 2007-07-19 Topcon Corp 荷電ビーム照射装置、静電偏向器、静電偏向器の製造方法

Also Published As

Publication number Publication date
JPS6355744B2 (enrdf_load_stackoverflow) 1988-11-04

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