JPS5929952Y2 - 真空蒸着における蒸着調節装置 - Google Patents

真空蒸着における蒸着調節装置

Info

Publication number
JPS5929952Y2
JPS5929952Y2 JP4003380U JP4003380U JPS5929952Y2 JP S5929952 Y2 JPS5929952 Y2 JP S5929952Y2 JP 4003380 U JP4003380 U JP 4003380U JP 4003380 U JP4003380 U JP 4003380U JP S5929952 Y2 JPS5929952 Y2 JP S5929952Y2
Authority
JP
Japan
Prior art keywords
vapor deposition
boat
deposition
shutter
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4003380U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56143269U (show.php
Inventor
佳興 横山
直一郎 淡野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4003380U priority Critical patent/JPS5929952Y2/ja
Publication of JPS56143269U publication Critical patent/JPS56143269U/ja
Application granted granted Critical
Publication of JPS5929952Y2 publication Critical patent/JPS5929952Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4003380U 1980-03-25 1980-03-25 真空蒸着における蒸着調節装置 Expired JPS5929952Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4003380U JPS5929952Y2 (ja) 1980-03-25 1980-03-25 真空蒸着における蒸着調節装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4003380U JPS5929952Y2 (ja) 1980-03-25 1980-03-25 真空蒸着における蒸着調節装置

Publications (2)

Publication Number Publication Date
JPS56143269U JPS56143269U (show.php) 1981-10-29
JPS5929952Y2 true JPS5929952Y2 (ja) 1984-08-27

Family

ID=29635461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4003380U Expired JPS5929952Y2 (ja) 1980-03-25 1980-03-25 真空蒸着における蒸着調節装置

Country Status (1)

Country Link
JP (1) JPS5929952Y2 (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913069A (ja) * 1982-07-09 1984-01-23 Tokuda Seisakusho Ltd スパツタリング装置

Also Published As

Publication number Publication date
JPS56143269U (show.php) 1981-10-29

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