JPS592824Y2 - 高圧稀釈ガス供給装置 - Google Patents

高圧稀釈ガス供給装置

Info

Publication number
JPS592824Y2
JPS592824Y2 JP1976003424U JP342476U JPS592824Y2 JP S592824 Y2 JPS592824 Y2 JP S592824Y2 JP 1976003424 U JP1976003424 U JP 1976003424U JP 342476 U JP342476 U JP 342476U JP S592824 Y2 JPS592824 Y2 JP S592824Y2
Authority
JP
Japan
Prior art keywords
pressure
gas
air
compression
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976003424U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5296465U (enrdf_load_stackoverflow
Inventor
朝道 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP1976003424U priority Critical patent/JPS592824Y2/ja
Publication of JPS5296465U publication Critical patent/JPS5296465U/ja
Application granted granted Critical
Publication of JPS592824Y2 publication Critical patent/JPS592824Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Molds, Cores, And Manufacturing Methods Thereof (AREA)
JP1976003424U 1976-01-19 1976-01-19 高圧稀釈ガス供給装置 Expired JPS592824Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976003424U JPS592824Y2 (ja) 1976-01-19 1976-01-19 高圧稀釈ガス供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976003424U JPS592824Y2 (ja) 1976-01-19 1976-01-19 高圧稀釈ガス供給装置

Publications (2)

Publication Number Publication Date
JPS5296465U JPS5296465U (enrdf_load_stackoverflow) 1977-07-19
JPS592824Y2 true JPS592824Y2 (ja) 1984-01-26

Family

ID=28464090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976003424U Expired JPS592824Y2 (ja) 1976-01-19 1976-01-19 高圧稀釈ガス供給装置

Country Status (1)

Country Link
JP (1) JPS592824Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5296465U (enrdf_load_stackoverflow) 1977-07-19

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