JPS5927499A - Method of producing simple and highly efficient sheet plasma - Google Patents

Method of producing simple and highly efficient sheet plasma

Info

Publication number
JPS5927499A
JPS5927499A JP57060634A JP6063482A JPS5927499A JP S5927499 A JPS5927499 A JP S5927499A JP 57060634 A JP57060634 A JP 57060634A JP 6063482 A JP6063482 A JP 6063482A JP S5927499 A JPS5927499 A JP S5927499A
Authority
JP
Japan
Prior art keywords
plasma
sheet plasma
highly efficient
sheet
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57060634A
Other languages
Japanese (ja)
Other versions
JPH0423400B2 (en
Inventor
上進 浦本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP57060634A priority Critical patent/JPS5927499A/en
Publication of JPS5927499A publication Critical patent/JPS5927499A/en
Publication of JPH0423400B2 publication Critical patent/JPH0423400B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Landscapes

  • Plasma Technology (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 シートプラズマ（厚みが数組以下で巾が大きイ布状のプ
ラズマ）は普通につくられる空間に拡がったプラズマに
はない、いろいろな利用価値がある。例えば直流放電で
つくられたシートプラズマは、陽極面積が小さくプラズ
マ中のイオンを集める面積が極めて大きく取れるので。[Detailed Description of the Invention] Sheet plasma (a cloth-like plasma with a thickness of several layers or less and a large width) has various utility values that are not found in plasmas that are normally created and spread out in a space. For example, sheet plasma created by direct current discharge has a small anode area, allowing an extremely large area to collect ions in the plasma.

一定の放電々流に対して陽極へのイオン損失を小さくし
て効率よく大電流のイオンを大面積の試料に集めること
ができる。これはイオンプレしかしながら一般に磁場を
かけてもプラズマは軸対称な円柱状になるだけでシーＩ
・プラズマは得られない。そこで放電の陰極を細長くし
たり、放電の中間電極をシートに合せてスリット型にし
てシートプラズマをつくる試みがなされているが、大電
流で且つ高いガス効率でシートプラズマをつくることに
は成功していない。It is possible to reduce ion loss to the anode for a constant discharge flow and efficiently collect large current ions onto a large area sample. However, in general, even if a magnetic field is applied, the plasma only becomes an axially symmetrical columnar shape.
・Plasma cannot be obtained. Therefore, attempts have been made to create sheet plasma by making the discharge cathode elongated and by making the discharge intermediate electrode slit-shaped to fit the sheet, but no one has succeeded in creating sheet plasma with a large current and high gas efficiency. Not yet.

この発明に於いては９通常の磁場に沿ってつくられた円
柱状の放電プラズマの両側に角形の永久磁石を配置する
だけで簡単に管径−ばいから任意の巾で、厚みが数組以
下のシートプラズマをつくることに成功した。電極は全
て普通の軸対称なものをそのま＼転用できるので、大電
流化、高ガス効率化することは極めて簡単である。原理
は図面（Ａ）　（Ｂ）に示したように、初期の軸方向磁
場＆０に新しく永久磁石の磁場（Ｂｘ　。In this invention, by simply placing rectangular permanent magnets on both sides of a cylindrical discharge plasma created along a normal magnetic field, it is possible to easily create a tube of any width from the pipe diameter to a thickness of several sets or less. succeeded in creating sheet plasma. All the electrodes can be used as normal axially symmetrical ones, so it is extremely easy to increase the current and increase the gas efficiency. The principle is as shown in drawings (A) and (B), the initial axial magnetic field &0 and the new permanent magnet magnetic field (Bx).

Ｂｙ、　Ｂｚ　）を加えたことである。Ｂｘはプラズマ
円柱を拡げ、Ｂｙはそれを圧縮する。このとき永久くな
らないことが必要条件である。Ｂｚｏと（ＢＸ。By, Bz). Bx expands the plasma cylinder and By compresses it. At this time, it is a necessary condition that it does not become permanent. Bzo and (BX.

Ｂｙ、Ｂｚ）の強さを変えることによってシートプラズ
マの巾、厚み、密度の一様性を任意に調節することがで
きる。By, Bz), the width, thickness, and uniformity of the density of the sheet plasma can be adjusted as desired by changing the strength of the plasma.

【図面の簡単な説明】[Brief explanation of the drawing]

図に於いて、１は角形永久磁石（Ｂｘ、　Ｂｙ、　ＢＺ
はその成分）、２は初期のプラズマ円柱断面。 ３は初期のプラズマ円柱とその流れの方向、４は初期の
プラズマに加えである磁場、５はシートプラズマの断面
、６は永久磁石の磁場を通過する前の円柱プラズマ流、
７は、永久磁石の磁場を通過してシート状に拡がったプ
ラズマ（目的のシートプラズマ流）。In the figure, 1 is a square permanent magnet (Bx, By, BZ
is its component), and 2 is the initial plasma cylinder cross section. 3 is the initial plasma cylinder and its flow direction, 4 is the magnetic field added to the initial plasma, 5 is the cross section of the sheet plasma, 6 is the cylindrical plasma flow before passing through the magnetic field of the permanent magnet,
7 is plasma that has passed through the magnetic field of a permanent magnet and spread into a sheet (target sheet plasma flow).

Claims (1)

【特許請求の範囲】[Claims] 磁場中の放電でつくられた円柱プラズマの両側に磁石を
配置して、プラズマを圧縮し拡げてシート状にする方法A method in which magnets are placed on both sides of a cylindrical plasma created by electric discharge in a magnetic field to compress and expand the plasma into a sheet.
JP57060634A 1982-04-12 1982-04-12 Method of producing simple and highly efficient sheet plasma Granted JPS5927499A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57060634A JPS5927499A (en) 1982-04-12 1982-04-12 Method of producing simple and highly efficient sheet plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57060634A JPS5927499A (en) 1982-04-12 1982-04-12 Method of producing simple and highly efficient sheet plasma

Publications (2)

Publication Number Publication Date
JPS5927499A true JPS5927499A (en) 1984-02-13
JPH0423400B2 JPH0423400B2 (en) 1992-04-22

Family

ID=13147936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57060634A Granted JPS5927499A (en) 1982-04-12 1982-04-12 Method of producing simple and highly efficient sheet plasma

Country Status (1)

Country Link
JP (1) JPS5927499A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6350464A (en) * 1986-08-19 1988-03-03 Toobi:Kk Method and device for sheet plasma ion plating
US5123227A (en) * 1988-04-21 1992-06-23 Snow Brand Milk Products Co., Ltd. Positioning and press-sealing means
JPH04289164A (en) * 1991-03-19 1992-10-14 Limes:Kk Method for forming film with ion plating
US5413663A (en) * 1992-06-11 1995-05-09 Tokyo Electron Limited Plasma processing apparatus
US5601653A (en) * 1993-04-30 1997-02-11 Kabushiki Kaisha Toshiba Apparatus for performing plasma process on semiconductor wafers and the like and method of performing plasma process
WO2008120430A1 (en) * 2007-03-28 2008-10-09 Shinmaywa Industries, Ltd. Sheet plasma apparatus and sheet-like plasma adjusting method
WO2008136130A1 (en) * 2007-04-24 2008-11-13 Canon Anelva Corporation Plasma generation device, and method and apparatus for forming film using the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4906331B2 (en) * 2005-12-06 2012-03-28 新明和工業株式会社 Sheet plasma deposition system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MACHINE.DESIGN.VOL.51.N09.P30-36=1979 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6350464A (en) * 1986-08-19 1988-03-03 Toobi:Kk Method and device for sheet plasma ion plating
US5123227A (en) * 1988-04-21 1992-06-23 Snow Brand Milk Products Co., Ltd. Positioning and press-sealing means
US5157895A (en) * 1988-04-21 1992-10-27 Snow Brand Milk Products, Ltd. Positioning and press-sealing means
JPH04289164A (en) * 1991-03-19 1992-10-14 Limes:Kk Method for forming film with ion plating
US5413663A (en) * 1992-06-11 1995-05-09 Tokyo Electron Limited Plasma processing apparatus
US5601653A (en) * 1993-04-30 1997-02-11 Kabushiki Kaisha Toshiba Apparatus for performing plasma process on semiconductor wafers and the like and method of performing plasma process
WO2008120430A1 (en) * 2007-03-28 2008-10-09 Shinmaywa Industries, Ltd. Sheet plasma apparatus and sheet-like plasma adjusting method
JP5261179B2 (en) * 2007-03-28 2013-08-14 新明和工業株式会社 Sheet plasma apparatus and sheet plasma adjustment method
WO2008136130A1 (en) * 2007-04-24 2008-11-13 Canon Anelva Corporation Plasma generation device, and method and apparatus for forming film using the same

Also Published As

Publication number Publication date
JPH0423400B2 (en) 1992-04-22

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