JPS5926266Y2 - 半導体感圧装置 - Google Patents

半導体感圧装置

Info

Publication number
JPS5926266Y2
JPS5926266Y2 JP15131679U JP15131679U JPS5926266Y2 JP S5926266 Y2 JPS5926266 Y2 JP S5926266Y2 JP 15131679 U JP15131679 U JP 15131679U JP 15131679 U JP15131679 U JP 15131679U JP S5926266 Y2 JPS5926266 Y2 JP S5926266Y2
Authority
JP
Japan
Prior art keywords
semiconductor pressure
stem
chip
sensitive device
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15131679U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5668135U (enrdf_load_stackoverflow
Inventor
征佑 日野田
博彦 安田
尚武 長尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP15131679U priority Critical patent/JPS5926266Y2/ja
Publication of JPS5668135U publication Critical patent/JPS5668135U/ja
Application granted granted Critical
Publication of JPS5926266Y2 publication Critical patent/JPS5926266Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP15131679U 1979-10-30 1979-10-30 半導体感圧装置 Expired JPS5926266Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15131679U JPS5926266Y2 (ja) 1979-10-30 1979-10-30 半導体感圧装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15131679U JPS5926266Y2 (ja) 1979-10-30 1979-10-30 半導体感圧装置

Publications (2)

Publication Number Publication Date
JPS5668135U JPS5668135U (enrdf_load_stackoverflow) 1981-06-06
JPS5926266Y2 true JPS5926266Y2 (ja) 1984-07-31

Family

ID=29382289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15131679U Expired JPS5926266Y2 (ja) 1979-10-30 1979-10-30 半導体感圧装置

Country Status (1)

Country Link
JP (1) JPS5926266Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3005053B2 (ja) * 1990-12-21 2000-01-31 株式会社日立製作所 被覆ワイヤの被覆除去方法
JP2549665Y2 (ja) * 1990-12-26 1997-09-30 株式会社東海理化電機製作所 圧力測定装置

Also Published As

Publication number Publication date
JPS5668135U (enrdf_load_stackoverflow) 1981-06-06

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