JPS5925461Y2 - バツグフイルタ− - Google Patents

バツグフイルタ−

Info

Publication number
JPS5925461Y2
JPS5925461Y2 JP1980061415U JP6141580U JPS5925461Y2 JP S5925461 Y2 JPS5925461 Y2 JP S5925461Y2 JP 1980061415 U JP1980061415 U JP 1980061415U JP 6141580 U JP6141580 U JP 6141580U JP S5925461 Y2 JPS5925461 Y2 JP S5925461Y2
Authority
JP
Japan
Prior art keywords
pressure air
clean room
injection port
opening
air injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980061415U
Other languages
English (en)
Japanese (ja)
Other versions
JPS567522U (enrdf_load_stackoverflow
Inventor
勝彦 西尾
Original Assignee
日工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日工株式会社 filed Critical 日工株式会社
Priority to JP1980061415U priority Critical patent/JPS5925461Y2/ja
Publication of JPS567522U publication Critical patent/JPS567522U/ja
Application granted granted Critical
Publication of JPS5925461Y2 publication Critical patent/JPS5925461Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP1980061415U 1980-05-07 1980-05-07 バツグフイルタ− Expired JPS5925461Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980061415U JPS5925461Y2 (ja) 1980-05-07 1980-05-07 バツグフイルタ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980061415U JPS5925461Y2 (ja) 1980-05-07 1980-05-07 バツグフイルタ−

Publications (2)

Publication Number Publication Date
JPS567522U JPS567522U (enrdf_load_stackoverflow) 1981-01-22
JPS5925461Y2 true JPS5925461Y2 (ja) 1984-07-26

Family

ID=29295380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980061415U Expired JPS5925461Y2 (ja) 1980-05-07 1980-05-07 バツグフイルタ−

Country Status (1)

Country Link
JP (1) JPS5925461Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837469U (enrdf_load_stackoverflow) * 1971-09-08 1973-05-08
NO129186B (enrdf_load_stackoverflow) * 1972-03-07 1974-03-11 R Flebu

Also Published As

Publication number Publication date
JPS567522U (enrdf_load_stackoverflow) 1981-01-22

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