JPS5925098A - 油回転真空ポンプの注油装置 - Google Patents

油回転真空ポンプの注油装置

Info

Publication number
JPS5925098A
JPS5925098A JP13380882A JP13380882A JPS5925098A JP S5925098 A JPS5925098 A JP S5925098A JP 13380882 A JP13380882 A JP 13380882A JP 13380882 A JP13380882 A JP 13380882A JP S5925098 A JPS5925098 A JP S5925098A
Authority
JP
Japan
Prior art keywords
oil
exhaust valve
pump
cartridge
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13380882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH022479B2 (en, 2012
Inventor
Eiji Koike
英治 小池
Kiyoji Nakano
中野　喜代次
Hirokazu Kawasaki
川崎　寛和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP13380882A priority Critical patent/JPS5925098A/ja
Publication of JPS5925098A publication Critical patent/JPS5925098A/ja
Publication of JPH022479B2 publication Critical patent/JPH022479B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP13380882A 1982-08-02 1982-08-02 油回転真空ポンプの注油装置 Granted JPS5925098A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13380882A JPS5925098A (ja) 1982-08-02 1982-08-02 油回転真空ポンプの注油装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13380882A JPS5925098A (ja) 1982-08-02 1982-08-02 油回転真空ポンプの注油装置

Publications (2)

Publication Number Publication Date
JPS5925098A true JPS5925098A (ja) 1984-02-08
JPH022479B2 JPH022479B2 (en, 2012) 1990-01-18

Family

ID=15113513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13380882A Granted JPS5925098A (ja) 1982-08-02 1982-08-02 油回転真空ポンプの注油装置

Country Status (1)

Country Link
JP (1) JPS5925098A (en, 2012)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224085U (en, 2012) * 1985-07-29 1987-02-13
JPS6248987A (ja) * 1985-08-27 1987-03-03 Toshiba Seiki Kk 油回転真空ポンプの給油装置
KR100442467B1 (ko) * 1995-07-19 2004-09-18 라이볼트 바쿰 게엠베하 오일공급부를갖춘오일밀봉된베인-타입회전진공펌프
WO2025100509A1 (ja) * 2023-11-10 2025-05-15 アルバック機工株式会社 油回転真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437692A (en) * 1977-08-31 1979-03-20 Toshiba Corp X-ray generator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437692A (en) * 1977-08-31 1979-03-20 Toshiba Corp X-ray generator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224085U (en, 2012) * 1985-07-29 1987-02-13
JPS6248987A (ja) * 1985-08-27 1987-03-03 Toshiba Seiki Kk 油回転真空ポンプの給油装置
KR100442467B1 (ko) * 1995-07-19 2004-09-18 라이볼트 바쿰 게엠베하 오일공급부를갖춘오일밀봉된베인-타입회전진공펌프
WO2025100509A1 (ja) * 2023-11-10 2025-05-15 アルバック機工株式会社 油回転真空ポンプ

Also Published As

Publication number Publication date
JPH022479B2 (en, 2012) 1990-01-18

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