JPS5923258A - 弾性表面波加速度計 - Google Patents
弾性表面波加速度計Info
- Publication number
- JPS5923258A JPS5923258A JP58118373A JP11837383A JPS5923258A JP S5923258 A JPS5923258 A JP S5923258A JP 58118373 A JP58118373 A JP 58118373A JP 11837383 A JP11837383 A JP 11837383A JP S5923258 A JPS5923258 A JP S5923258A
- Authority
- JP
- Japan
- Prior art keywords
- accelerometer
- surface acoustic
- acoustic wave
- deformable structure
- vibration source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 33
- 238000005259 measurement Methods 0.000 claims description 25
- 230000001133 acceleration Effects 0.000 claims description 23
- 238000005452 bending Methods 0.000 claims description 19
- 230000035945 sensitivity Effects 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 2
- 230000035882 stress Effects 0.000 description 27
- 230000010355 oscillation Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005520 electrodynamics Effects 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- CTKINSOISVBQLD-UHFFFAOYSA-N Glycidol Chemical compound OCC1CO1 CTKINSOISVBQLD-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000035622 drinking Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004643 material aging Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- 239000011345 viscous material Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
- G01P15/0975—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements by acoustic surface wave resonators or delay lines
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Geophysics And Detection Of Objects (AREA)
- Electrophonic Musical Instruments (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8211657 | 1982-07-02 | ||
| FR8211657A FR2529681A1 (fr) | 1982-07-02 | 1982-07-02 | Accelerometre a ondes elastiques de surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5923258A true JPS5923258A (ja) | 1984-02-06 |
Family
ID=9275636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58118373A Pending JPS5923258A (ja) | 1982-07-02 | 1983-07-01 | 弾性表面波加速度計 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4515016A (en:Method) |
| JP (1) | JPS5923258A (en:Method) |
| DE (1) | DE3323426A1 (en:Method) |
| FR (1) | FR2529681A1 (en:Method) |
| GB (1) | GB2123953B (en:Method) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2546303B1 (fr) * | 1983-05-20 | 1985-07-05 | Thomson Csf | Capteur de forces a ondes elastiques de surface |
| GB2144546B (en) * | 1983-08-04 | 1987-05-28 | Standard Telephones Cables Ltd | Surface acoustic wave accelerometer |
| FR2558955B1 (fr) * | 1984-01-27 | 1986-05-02 | Thomson Csf | Capteur de forces vectoriel a ondes elastiques de surface |
| US4676104A (en) * | 1985-08-06 | 1987-06-30 | United Technologies Corporation | Surface skimming bulk acoustic wave accelerometer |
| US4803883A (en) * | 1987-11-09 | 1989-02-14 | Rockwell International Corporation | Accelerometer |
| FR2682766B1 (fr) * | 1991-10-21 | 1995-07-13 | Asulab Sa | Capteur de mesure d'une grandeur physique. |
| RU2139546C1 (ru) * | 1998-01-12 | 1999-10-10 | Военный инженерно-космический университет им.А.Ф.Можайского | Акселерометр с преобразователями на поверхностной акустической волне |
| DE10221420A1 (de) * | 2002-05-14 | 2003-12-11 | Enocean Gmbh | Vorrichtung zur Umwandlung mechanischer Energie in elektrische Energie |
| JP4213540B2 (ja) * | 2003-08-20 | 2009-01-21 | 株式会社日立製作所 | 振動発電用振動子 |
| RU2290647C1 (ru) * | 2005-04-25 | 2006-12-27 | Российская Федерация, от имени которой выступает государственный заказчик - Федеральное агентство по атомной энергии (Росатом) | Узел крепления датчика ускорения к объекту и устройство для приклеивания датчика ускорения к узлу крепления |
| JP4345984B2 (ja) * | 2005-11-11 | 2009-10-14 | Necトーキン株式会社 | 振動検知方法、振動検知システム、バッテリレス振動センサ及び質問器 |
| JP5424379B2 (ja) * | 2007-11-30 | 2014-02-26 | セイコーインスツル株式会社 | 振動電流変換装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3233465A (en) * | 1962-07-16 | 1966-02-08 | Cons Electrodynamics Corp | Accelerometer |
| US3304773A (en) * | 1964-03-26 | 1967-02-21 | Vernon L Rogallo | Force transducer |
| US3848144A (en) * | 1973-04-11 | 1974-11-12 | Sperry Rand Corp | Acoustic delay surface wave motion transducer systems |
| DE2618759C3 (de) * | 1976-04-28 | 1979-05-23 | Meisei Electric Co., Ltd. | Beschleunigungsmesser |
| FR2396306A1 (fr) * | 1977-07-01 | 1979-01-26 | Thomson Csf | Accelerometre a ondes elastiques de surface |
| DE2757577C3 (de) * | 1977-12-23 | 1982-01-14 | Gould Inc., Cleveland, Ohio | Kraftmeßfühler mit einem einseitig eingespannten Körper mit piezoelektrischer Oberflächenwellenerzeugung |
| US4186324A (en) * | 1978-05-11 | 1980-01-29 | Schaevitz Engineering | Linear accelerometer with piezoelectric suspension |
| FR2443067A1 (fr) * | 1978-11-30 | 1980-06-27 | Thomson Csf | Accelerometre a ondes elastiques de surface |
-
1982
- 1982-07-02 FR FR8211657A patent/FR2529681A1/fr active Granted
-
1983
- 1983-06-17 US US06/505,174 patent/US4515016A/en not_active Expired - Fee Related
- 1983-06-29 DE DE19833323426 patent/DE3323426A1/de not_active Ceased
- 1983-06-30 GB GB08317811A patent/GB2123953B/en not_active Expired
- 1983-07-01 JP JP58118373A patent/JPS5923258A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB2123953B (en) | 1985-12-18 |
| FR2529681A1 (fr) | 1984-01-06 |
| DE3323426A1 (de) | 1984-01-05 |
| FR2529681B1 (en:Method) | 1984-12-14 |
| GB2123953A (en) | 1984-02-08 |
| US4515016A (en) | 1985-05-07 |
| GB8317811D0 (en) | 1983-08-03 |
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