JPS59230138A - Alarm for harmful gas - Google Patents

Alarm for harmful gas

Info

Publication number
JPS59230138A
JPS59230138A JP10624483A JP10624483A JPS59230138A JP S59230138 A JPS59230138 A JP S59230138A JP 10624483 A JP10624483 A JP 10624483A JP 10624483 A JP10624483 A JP 10624483A JP S59230138 A JPS59230138 A JP S59230138A
Authority
JP
Japan
Prior art keywords
harmful gas
detector
gas
valve
generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10624483A
Other languages
Japanese (ja)
Other versions
JPH0479407B2 (en
Inventor
Fumio Nakagawa
中川 文夫
Hiroo Matsumoto
松本 博夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP10624483A priority Critical patent/JPS59230138A/en
Publication of JPS59230138A publication Critical patent/JPS59230138A/en
Publication of JPH0479407B2 publication Critical patent/JPH0479407B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/26Devices for withdrawing samples in the gaseous state with provision for intake from several spaces

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE:To reduce the operation time for stop valves and to detect quickly the monitoring regions where a harmful gas is generated by connecting the respective gas passages connected respectively to the plural monitoring regions to one flow passage for detection interposed with a harmful gas detector. CONSTITUTION:Gas passages 2 are respectively connected to monitoring regions 1, 1, 1 such as a production room, etc. in a semiconductor plant, chemical plant, etc. and all of the passages 2 are connected to one flow passage 4 for detection interposed with a harmful gas detector 3. Stop valves 5 can be selectively operated to be closed by a selective operating mechanism 6 interlocked to the detector 3, thereby constituting a gas alarm detecting the regions 1- where the harmful gas is generated. The alarm is therefore constituted inexpensively simply by providing one detector and moreover the time for operating the stop valves is reduced and the monitoring regions where the harmful gas is generated are quickly detected.

Description

【発明の詳細な説明】 本発明は、半導体工場や化学工場等において多数の製造
室等の監視領域での不応の事故による有害ガス発生を検
知するだめの有害ガス警報器に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a harmful gas alarm device for detecting the generation of harmful gases due to unresponsive accidents in monitoring areas such as a large number of manufacturing rooms in semiconductor factories, chemical factories, etc.

従来の上記警報器としては、監視領域大々に接続した通
気路に対し、各通気路ごとに有害ガス検知器を設けたも
のとか、あるいは、監視領域大々に接続した通気路夫々
を、有害ガス検知器を介在させた1本の探査用流路に接
続するとともに、通気路夫々に開閉弁を設け、それら開
閉弁を、例えば5分おき等、所定時間ずつ順に択一的に
開いていくものがあった。
Conventional alarms include those in which harmful gas detectors are installed in each ventilation path connected to the monitoring area, or those in which a harmful gas detector is installed in each ventilation path connected to the monitoring area. It is connected to a single exploration channel with a gas detector interposed therebetween, and an on-off valve is provided in each of the ventilation channels, and these on-off valves are selectively opened in sequence for a predetermined period of time, such as every 5 minutes, for example. There was something.

ところが、前者の場合、監視領域が多くなるに連れ、備
えるべき検知器の個数か多くなり、晶価につく欠点があ
った。他方、後者の場合、開閉弁を開いてサンプリング
した後、次にサンプリングするまでに時間を要し、殊に
監視領域が多くなればなる程、非サンプリング時間が長
くなり、その途中で有害ガスが発生していてもそのこと
を検出できず、有害ガス発生の検知に遅れを生じ、安全
性に欠ける欠点があった。
However, in the former case, as the area to be monitored increases, the number of detectors that must be provided also increases, resulting in a disadvantage in terms of cost. On the other hand, in the latter case, after opening the on-off valve and sampling, it takes time to sample the next time, especially as the number of monitoring areas increases, the non-sampling time becomes longer, and harmful gas may be released in the process. Even if the gas is generated, it cannot be detected, resulting in a delay in detecting the generation of harmful gas, resulting in a lack of safety.

本発明は、これらの実情に告口して、有害ガス発生の検
知を、1個の検知器により安価に、かつ、迅速に行える
ようにすることを目的とする。
SUMMARY OF THE INVENTION In view of these circumstances, it is an object of the present invention to enable the detection of harmful gas generation to be performed inexpensively and quickly using a single detector.

この目的達成のために、本発明の有害ガス警報器は、複
数の監視領域大々に接続した通気路夫々を、有害ガス検
知器を介在させた1本の検査用流路に接続するとともに
、前記通気路夫々に各別に常1)1型開門弁を設け、前
記検知器による有害ガス検出時に1111記開閉弁を選
択的に閉じ操作する選択操作機構を備えであることを特
徴とする。
To achieve this objective, the harmful gas alarm of the present invention connects each of the ventilation channels connected to a plurality of monitoring areas to a single inspection flow channel with a harmful gas detector interposed therebetween. 1) A type 1 opening valve is provided in each of the ventilation passages, and a selection operation mechanism is provided for selectively closing the opening/closing valve 1111 when the detector detects a harmful gas.

この特徴構成によれば、検知器を1個設けるだけであり
ながら、通常時において、すべての監視領域のガスを同
時に混合状励で検知器に流入させ、監視領域のいずれか
一箇所でも有害ガスが発生す、れば、そのことを検知器
で検知し、その後番こ、開閉弁を選択的に閉じ、有害ガ
スの発生してl、N6監視領域を検出できるのである。
According to this characteristic configuration, although only one detector is provided, gases from all monitoring areas simultaneously flow into the detector in a mixed form during normal times, and noxious gases can be detected in any one part of the monitoring area. If a gas is generated, the detector detects it, and then the on-off valve is selectively closed, and the N6 monitoring area where noxious gas is generated can be detected.

したかつて、複数の監視領域に対して有害ガスの発生箇
所を検知するものでありながらも、検知器を1個設ける
だけで安価に構成でき、しかも、監視領域のいずれかで
有害ガスが発生すれば、そのことを■:jちに検知でき
、その検知後の選択的な開閉弁の閉じ操作で有害ガスが
発生している監視領域を検出するから、設定時間ずつ開
閉弁を択一的に開き操作する従来のものに比べ、開閉弁
に対する操作時間が極めて短かくて済み、有害ガスが発
生している監視領域を迅速に検出できて安全性を向上で
きた。
In the past, it was possible to detect the location of harmful gases in multiple monitoring areas, but it could be constructed at low cost by installing only one detector, and it was possible to detect the occurrence of harmful gases in any of the monitoring areas. If this is the case, it can be detected immediately, and the monitoring area where harmful gases are generated can be detected by selectively closing the on-off valve after the detection, so the on-off valve can be selectively closed for a set period of time. Compared to conventional systems that require opening and closing operations, the operating time for the on-off valve is extremely short, and the monitoring area where harmful gases are generated can be quickly detected, improving safety.

以下、本発明の實施例を図面を基にして説明する。Practical embodiments of the present invention will be described below with reference to the drawings.

半導体工場、化学工場等における製造室等の監視領域[
11+11 fil夫々に通気路(2)が接続されると
ともに、それら通気路(2)・・・のすべてが、有害ガ
ス検知器(3)を介在させた1本の探査用流路(4)に
接続され、かつ、前記通気路(2)・・・夫々に電磁式
の第1ないし第3常開型開閉弁(5a) 、 (5b)
 、 (5c)が設けられるとともに、前記検知器(3
)に連係の選択操作機構(6)によって開閉弁(5)・
・・を選択的に閉じ操作するように構成され、有害ガス
の発生している監視領域f1.I・・・を検知する有害
ガス警報器が構成されている。
Monitoring areas such as manufacturing rooms in semiconductor factories, chemical factories, etc. [
A ventilation path (2) is connected to each of the 11+11 fils, and all of these ventilation paths (2)... are connected to one exploration flow path (4) with a harmful gas detector (3) interposed therebetween. and connected to the ventilation path (2)... respectively electromagnetic first to third normally open on-off valves (5a), (5b).
, (5c), and the detector (3
) by the selection operation mechanism (6) linked to the on-off valve (5).
... is configured to selectively close the monitoring area f1. A harmful gas alarm device that detects I... is configured.

前記通気路(2)・・・夫々に、吸引ポンプ(71、流
量計(8)及び流量調整弁(9)が設けられ、監視領域
(1)・・・夫々から互いに必要量のガスを吸引して検
知器(3)に供給するように調整可能に構成されている
The ventilation path (2)... is provided with a suction pump (71), a flow meter (8), and a flow rate adjustment valve (9), and the required amount of gas is sucked from each monitoring area (1)... The sensor (3) is configured to be adjustable so as to be supplied to the detector (3).

前記選択操作機構(6)は、検知器(3)からの信号を
入力する制御回路00)と、その(ト1」御回路001
からの指令信号により前記開閉弁(5a) 、 (5b
) 、 (5c)を閉じ操作する駆動回5!6Q1)と
から構成され、検知器(3)による有害ガス発生の検知
に伴って開閉弁(5a) 。
The selection operation mechanism (6) includes a control circuit 00) which inputs a signal from the detector (3) and a control circuit 001 thereof.
The on-off valves (5a) and (5b
) and (5c), and a drive circuit 5!6Q1) that closes the valve (5a).

(5b) 、 (5c)を選択的に閉じ操作し、有害ガ
スの発生している監視領域(1)・・・を検出するよう
に構成されている。
(5b) and (5c) are selectively closed to detect monitoring areas (1) where harmful gases are generated.

具体的には、前記制御回路Oaは、開閉弁(5a) 。Specifically, the control circuit Oa is an on-off valve (5a).

(5b) 、 (5c)を例えば次のように閉じ操作す
る。
For example, (5b) and (5c) are closed as follows.

即ち、前記検知器(3)が有害ガスの発生を検知したと
き、 ■ 先ず第2及び第3開閉弁(5b) 、 (5c)を
閉じる。
That is, when the detector (3) detects the generation of harmful gas, (1) First, the second and third on-off valves (5b) and (5c) are closed.

0 次に、第2開閉弁(5b)を開くと共に、第1開閉
弁(5a)を閉じる。
0 Next, the second on-off valve (5b) is opened, and the first on-off valve (5a) is closed.

θ 最後に、第3開閉弁(5C)を開くと共に第2開閉
弁(5b)を閉じる。
θ Finally, the third on-off valve (5C) is opened and the second on-off valve (5b) is closed.

以上の操作をもって、どの監視領域(1)で有害ガスが
発生しているかを検知することができるのであり、勿論
、2箇所の監視領域で同時に有害ガスが発生していても
、その事態を検知できる。
With the above operations, it is possible to detect in which monitoring area (1) harmful gas is being generated. Of course, even if harmful gas is occurring in two monitoring areas at the same time, the situation can be detected. can.

第2図は、監視領域(1)が多数の場合の実施例を示し
、監視領M、111・・・をグループ(Gl・−・分け
し、そのグループfG)・・・ごとの中間流路(2)・
・・夫々を介して通気路(21−が探査用流路(4)に
接続されると共に、中間流路(ハ)・−・夫々に電磁式
の常開型開閉弁α3が設けられ、選択操作機構(6)に
より、上述実施例におけると同様の手順で、先ず、有害
ガスを発生してむするグループ(G)を検出し、その後
、有害ガスが発生されているグループ(Glに対して上
述と同様の手順で第1ないし第3開閉弁(5a) 、 
(5b) 、 (5c)  を開閉操作して、最終的に
有害ガスの発生源である監視領域(1)を検出するよう
に構成されている。
FIG. 2 shows an embodiment in which there are a large number of monitoring areas (1), in which the monitoring areas M, 111... are divided into groups (Gl..., and the intermediate flow paths for each group fG)... (2)・
...The ventilation path (21-) is connected to the exploration flow path (4) through each, and an electromagnetic normally open on-off valve α3 is provided in each intermediate flow path (c). Using the operating mechanism (6), in the same procedure as in the above embodiment, first, the group (G) that generates harmful gas is detected, and then the group (Gl) in which harmful gas is generated is detected. The first to third on-off valves (5a) in the same manner as described above,
(5b) and (5c) are opened and closed to finally detect the monitoring area (1) which is the source of harmful gas.

尚、通気路(2)の本数が多い場合には、マイコンより
前記選択操作機構(6)を構成するようにしても良い。
In addition, when the number of ventilation passages (2) is large, the selection operation mechanism (6) may be constructed from a microcomputer.

また、前記吸引ポンプ(7)を探査用流路(4)の排出
側に設けても良い。
Further, the suction pump (7) may be provided on the discharge side of the exploration channel (4).

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の有害ガス警報器の実施例を示し、第1図
はフローシート、第2図は他の実施例を示すフローシー
トである。 (1)・・・監視領域、(2)・・・通気路、(3)・
・・検出器、(4)・・・探査用流路、(5)・・・常
開型開閉弁、(6)・・・選択操作機構。
The drawings show an embodiment of the harmful gas alarm of the present invention, with FIG. 1 being a flow sheet and FIG. 2 being a flow sheet showing another embodiment. (1)...monitoring area, (2)...ventilation path, (3)...
...detector, (4) ... flow path for exploration, (5) ... normally open type on-off valve, (6) ... selection operation mechanism.

Claims (1)

【特許請求の範囲】[Claims] 複数の監視領域大々に接続した通気路夫々を、有害ガス
検知器を介在させた1本の探査用流路に接続するととも
に、前記・通気路夫々に各別に常開型開閉弁を設け、前
記検知器による有害ガス検出時に前記開閉弁を選択的に
閉じ操作する選択操作機構を備えであることを特徴とす
る有害ガス警報器。
Each of the ventilation passages connected to the plurality of monitoring areas is connected to one exploration flow passage with a harmful gas detector interposed therebetween, and each of the ventilation passages is provided with a normally open on-off valve, A harmful gas alarm comprising a selection operation mechanism that selectively closes the on-off valve when the detector detects a harmful gas.
JP10624483A 1983-06-11 1983-06-11 Alarm for harmful gas Granted JPS59230138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10624483A JPS59230138A (en) 1983-06-11 1983-06-11 Alarm for harmful gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10624483A JPS59230138A (en) 1983-06-11 1983-06-11 Alarm for harmful gas

Publications (2)

Publication Number Publication Date
JPS59230138A true JPS59230138A (en) 1984-12-24
JPH0479407B2 JPH0479407B2 (en) 1992-12-15

Family

ID=14428696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10624483A Granted JPS59230138A (en) 1983-06-11 1983-06-11 Alarm for harmful gas

Country Status (1)

Country Link
JP (1) JPS59230138A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140630U (en) * 1987-03-05 1988-09-16
JP2015094641A (en) * 2013-11-11 2015-05-18 新コスモス電機株式会社 Environment monitoring system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103411802A (en) * 2013-08-14 2013-11-27 哈尔滨东方报警设备开发有限公司 Explosion-proof suction pump with sound and light alarming, flow rate display, and regulation functions

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441518A (en) * 1977-09-09 1979-04-02 Nippon Kokan Kk Method of constructing reinforced concrete

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441518A (en) * 1977-09-09 1979-04-02 Nippon Kokan Kk Method of constructing reinforced concrete

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140630U (en) * 1987-03-05 1988-09-16
JP2015094641A (en) * 2013-11-11 2015-05-18 新コスモス電機株式会社 Environment monitoring system

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Publication number Publication date
JPH0479407B2 (en) 1992-12-15

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