JPS59228105A - フイルムの厚さ測定装置 - Google Patents
フイルムの厚さ測定装置Info
- Publication number
- JPS59228105A JPS59228105A JP58102842A JP10284283A JPS59228105A JP S59228105 A JPS59228105 A JP S59228105A JP 58102842 A JP58102842 A JP 58102842A JP 10284283 A JP10284283 A JP 10284283A JP S59228105 A JPS59228105 A JP S59228105A
- Authority
- JP
- Japan
- Prior art keywords
- film
- light
- thickness
- measurement
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 20
- 238000005259 measurement Methods 0.000 claims description 45
- 238000005192 partition Methods 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 77
- 230000003287 optical effect Effects 0.000 description 31
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229920002799 BoPET Polymers 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000004513 sizing Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58102842A JPS59228105A (ja) | 1983-06-10 | 1983-06-10 | フイルムの厚さ測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58102842A JPS59228105A (ja) | 1983-06-10 | 1983-06-10 | フイルムの厚さ測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59228105A true JPS59228105A (ja) | 1984-12-21 |
JPH0519081B2 JPH0519081B2 (enrdf_load_stackoverflow) | 1993-03-15 |
Family
ID=14338219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58102842A Granted JPS59228105A (ja) | 1983-06-10 | 1983-06-10 | フイルムの厚さ測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59228105A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0298609A (ja) * | 1988-10-06 | 1990-04-11 | Dainippon Printing Co Ltd | 合成樹脂製容器の肉厚検査装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5134754A (ja) * | 1974-09-18 | 1976-03-24 | Oki Electric Ind Co Ltd | Setsuchakuzainoatsusakenshutsusochi |
JPS52153468A (en) * | 1976-06-15 | 1977-12-20 | Fujitsu Ltd | Thickness measuring method of substrates |
-
1983
- 1983-06-10 JP JP58102842A patent/JPS59228105A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5134754A (ja) * | 1974-09-18 | 1976-03-24 | Oki Electric Ind Co Ltd | Setsuchakuzainoatsusakenshutsusochi |
JPS52153468A (en) * | 1976-06-15 | 1977-12-20 | Fujitsu Ltd | Thickness measuring method of substrates |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0298609A (ja) * | 1988-10-06 | 1990-04-11 | Dainippon Printing Co Ltd | 合成樹脂製容器の肉厚検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0519081B2 (enrdf_load_stackoverflow) | 1993-03-15 |
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