JPS59227032A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS59227032A
JPS59227032A JP10093183A JP10093183A JPS59227032A JP S59227032 A JPS59227032 A JP S59227032A JP 10093183 A JP10093183 A JP 10093183A JP 10093183 A JP10093183 A JP 10093183A JP S59227032 A JPS59227032 A JP S59227032A
Authority
JP
Japan
Prior art keywords
magnetic
substrate
film
magnetic recording
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10093183A
Other languages
Japanese (ja)
Inventor
Satoshi Yoshihara
吉原 諭
Shigeji Iijima
飯島 繁治
Masaaki Matsushima
正明 松島
Hiroyoshi Kishi
博義 岸
Mitsuharu Sawamura
光治 沢村
Eizo Sasamori
笹森 栄造
Katsuhiko Takano
勝彦 高野
Susumu Ito
進 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP10093183A priority Critical patent/JPS59227032A/en
Priority to US06/615,381 priority patent/US4741967A/en
Publication of JPS59227032A publication Critical patent/JPS59227032A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582Record carriers characterised by the selection of the material or by the structure or form
    • G11B11/10586Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material

Landscapes

  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To provide corrosion resistance superior to the existing medium without damaging the magnetic characteristic in writing and erasing from the substrate side in a transparent substrate and without damaging the magnetic characteristic in an oxidized state in writing and erasing from the magnetic recording layer side in an opaque substrate by oxidizing the surface of an amorphous magnetic thin film on heating, and forming a corrosion resistant layer thereon. CONSTITUTION:An amorphous magnetic film is provided on the surface thereof with a corrosion resistant layer formed by heating and oxidizing the surface at >=130 deg.C in an oxygen-contg. gas in a magnetic recording medium having a recording layer of said magnetic film formed on a substrate. Substrates consisting of glass, quartz, polycarbonate, metal, etc. are used as said substrate, and GdTbFe, GdTbFeCo, GdCoGdFe, TbFe, DyFe, TbDyFe, etc. are used as the amorphous magnetic film. Although the thickness of the corrosion resistant layer formed on the surface of the amorphous magnetic film by oxidation on heating may differ in accordance with the thickness of the amorphous magnetic film, the thickness is regulated preferably to 50-1,000 deg.C when the thickness of the film is 2,000 deg.C.

Description

【発明の詳細な説明】 本発明は、光磁気メモリー、磁気記録、表示素子などに
!1]いられる磁気記録媒体に関し、特に磁気カー効果
あるいはファラデー効果などの磁気光学効果を用いて読
み出すことのできる光磁気記録媒体に4−=ける改良に
関する。
[Detailed Description of the Invention] The present invention is applicable to magneto-optical memory, magnetic recording, display elements, etc. 1] This invention relates to magnetic recording media, and particularly relates to improvements in magneto-optical recording media that can be read using magneto-optical effects such as the magnetic Kerr effect or the Faraday effect.

従来、例えば光磁気記録媒体としてはMnB1 。Conventionally, for example, MnB1 has been used as a magneto-optical recording medium.

Mu Cu 11 iなどの多結晶薄膜、GdCo 、
 GdFe 、 TbFe 。
Polycrystalline thin films such as Mu Cu 11i, GdCo,
GdFe, TbFe.

I)yl’c   、  GdTbFe   、  T
I:+])yFe   、  GdFeCo   、 
 TbFeCo   。
I) yl'c, GdTbFe, T
I:+])yFe, GdFeCo,
TbFeCo.

(、id Tl)Coなどの非晶質薄膜、0clIGな
どの単結晶薄膜などが知られている。
Amorphous thin films such as (,id Tl)Co and single crystal thin films such as 0clIG are known.

これらの薄膜のうち、大面積の薄膜を室温近傍の温度で
製作する際の製膜性、信号を小さな光熱エネルギーで書
き込むための書き込み効率、および朋き込まれた信号を
Sハ比よく読み出すための読み出し効率を勘案して、最
近では前記非晶質薄膜が光熱記録媒体として優れている
と考えられている。特に、GdTbFeはカー回転角も
犬きく、150℃前後のキューリ一点を持つので光熱磁
気記録媒体として最適である。
Among these thin films, there are important factors such as film formability when manufacturing large-area thin films at temperatures near room temperature, writing efficiency for writing signals with small photothermal energy, and readout of written signals with high efficiency compared to S. Considering the readout efficiency, the amorphous thin film is recently considered to be excellent as a photothermal recording medium. In particular, GdTbFe has a sharp Kerr rotation angle and a single Curie point of around 150° C., making it optimal as a photothermal magnetic recording medium.

しかしながら、一般にGd’l”bFc  等の光熱磁
気記録媒体をはじめとする磁気記録媒体に用いられろ非
晶質磁性体は、剛食性が悪いという欠点を持っている。
However, amorphous magnetic materials generally used in magnetic recording media, including photothermal magnetic recording media such as Gd'l''bFc, have a drawback of poor rigidity.

すなわち、大気、水蒸気に触れると磁気特性が低下し、
最終的には完全に酸化されて透明化するに至る。
In other words, when it comes into contact with the atmosphere or water vapor, its magnetic properties decrease,
Eventually, it will be completely oxidized and become transparent.

このような欠点を除くために、従来から、例えば光熱磁
気記録媒体では記録層の上に透明物質の保護カバー、例
えば5102、SiOの保護層を設けたり、さらに不活
性ガスにより封じ込めたディスク状記録媒体が提案され
ている。
In order to eliminate such drawbacks, for example, in photothermal magnetic recording media, a protective cover made of a transparent material such as 5102 or SiO is provided on the recording layer, and a disk-shaped recording material sealed with an inert gas has been used. medium is proposed.

本発明の目的は、磁性特性を損ねることなく、磁性記録
層の耐腐食性を向上さぜた磁気記録媒体を提供すること
にある。
An object of the present invention is to provide a magnetic recording medium in which the corrosion resistance of the magnetic recording layer is improved without impairing the magnetic properties.

本発明の目的は、次の光熱磁気記録媒体により達成され
る。基板上に形成された、非晶質磁性膜の記録層を有す
る磁気記録媒体において、該磁性膜が、その表面を酸素
含有ガス中で160℃以上の詔5度において加熱酸化す
ることによって形成された面11吊食層をその表面に肩
することを特徴とする磁気記録媒体、。
The object of the present invention is achieved by the following photothermal magnetic recording medium. In a magnetic recording medium having a recording layer of an amorphous magnetic film formed on a substrate, the magnetic film is formed by heating and oxidizing the surface of the magnetic film in an oxygen-containing gas at 160° C. or more at 5° C. 1. A magnetic recording medium, characterized in that the surface thereof is covered with a hanging layer.

上記の基板としてはガラス、石英、ポリカーボネート、
ポリエチレンテレフタレート(例えば、藺品名マイラー
)金属基板などからなるものが用いられ、寸だ非晶質磁
性膜としてばGdTbFc 。
The above substrates include glass, quartz, polycarbonate,
A metal substrate made of polyethylene terephthalate (for example, mylar) is used, and an example of an amorphous magnetic film is GdTbFc.

C;dTbFcco 、 GdCo 、GdFe 、 
ThFe 、 DyFc 、 TbDyFeなどが用い
られる。
C; dTbFcco, GdCo, GdFe,
ThFe, DyFc, TbDyFe, etc. are used.

磁性記録層の表面の加熱酸化は、基板上に非晶質磁性薄
膜を常法によって成膜し、これを酸素含有ガス、好1し
くけ空気中において130℃以上の温度におい−C行な
われる。あるいは、磁性記録層をスパッタまたけ蒸着に
より成膜後、同じ真空槽内で基板を加熱し、酸素ガスを
導入して酸化することもできる。加熱温度の上限は、好
1しくけ400℃であり、この温度以上での加熱は、結
晶がおこり垂直磁化膜でなくなるので好ましくない。
Thermal oxidation of the surface of the magnetic recording layer is carried out by forming an amorphous magnetic thin film on a substrate by a conventional method, and performing -C in an oxygen-containing gas, preferably air, at a temperature of 130 DEG C. or higher. Alternatively, after forming the magnetic recording layer by sputter straddling deposition, the substrate can be heated in the same vacuum chamber and oxidized by introducing oxygen gas. The upper limit of the heating temperature is preferably 400° C.; heating above this temperature is not preferable because crystallization occurs and the film is no longer a perpendicularly magnetized film.

特に好ましい加熱条件u13D〜250℃において、5
〜120分間である。
Under particularly preferable heating conditions u13D to 250°C, 5
~120 minutes.

加熱酸化により非晶質磁性膜の表面に形成される1側層
食層の厚みは、非晶質磁性薄膜の厚みによっても異なる
が2000 X の時には好寸しくは50’〜1000
X  である。耐腐食層の厚みが下限値よりも小さけれ
ば、磁性記録層の腐食を防止することができず、1だ上
限値を越えると、書き込み感度、読み出し感度が低下す
る。
The thickness of the first-side layer formed on the surface of the amorphous magnetic film by thermal oxidation varies depending on the thickness of the amorphous magnetic thin film, but at 2000×, the thickness is preferably 50′ to 1000×.
It is X. If the thickness of the corrosion-resistant layer is smaller than the lower limit, corrosion of the magnetic recording layer cannot be prevented, and if it exceeds the upper limit by 1, write sensitivity and read sensitivity decrease.

本発明を光熱磁気記録媒体に用いる場合は前記のように
加熱酸化によって4腐食層を形成したのち、その上に更
に周知の保獲層捷たは保護層を兼ねた反射層、反射防止
層、断熱層などを設けて而」腐食性を更に向上させるこ
とができる。捷た基板と磁性記録層との間に基板側から
順次に、断熱層、反射防止層を設けることもできる。さ
らに非晶質線f1合金中にC,、Siもしくは・1・1
2寸たはSl  お、Lび(’I゛、あろい1dCrお
よびA/!  などの池の元素を含有さぜることによっ
て優れた面1腐食性を実現することができる。
When the present invention is used in a photothermal magnetic recording medium, after forming four corrosion layers by thermal oxidation as described above, a well-known retention layer or a reflective layer that also serves as a protective layer, an antireflection layer, Corrosion resistance can be further improved by providing a heat insulating layer or the like. A heat insulating layer and an antireflection layer can also be provided between the twisted substrate and the magnetic recording layer in this order from the substrate side. Furthermore, in the amorphous wire f1 alloy, C, Si or .1.1
Excellent surface 1 corrosion resistance can be achieved by containing elements such as 2 dimensions or Sl, L ('I゛, 1dCr and A/!).

本発明に基づいて形成された光熱磁気記録媒体id1、
周知のエアーザンドウインチ構造および貼り合せ+j7
I造のいずれによってもよいが不透明基板の場合には、
エアーザンドウィッチ構造が好捷しい。
A photothermal magnetic recording medium id1 formed based on the present invention,
Well-known air sand winch structure and bonding +j7
Any type of I structure may be used, but in the case of an opaque substrate,
Air Sandwich structure is good.

本発明によれば、非晶質磁性薄膜の表面を加熱酸化して
面1腐食層を形成することによって、例えば光熱磁気記
録媒体の場合、透明基板においては基板側から11込み
、消去において磁気特性を損ねることなく、捷だ不透明
基板においては磁性記録層側からの−書き込みおよび消
去において酸化された状連での磁気特性を損ねることな
〈従来のものよりも優れた耐腐食性を有する非晶質磁性
体による光熱磁気記録媒体が提供される。
According to the present invention, by heating and oxidizing the surface of an amorphous magnetic thin film to form a surface 1 corrosion layer, for example, in the case of a photothermal magnetic recording medium, in the case of a transparent substrate, magnetic properties are In an opaque substrate, writing and erasing from the magnetic recording layer side can be performed without impairing the magnetic properties of the oxidized structure. A photothermal magnetic recording medium made of a magnetic material is provided.

以下に光熱磁気記録媒体に用いた実施例を示し−C1本
発明をさらに詳細に説明する。
The present invention will be described in more detail below by showing examples in which it is used in a photothermal magnetic recording medium.

実施例1 ガラス基板上に高周波スパッタ装置を使用して(,1d
Tl)FeCoを1500Xの膜厚で成膜して10枚の
試料を作製した。これらの試料の中の9枚を、それぞれ
空気中において80℃、90℃、ioo℃、110℃、
120℃、160℃、140℃、150℃および160
℃において60分間加熱して酸化し、磁性記録層の表面
に耐腐食層を形成した。これらの試別を、加熱酸化処理
を施さない試別とともに70℃、相対湿度85チ の恒
温恒湿槽において耐腐食試験を行な   □つた。結果
は第1表のとおりである。        1第1図は
耐腐食試験後(100時間後)の各試料のカー回転角を
ガラス面側から測定した結果を示したものであって、横
軸に各試料の加熱温度をとり、縦軸にはカー回転角の変
化を加熱酸化前の値に対する比で示した1、第1図から
明らかなように、160℃以上の温度において加熱した
試料は、加熱酸化後においても、寸た面1腐食試験後に
おいてもガラス面側からのカー回転角に変化が認められ
なかった。
Example 1 Using a high frequency sputtering device on a glass substrate (,1d
Tl) FeCo was formed into a film with a thickness of 1500X to prepare 10 samples. Nine of these samples were heated in air at 80°C, 90°C, ioo°C, 110°C,
120℃, 160℃, 140℃, 150℃ and 160℃
The magnetic recording layer was oxidized by heating for 60 minutes to form a corrosion-resistant layer on the surface of the magnetic recording layer. These trials, together with the trials that were not subjected to heating and oxidation treatment, were subjected to corrosion resistance tests in a constant temperature and humidity chamber at 70°C and relative humidity of 85 degrees. The results are shown in Table 1. 1 Figure 1 shows the results of measuring the Kerr rotation angle of each sample from the glass surface side after the corrosion resistance test (100 hours later).The horizontal axis represents the heating temperature of each sample, and the vertical axis represents the heating temperature of each sample. Figure 1 shows the change in the Kerr rotation angle as a ratio to the value before heating and oxidation.As is clear from Figure 1, the sample heated at a temperature of 160°C or higher has a surface area of 1 even after heating and oxidation. Even after the corrosion test, no change was observed in the Kerr rotation angle from the glass surface side.

実施例2 カラス基板」二にボリアリレート(ユニチカ社製商品名
 IJ−100)からなる厚み7000 X  の断熱
層、さらにその上に、SiOからなる厚み900 Xの
反射防止層を設けた。反射防止層の上に高周波スパッタ
装置を用いてGd、1.”1)Feを2000 Xの膜
厚で成膜した。ついで、空気中において140 ℃で6
0分間加熱して0dTl)Fc  膜表面上に面j腐食
層を形成した。
Example 2 A 7000× thick heat insulating layer made of polyarylate (trade name IJ-100, manufactured by Unitika) was provided on a glass substrate, and an antireflection layer made of SiO and 900× thick was further provided thereon. Gd was applied onto the antireflection layer using a high frequency sputtering device.1. 1) Fe was formed into a film with a thickness of 2000X. Then, it was heated at 140°C in air for 6
A surface corrosion layer was formed on the surface of the 0dTl)Fc film by heating for 0 minutes.

この、ようにして得られた光熱磁気記録媒体を70℃、
相対湿度85係において1側層食試験を行なった。10
0時間後においてもピンホールの発生が認められなかっ
た。
The photothermal magnetic recording medium thus obtained was heated at 70°C.
A one-sided layer eclipse test was conducted at a relative humidity of 85%. 10
No pinholes were observed even after 0 hours.

実施例6 基板として厚み1.5のアルミニウム板を用い、この上
r(ポリイミド頁日立化成社製、商品名PIQ)からな
る厚み2μのi熱層、その上に高周波スパッタ装置に、
よってCd Coを15ooXの膜厚で成膜し、さらに
、SiOからなる反射防止層を設けた。同じr’c空4
;IJ中で、((1もれた光熱記録媒体を160℃に加
熱し、酸素カスを309 mTorrまで導入して磁性
記録層の表面を酸化した。
Example 6 An aluminum plate with a thickness of 1.5 mm was used as a substrate, and on top of this was an i-thermal layer with a thickness of 2 μm made of polyimide (manufactured by Hitachi Chemical Co., Ltd., trade name PIQ), and on top of that was a high-frequency sputtering device.
Therefore, a film of Cd Co was formed to a thickness of 15 ooX, and an antireflection layer made of SiO was further provided. Same r'c sky 4
; In IJ, ((1) The leaked photothermal recording medium was heated to 160° C., and oxygen gas was introduced to 309 mTorr to oxidize the surface of the magnetic recording layer.

こうして処理した光熱記録媒体を70℃、相対湿度85
%において100時間、耐爬食試験を行なったが、ピン
ホール状の腐蝕発生は認められながつ lこ。
The photothermal recording medium thus treated was heated to 70°C and relative humidity was 85°C.
%, a 100 hour corrosion resistance test was conducted, but no pinhole-like corrosion was observed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は100時間の1li11謎食試験後の実施例1
における各試料の加熱温度と、加熱酸化前と面]腐食試
験後におけるカー回転角の変化との関係を示す図表であ
る。 東京都大田区下丸子3丁目30番 2号キャノン株式会社内 0発 明 者 伊藤進 東京都太田区下丸子3丁目30番 2号キャノン株式会社内
Figure 1 shows Example 1 after the 1li11 mystery food test for 100 hours.
FIG. 2 is a chart showing the relationship between the heating temperature of each sample and the change in Kerr rotation angle before heating oxidation and after the surface corrosion test. FIG. Canon Co., Ltd., 3-30-2 Shimomaruko, Ota-ku, Tokyo Inventor: Susumu Ito, Canon Co., Ltd., 3-30-2 Shimomaruko, Ota-ku, Tokyo

Claims (1)

【特許請求の範囲】[Claims] 1 基板」二に形成された非晶質磁性膜の記録層をて加
熱酸化することによって形成された耐腐食層を有するこ
とを特徴とする磁気記録媒体。
1. A magnetic recording medium comprising a corrosion-resistant layer formed by heating and oxidizing a recording layer of an amorphous magnetic film formed on a substrate.
JP10093183A 1983-06-08 1983-06-08 Magnetic recording medium Pending JPS59227032A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10093183A JPS59227032A (en) 1983-06-08 1983-06-08 Magnetic recording medium
US06/615,381 US4741967A (en) 1983-06-08 1984-05-30 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10093183A JPS59227032A (en) 1983-06-08 1983-06-08 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS59227032A true JPS59227032A (en) 1984-12-20

Family

ID=14287090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10093183A Pending JPS59227032A (en) 1983-06-08 1983-06-08 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS59227032A (en)

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