JPS59225339A - 結晶面傾き角度測定装置 - Google Patents

結晶面傾き角度測定装置

Info

Publication number
JPS59225339A
JPS59225339A JP58101555A JP10155583A JPS59225339A JP S59225339 A JPS59225339 A JP S59225339A JP 58101555 A JP58101555 A JP 58101555A JP 10155583 A JP10155583 A JP 10155583A JP S59225339 A JPS59225339 A JP S59225339A
Authority
JP
Japan
Prior art keywords
inclination angle
value
specimen
rotating
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58101555A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459582B2 (enrdf_load_stackoverflow
Inventor
Tomoyuki Haga
知行 羽賀
Yoshinori Hosokawa
細川　好則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP58101555A priority Critical patent/JPS59225339A/ja
Publication of JPS59225339A publication Critical patent/JPS59225339A/ja
Publication of JPH0459582B2 publication Critical patent/JPH0459582B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58101555A 1983-06-04 1983-06-04 結晶面傾き角度測定装置 Granted JPS59225339A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58101555A JPS59225339A (ja) 1983-06-04 1983-06-04 結晶面傾き角度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58101555A JPS59225339A (ja) 1983-06-04 1983-06-04 結晶面傾き角度測定装置

Publications (2)

Publication Number Publication Date
JPS59225339A true JPS59225339A (ja) 1984-12-18
JPH0459582B2 JPH0459582B2 (enrdf_load_stackoverflow) 1992-09-22

Family

ID=14303663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58101555A Granted JPS59225339A (ja) 1983-06-04 1983-06-04 結晶面傾き角度測定装置

Country Status (1)

Country Link
JP (1) JPS59225339A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2694049B2 (ja) * 1991-05-14 1997-12-24 ブイ―レイ イメージング コーポレイション 物体の内部構造の像を得るための方法
JP2016505816A (ja) * 2012-11-16 2016-02-25 コリア リサーチ インスティチュート オブ スタンダーズ アンド サイエンス 高分解能ｘ線ロッキングカーブ測定を用いた単結晶ウェーハの面方位測定方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320354A (en) * 1976-08-10 1978-02-24 Rigaku Denki Co Ltd Method of measuring deviation angle of cross section of signal crystal
JPS5339785A (en) * 1976-09-24 1978-04-11 Rigaku Denki Co Ltd Apparatus for inspecting cross section of single crystal line plate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320354A (en) * 1976-08-10 1978-02-24 Rigaku Denki Co Ltd Method of measuring deviation angle of cross section of signal crystal
JPS5339785A (en) * 1976-09-24 1978-04-11 Rigaku Denki Co Ltd Apparatus for inspecting cross section of single crystal line plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2694049B2 (ja) * 1991-05-14 1997-12-24 ブイ―レイ イメージング コーポレイション 物体の内部構造の像を得るための方法
JP2016505816A (ja) * 2012-11-16 2016-02-25 コリア リサーチ インスティチュート オブ スタンダーズ アンド サイエンス 高分解能ｘ線ロッキングカーブ測定を用いた単結晶ウェーハの面方位測定方法
US9678023B2 (en) 2012-11-16 2017-06-13 Korea Research Institute Of Standards And Science Method of determining surface orientation of single crystal wafer

Also Published As

Publication number Publication date
JPH0459582B2 (enrdf_load_stackoverflow) 1992-09-22

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