JPS59224526A - 微小振動の検知方法 - Google Patents

微小振動の検知方法

Info

Publication number
JPS59224526A
JPS59224526A JP10005183A JP10005183A JPS59224526A JP S59224526 A JPS59224526 A JP S59224526A JP 10005183 A JP10005183 A JP 10005183A JP 10005183 A JP10005183 A JP 10005183A JP S59224526 A JPS59224526 A JP S59224526A
Authority
JP
Japan
Prior art keywords
vibrator
piezoelectric element
oscillation
vibration
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10005183A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0418608B2 (enrdf_load_stackoverflow
Inventor
Toshio Ogawa
敏夫 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP10005183A priority Critical patent/JPS59224526A/ja
Publication of JPS59224526A publication Critical patent/JPS59224526A/ja
Publication of JPH0418608B2 publication Critical patent/JPH0418608B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP10005183A 1983-06-04 1983-06-04 微小振動の検知方法 Granted JPS59224526A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10005183A JPS59224526A (ja) 1983-06-04 1983-06-04 微小振動の検知方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10005183A JPS59224526A (ja) 1983-06-04 1983-06-04 微小振動の検知方法

Publications (2)

Publication Number Publication Date
JPS59224526A true JPS59224526A (ja) 1984-12-17
JPH0418608B2 JPH0418608B2 (enrdf_load_stackoverflow) 1992-03-27

Family

ID=14263692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10005183A Granted JPS59224526A (ja) 1983-06-04 1983-06-04 微小振動の検知方法

Country Status (1)

Country Link
JP (1) JPS59224526A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107481A (ja) * 2008-10-31 2010-05-13 Kyoraku Sangyo Kk 振動検出装置
JP2010107482A (ja) * 2008-10-31 2010-05-13 Kyoraku Sangyo Kk 振動検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567025A (en) * 1979-06-29 1981-01-24 Nissan Motor Co Ltd Vibration sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567025A (en) * 1979-06-29 1981-01-24 Nissan Motor Co Ltd Vibration sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107481A (ja) * 2008-10-31 2010-05-13 Kyoraku Sangyo Kk 振動検出装置
JP2010107482A (ja) * 2008-10-31 2010-05-13 Kyoraku Sangyo Kk 振動検出装置

Also Published As

Publication number Publication date
JPH0418608B2 (enrdf_load_stackoverflow) 1992-03-27

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