JPS59222930A - 電子ビ−ム露光におけるマ−ク位置検出方法及び装置 - Google Patents

電子ビ−ム露光におけるマ−ク位置検出方法及び装置

Info

Publication number
JPS59222930A
JPS59222930A JP58095801A JP9580183A JPS59222930A JP S59222930 A JPS59222930 A JP S59222930A JP 58095801 A JP58095801 A JP 58095801A JP 9580183 A JP9580183 A JP 9580183A JP S59222930 A JPS59222930 A JP S59222930A
Authority
JP
Japan
Prior art keywords
mark
peak
electron beam
level
detection signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58095801A
Other languages
English (en)
Japanese (ja)
Other versions
JPH047091B2 (enExample
Inventor
Kazumi Iwatate
岩立　和巳
Kenji Kurihara
健二 栗原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP58095801A priority Critical patent/JPS59222930A/ja
Publication of JPS59222930A publication Critical patent/JPS59222930A/ja
Publication of JPH047091B2 publication Critical patent/JPH047091B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
JP58095801A 1983-06-01 1983-06-01 電子ビ−ム露光におけるマ−ク位置検出方法及び装置 Granted JPS59222930A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58095801A JPS59222930A (ja) 1983-06-01 1983-06-01 電子ビ−ム露光におけるマ−ク位置検出方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58095801A JPS59222930A (ja) 1983-06-01 1983-06-01 電子ビ−ム露光におけるマ−ク位置検出方法及び装置

Publications (2)

Publication Number Publication Date
JPS59222930A true JPS59222930A (ja) 1984-12-14
JPH047091B2 JPH047091B2 (enExample) 1992-02-07

Family

ID=14147531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58095801A Granted JPS59222930A (ja) 1983-06-01 1983-06-01 電子ビ−ム露光におけるマ−ク位置検出方法及び装置

Country Status (1)

Country Link
JP (1) JPS59222930A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62145401A (ja) * 1985-12-20 1987-06-29 Komatsu Ltd 無人車の誘導装置
JPS62156817A (ja) * 1985-12-28 1987-07-11 Advantest Corp 電子ビ−ム露光装置のマ−ク検出器
JPS62298114A (ja) * 1986-06-18 1987-12-25 Hitachi Ltd 電子ビ−ム露光装置におけるマ−ク位置検出装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62145401A (ja) * 1985-12-20 1987-06-29 Komatsu Ltd 無人車の誘導装置
JPS62156817A (ja) * 1985-12-28 1987-07-11 Advantest Corp 電子ビ−ム露光装置のマ−ク検出器
JPS62298114A (ja) * 1986-06-18 1987-12-25 Hitachi Ltd 電子ビ−ム露光装置におけるマ−ク位置検出装置

Also Published As

Publication number Publication date
JPH047091B2 (enExample) 1992-02-07

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