JPS59216121A - 光ビ−ム走査装置 - Google Patents

光ビ−ム走査装置

Info

Publication number
JPS59216121A
JPS59216121A JP58091127A JP9112783A JPS59216121A JP S59216121 A JPS59216121 A JP S59216121A JP 58091127 A JP58091127 A JP 58091127A JP 9112783 A JP9112783 A JP 9112783A JP S59216121 A JPS59216121 A JP S59216121A
Authority
JP
Japan
Prior art keywords
light beam
mirror
concave cylindrical
deflection
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58091127A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0514884B2 (enrdf_load_stackoverflow
Inventor
Ken Hirasawa
平澤　憲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP58091127A priority Critical patent/JPS59216121A/ja
Publication of JPS59216121A publication Critical patent/JPS59216121A/ja
Publication of JPH0514884B2 publication Critical patent/JPH0514884B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP58091127A 1983-05-24 1983-05-24 光ビ−ム走査装置 Granted JPS59216121A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58091127A JPS59216121A (ja) 1983-05-24 1983-05-24 光ビ−ム走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58091127A JPS59216121A (ja) 1983-05-24 1983-05-24 光ビ−ム走査装置

Publications (2)

Publication Number Publication Date
JPS59216121A true JPS59216121A (ja) 1984-12-06
JPH0514884B2 JPH0514884B2 (enrdf_load_stackoverflow) 1993-02-26

Family

ID=14017860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58091127A Granted JPS59216121A (ja) 1983-05-24 1983-05-24 光ビ−ム走査装置

Country Status (1)

Country Link
JP (1) JPS59216121A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017170513A1 (ja) * 2016-03-30 2017-10-05 株式会社ニコン ビーム走査装置およびパターン描画装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017170513A1 (ja) * 2016-03-30 2017-10-05 株式会社ニコン ビーム走査装置およびパターン描画装置
CN108885337A (zh) * 2016-03-30 2018-11-23 株式会社尼康 光束扫描装置及图案描绘装置
TWI714745B (zh) * 2016-03-30 2021-01-01 日商尼康股份有限公司 光束掃描裝置及圖案描繪裝置
CN108885337B (zh) * 2016-03-30 2021-06-04 株式会社尼康 光束扫描装置及图案描绘装置
KR20220000414A (ko) * 2016-03-30 2022-01-03 가부시키가이샤 니콘 빔 주사 장치 및 패턴 묘화 장치

Also Published As

Publication number Publication date
JPH0514884B2 (enrdf_load_stackoverflow) 1993-02-26

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