JPS59215650A - 質量分析装置 - Google Patents

質量分析装置

Info

Publication number
JPS59215650A
JPS59215650A JP58091315A JP9131583A JPS59215650A JP S59215650 A JPS59215650 A JP S59215650A JP 58091315 A JP58091315 A JP 58091315A JP 9131583 A JP9131583 A JP 9131583A JP S59215650 A JPS59215650 A JP S59215650A
Authority
JP
Japan
Prior art keywords
ion
ion beam
magnetic field
electric field
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58091315A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354831B2 (en, 2012
Inventor
Hisashi Matsuda
松田　久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58091315A priority Critical patent/JPS59215650A/ja
Priority to US06/611,427 priority patent/US4553029A/en
Publication of JPS59215650A publication Critical patent/JPS59215650A/ja
Publication of JPH0354831B2 publication Critical patent/JPH0354831B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/32—Static spectrometers using double focusing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58091315A 1983-05-24 1983-05-24 質量分析装置 Granted JPS59215650A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58091315A JPS59215650A (ja) 1983-05-24 1983-05-24 質量分析装置
US06/611,427 US4553029A (en) 1983-05-24 1984-05-17 Mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58091315A JPS59215650A (ja) 1983-05-24 1983-05-24 質量分析装置

Publications (2)

Publication Number Publication Date
JPS59215650A true JPS59215650A (ja) 1984-12-05
JPH0354831B2 JPH0354831B2 (en, 2012) 1991-08-21

Family

ID=14023029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58091315A Granted JPS59215650A (ja) 1983-05-24 1983-05-24 質量分析装置

Country Status (2)

Country Link
US (1) US4553029A (en, 2012)
JP (1) JPS59215650A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291016A (en) * 1992-01-28 1994-03-01 Hitachi, Ltd. Electrostatic lens arrangement of multi-stages of multi-pole electrodes and mass spectrometer using the same
CN111146070A (zh) * 2019-12-25 2020-05-12 兰州空间技术物理研究所 一种小型高性能空间探测质谱计

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07111882B2 (ja) * 1987-04-15 1995-11-29 日本電子株式会社 ウイ−ンフイルタを用いた二重収束質量分析装置
US4764673A (en) * 1987-04-30 1988-08-16 Kevex Corporation Electric electron energy analyzer
US4859848A (en) * 1987-10-09 1989-08-22 Masstron, Inc. Mass spectrometer apparatus
JPH01213950A (ja) * 1988-02-23 1989-08-28 Jeol Ltd 質量分析装置及びそれを用いたｍｓ／ｍｓ装置
JPH0224950A (ja) * 1988-07-14 1990-01-26 Jeol Ltd 同時検出型質量分析装置
FR2666171B1 (fr) * 1990-08-24 1992-10-16 Cameca Spectrometre de masse stigmatique a haute transmission.
DE4310559A1 (de) * 1993-03-26 1994-09-29 Zeiss Carl Fa Abbildendes Elektronenenergiefilter
EP1517354B1 (en) * 2003-09-11 2008-05-21 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Double stage charged particle beam energy width reduction system for charged particle beam system
JP6682278B2 (ja) * 2016-01-19 2020-04-15 株式会社ニューフレアテクノロジー マルチ荷電粒子ビーム露光方法及びマルチ荷電粒子ビーム露光装置
GB2546967B (en) * 2016-01-27 2020-04-15 Thermo Fisher Scient Bremen Gmbh Quadrupole mass spectrometer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59160949A (ja) * 1983-03-01 1984-09-11 Denshi Kagaku Kk 質量分析装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5829577B2 (ja) * 1980-06-13 1983-06-23 日本電子株式会社 二重収束質量分析装置
JPS5819848A (ja) * 1981-07-29 1983-02-05 Denshi Kagaku Kk 質量分析装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59160949A (ja) * 1983-03-01 1984-09-11 Denshi Kagaku Kk 質量分析装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291016A (en) * 1992-01-28 1994-03-01 Hitachi, Ltd. Electrostatic lens arrangement of multi-stages of multi-pole electrodes and mass spectrometer using the same
CN111146070A (zh) * 2019-12-25 2020-05-12 兰州空间技术物理研究所 一种小型高性能空间探测质谱计
CN111146070B (zh) * 2019-12-25 2023-06-16 兰州空间技术物理研究所 一种小型高性能空间探测质谱计

Also Published As

Publication number Publication date
JPH0354831B2 (en, 2012) 1991-08-21
US4553029A (en) 1985-11-12

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