JPS592134U - 回転塗布装置 - Google Patents

回転塗布装置

Info

Publication number
JPS592134U
JPS592134U JP9577182U JP9577182U JPS592134U JP S592134 U JPS592134 U JP S592134U JP 9577182 U JP9577182 U JP 9577182U JP 9577182 U JP9577182 U JP 9577182U JP S592134 U JPS592134 U JP S592134U
Authority
JP
Japan
Prior art keywords
wafer
outer periphery
coating device
gas
rotary coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9577182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339966Y2 (en, 2012
Inventor
圭一 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP9577182U priority Critical patent/JPS592134U/ja
Publication of JPS592134U publication Critical patent/JPS592134U/ja
Application granted granted Critical
Publication of JPS6339966Y2 publication Critical patent/JPS6339966Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP9577182U 1982-06-28 1982-06-28 回転塗布装置 Granted JPS592134U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9577182U JPS592134U (ja) 1982-06-28 1982-06-28 回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9577182U JPS592134U (ja) 1982-06-28 1982-06-28 回転塗布装置

Publications (2)

Publication Number Publication Date
JPS592134U true JPS592134U (ja) 1984-01-09
JPS6339966Y2 JPS6339966Y2 (en, 2012) 1988-10-19

Family

ID=30228548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9577182U Granted JPS592134U (ja) 1982-06-28 1982-06-28 回転塗布装置

Country Status (1)

Country Link
JP (1) JPS592134U (en, 2012)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337189A (en) * 1976-09-17 1978-04-06 Inoue Japax Res Inc Production of surfactant
JPS5337701A (en) * 1976-09-20 1978-04-07 Kobe Steel Ltd Preparation of carbonaceous raw material for metallurgical use from coal
JPS5337702A (en) * 1976-09-18 1978-04-07 Mitsui Mining & Smelting Co Briquets
JPS5472973A (en) * 1977-11-24 1979-06-11 Hitachi Ltd Rotary applying unit
JPS5999361A (ja) * 1982-11-30 1984-06-08 Kanaasu Data Kk デジタル・レ−ト・メ−タ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5337189A (en) * 1976-09-17 1978-04-06 Inoue Japax Res Inc Production of surfactant
JPS5337702A (en) * 1976-09-18 1978-04-07 Mitsui Mining & Smelting Co Briquets
JPS5337701A (en) * 1976-09-20 1978-04-07 Kobe Steel Ltd Preparation of carbonaceous raw material for metallurgical use from coal
JPS5472973A (en) * 1977-11-24 1979-06-11 Hitachi Ltd Rotary applying unit
JPS5999361A (ja) * 1982-11-30 1984-06-08 Kanaasu Data Kk デジタル・レ−ト・メ−タ

Also Published As

Publication number Publication date
JPS6339966Y2 (en, 2012) 1988-10-19

Similar Documents

Publication Publication Date Title
JPS60155921U (ja) エアクリ−ナ
JPS592134U (ja) 回転塗布装置
JPS581654U (ja) 地下室
JPS60167187U (ja) 遠心ポンプ
JPS62166626U (en, 2012)
JPS60196138U (ja) 拡散排気トツプ
JPS5985464U (ja) 流路切換バルブ
JPS5985956U (ja) フロ−型イオン選択性電極
JPS59176677U (ja) 回転塗布機
JPS6186927U (en, 2012)
JPS58171092U (ja) 浴槽
JPS5940599U (ja) 環状送風機のケ−シング
JPS59173341U (ja) 回転塗布装置
JPS59154350U (ja) 電気集塵機の碍子
JPS582344U (ja) シリンダヘツドカバ−装置
JPS59121081U (ja) 水洗式小便器用目皿
JPS5918426U (ja) 電子部品の防爆型金属ケ−ス
JPS5863351U (ja) 自動二輪車のエンジン用エアクリ−ナ
JPS58137410U (ja) 遠心回転式の「ろ」過器
JPS58140690U (ja) 電源装置
JPS5912151U (ja) 自動現像装置
JPS5827160U (ja) リザ−バタンク用キヤツプ
JPS6161070U (en, 2012)
JPS5891415U (ja) 集塵装置
JPS5942414U (ja) ポツト式バ−ナ