JPS59212703A - スポツト光位置検出装置 - Google Patents

スポツト光位置検出装置

Info

Publication number
JPS59212703A
JPS59212703A JP58088547A JP8854783A JPS59212703A JP S59212703 A JPS59212703 A JP S59212703A JP 58088547 A JP58088547 A JP 58088547A JP 8854783 A JP8854783 A JP 8854783A JP S59212703 A JPS59212703 A JP S59212703A
Authority
JP
Japan
Prior art keywords
spot light
detection device
position detection
scanning
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58088547A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334563B2 (OSRAM
Inventor
Seiichiro Tamai
誠一郎 玉井
Yoshikazu Yokose
義和 横瀬
Masao Murata
村田　正雄
Keiichi Kobayashi
圭一 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58088547A priority Critical patent/JPS59212703A/ja
Publication of JPS59212703A publication Critical patent/JPS59212703A/ja
Publication of JPH0334563B2 publication Critical patent/JPH0334563B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58088547A 1983-05-19 1983-05-19 スポツト光位置検出装置 Granted JPS59212703A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58088547A JPS59212703A (ja) 1983-05-19 1983-05-19 スポツト光位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58088547A JPS59212703A (ja) 1983-05-19 1983-05-19 スポツト光位置検出装置

Publications (2)

Publication Number Publication Date
JPS59212703A true JPS59212703A (ja) 1984-12-01
JPH0334563B2 JPH0334563B2 (OSRAM) 1991-05-23

Family

ID=13945876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58088547A Granted JPS59212703A (ja) 1983-05-19 1983-05-19 スポツト光位置検出装置

Country Status (1)

Country Link
JP (1) JPS59212703A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62172214A (ja) * 1986-01-24 1987-07-29 N T T Gijutsu Iten Kk 光ビ−ムを用いた視覚センサ
US4709156A (en) * 1985-11-27 1987-11-24 Ex-Cell-O Corporation Method and apparatus for inspecting a surface
JPS6474405A (en) * 1987-09-16 1989-03-20 Toyota Motor Corp Method for measuring work gap at the time of arc welding

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4709156A (en) * 1985-11-27 1987-11-24 Ex-Cell-O Corporation Method and apparatus for inspecting a surface
JPS62172214A (ja) * 1986-01-24 1987-07-29 N T T Gijutsu Iten Kk 光ビ−ムを用いた視覚センサ
JPS6474405A (en) * 1987-09-16 1989-03-20 Toyota Motor Corp Method for measuring work gap at the time of arc welding

Also Published As

Publication number Publication date
JPH0334563B2 (OSRAM) 1991-05-23

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