JPS59211953A - ２次電子分光装置 - Google Patents

２次電子分光装置

Info

Publication number
JPS59211953A
JPS59211953A JP58086117A JP8611783A JPS59211953A JP S59211953 A JPS59211953 A JP S59211953A JP 58086117 A JP58086117 A JP 58086117A JP 8611783 A JP8611783 A JP 8611783A JP S59211953 A JPS59211953 A JP S59211953A
Authority
JP
Japan
Prior art keywords
electrode
secondary electron
spectroscopic
electron
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58086117A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357570B2 (enExample
Inventor
Katsumi Ura
裏　克己
Hiroshi Fujioka
弘 藤岡
Koji Nakamae
中前　幸治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Osaka NUC
Original Assignee
Osaka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka University NUC filed Critical Osaka University NUC
Priority to JP58086117A priority Critical patent/JPS59211953A/ja
Publication of JPS59211953A publication Critical patent/JPS59211953A/ja
Publication of JPH0357570B2 publication Critical patent/JPH0357570B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Tubes For Measurement (AREA)
JP58086117A 1983-05-17 1983-05-17 ２次電子分光装置 Granted JPS59211953A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58086117A JPS59211953A (ja) 1983-05-17 1983-05-17 ２次電子分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58086117A JPS59211953A (ja) 1983-05-17 1983-05-17 ２次電子分光装置

Publications (2)

Publication Number Publication Date
JPS59211953A true JPS59211953A (ja) 1984-11-30
JPH0357570B2 JPH0357570B2 (enExample) 1991-09-02

Family

ID=13877747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58086117A Granted JPS59211953A (ja) 1983-05-17 1983-05-17 ２次電子分光装置

Country Status (1)

Country Link
JP (1) JPS59211953A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871542A (ja) * 1981-09-30 1983-04-28 シ−メンス・アクチエンゲゼルシヤフト 二次電子スペクトロメ−タ
JPS5871543A (ja) * 1981-09-30 1983-04-28 シ−メンス・アクチエンゲゼルシヤフト 静電逆電界型スペクトロメータ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871542A (ja) * 1981-09-30 1983-04-28 シ−メンス・アクチエンゲゼルシヤフト 二次電子スペクトロメ−タ
JPS5871543A (ja) * 1981-09-30 1983-04-28 シ−メンス・アクチエンゲゼルシヤフト 静電逆電界型スペクトロメータ

Also Published As

Publication number Publication date
JPH0357570B2 (enExample) 1991-09-02

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Legal Events

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EXPY Cancellation because of completion of term