JPS5921020A - 荷電ビ−ム露光装置用成形絞り - Google Patents

荷電ビ−ム露光装置用成形絞り

Info

Publication number
JPS5921020A
JPS5921020A JP57130616A JP13061682A JPS5921020A JP S5921020 A JPS5921020 A JP S5921020A JP 57130616 A JP57130616 A JP 57130616A JP 13061682 A JP13061682 A JP 13061682A JP S5921020 A JPS5921020 A JP S5921020A
Authority
JP
Japan
Prior art keywords
wires
forming
fine
gold wire
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57130616A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637023B2 (enExample
Inventor
Fujio Komata
富士夫 小俣
Kiichi Takamoto
喜一 高本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP57130616A priority Critical patent/JPS5921020A/ja
Priority to US06/515,304 priority patent/US4550258A/en
Publication of JPS5921020A publication Critical patent/JPS5921020A/ja
Publication of JPS637023B2 publication Critical patent/JPS637023B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP57130616A 1982-07-27 1982-07-27 荷電ビ−ム露光装置用成形絞り Granted JPS5921020A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57130616A JPS5921020A (ja) 1982-07-27 1982-07-27 荷電ビ−ム露光装置用成形絞り
US06/515,304 US4550258A (en) 1982-07-27 1983-07-19 Aperture structure for charged beam exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57130616A JPS5921020A (ja) 1982-07-27 1982-07-27 荷電ビ−ム露光装置用成形絞り

Publications (2)

Publication Number Publication Date
JPS5921020A true JPS5921020A (ja) 1984-02-02
JPS637023B2 JPS637023B2 (enExample) 1988-02-15

Family

ID=15038476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57130616A Granted JPS5921020A (ja) 1982-07-27 1982-07-27 荷電ビ−ム露光装置用成形絞り

Country Status (1)

Country Link
JP (1) JPS5921020A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125043U (enExample) * 1985-01-25 1986-08-06

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122978A (en) * 1978-03-16 1979-09-22 Jeol Ltd Detecting method and its apparatus for electron ray information in electron ray exposure unit
JPS5556628A (en) * 1978-10-23 1980-04-25 Jeol Ltd Electron beam exposure device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122978A (en) * 1978-03-16 1979-09-22 Jeol Ltd Detecting method and its apparatus for electron ray information in electron ray exposure unit
JPS5556628A (en) * 1978-10-23 1980-04-25 Jeol Ltd Electron beam exposure device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125043U (enExample) * 1985-01-25 1986-08-06

Also Published As

Publication number Publication date
JPS637023B2 (enExample) 1988-02-15

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