JPS5920752Y2 - Sample fine movement device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample fine movement device suitable for an electron beam apparatus such as an electron microscope, and particularly to an improvement for simplifying the adjustment of the height of the sample.

As is well known, in a scanning electron microscope, in order to determine image observation conditions and analysis positions, the distance between the sample and the bottom surface of the final reduction lens (hereinafter referred to as working distance) is adjusted.

For this reason, a conventional sample fine movement device is constructed as shown in FIG.

In the figure, a sample 1 is placed on a fine movement stage 3 in a vacuumed sample chamber 2, and a rotation R1, a planar X, Y fine movement (that is, a horizontal fine movement), and a tilt T are performed. .

This fine movement table is installed on two movable units 6 that can be moved along a shaft 5 fixed to a face plate 4 to which various fine movement knobs are attached, and the working distance (electron beam reduction The distance between the lower surface 9 of the final electron lens and the sample 1 can be adjusted.

However, in such a conventional example, there are problems in that sample exchange is troublesome and the structure is complicated.

Therefore, an object of the present invention is to provide a sample fine movement device that allows easy sample exchange and has a simple configuration.

The feature of the present invention is that a sample is installed on a fine movement table in a sample chamber, the fine movement table is attached to a substrate that is removable from the sample chamber, and this substrate is attached to the sample chamber so that it exists outside of the sample chamber. The sample is mounted rotatably on a fulcrum shaft and movable in the direction of the fulcrum axis, and the sample is moved up and down by moving the substrate using the fulcrum shaft as a guide axis.

FIG. 2 shows an embodiment of the present invention.

In the figure, the substrate 14 having the fine movement table 3 is connected to the arm 24.
, is attached to the sample chamber 2 via a fulcrum shaft 25 and an arm 28, and is rotatable in the direction of an arrow 26.

As shown in FIG. 3, the fulcrum shaft 2 is fixed to the arm 28.
The arm 24 rotates about 5 and is held by a spring 29 and an adjustment screw 31 via a bearing 30.

Further, the amount of rotation of the substrate 14 is regulated by a stopper 32.

Therefore, by turning the adjustment screw 31, the sample 1 moves up and down together with the fine movement stage 3 and the arm 24 using the fulcrum shaft 25 as a guide, and the working stance can be adjusted.

According to this embodiment, the entire fine movement stage can be easily pulled out from the sample chamber when exchanging the sample, making it easy to exchange the sample, and the fulcrum shaft required when exchanging the sample is the guide axis when moving the sample up and down. The configuration is simple as it is also used as a

As explained above, according to the present invention, there is provided a sample fine movement device that allows easy sample exchange and has a simple configuration.

[Brief explanation of drawings]

FIG. 1 is a sectional view of a conventional sample fine movement device, FIG. 2 is a sectional view of an embodiment of the present invention, and FIG. 3 is a partially enlarged view of FIG. 2 in the P direction. DESCRIPTION OF SYMBOLS 1... Sample, 3... Fine movement table, 9... Bottom surface of final lens, 14... Substrate, 25... Fulcrum shaft, 31... Adjustment screw.

Claims (1)

[Scope of utility model registration request] A sample is installed on a fine movement table in a sample chamber, the fine movement table is attached to a substrate that is removable from the sample chamber, and this substrate can be rotated around a fulcrum shaft that is attached to the sample chamber so as to exist outside the sample chamber. A sample fine movement device, characterized in that the sample is mounted so as to be movable in the direction of its fulcrum axis, and the sample is moved up and down by moving the substrate using the fulcrum axis as a guide.