JPH03116559U - - Google Patents
Info
- Publication number
- JPH03116559U JPH03116559U JP2219790U JP2219790U JPH03116559U JP H03116559 U JPH03116559 U JP H03116559U JP 2219790 U JP2219790 U JP 2219790U JP 2219790 U JP2219790 U JP 2219790U JP H03116559 U JPH03116559 U JP H03116559U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- fine movement
- holder
- tensile
- exchange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Description
第１図は本考案の一実施例を説明するための試
料微動装置の微動台構成図、第２図は微動台の詳
細図、第３図は試料ホルダの詳細断面図である。
１……電子ビーム、２……対物レンズ、３……
試料、４……試料支持棒Ａ、５……試料支持棒Ｂ
、６……回転防止板、７……試料棒、８……試料
ホルダ、９……ロツクナツト、１０……Ｒ動作機
構、１１……Ｘ動作機構、１２……Ｙ動作機構、
１３……Ｚ動作機構、１４……Ｔ動作機構、１５
……ストツパー棒Ａ、１６……ストツパー棒Ｂ、
１７……ウオームギア。
FIG. 1 is a configuration diagram of a fine movement table of a sample fine movement device for explaining an embodiment of the present invention, FIG. 2 is a detailed view of the fine movement table, and FIG. 3 is a detailed sectional view of a sample holder. 1...Electron beam, 2...Objective lens, 3...
Sample, 4... Sample support rod A, 5... Sample support rod B
, 6... Rotation prevention plate, 7... Sample rod, 8... Sample holder, 9... Lock nut, 10... R operating mechanism, 11... X operating mechanism, 12... Y operating mechanism,
13...Z movement mechanism, 14...T movement mechanism, 15
...stopper rod A, 16...stopper rod B,
17...worm gear.
Claims (1)
換可能な試料交換装置と試料の回転ができる試料
微動装置より成る走査形電子顕微鏡の試料ホルダ
において、試料ホルダ上の試料支持棒に回転防止
板を設けたことを特徴とする引張試料ホルダ。 ２ 請求項第１項において、水平Ｘ，Ｙ、傾斜Ｔ
、垂直Ｚ及び回転Ｒ機構より成る前記試料微動装
置において、水平動作機構に２本のストツパー棒
を設けたことを特徴とする引張試料ホルダ。[Scope of Claim for Utility Model Registration] 1. In a sample holder for a scanning electron microscope consisting of a sample exchange device that can exchange the sample without leaking the high vacuum of the sample chamber and a sample fine movement device that can rotate the sample, A tensile sample holder characterized in that a rotation prevention plate is provided on the sample support rod. 2 In claim 1, horizontal X, Y, inclination T
. A tensile sample holder, characterized in that, in the sample fine movement device comprising a vertical Z and rotation R mechanism, two stopper rods are provided on the horizontal movement mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2219790U JPH03116559U (en) | 1990-03-07 | 1990-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2219790U JPH03116559U (en) | 1990-03-07 | 1990-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03116559U true JPH03116559U (en) | 1991-12-03 |
Family
ID=31525215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2219790U Pending JPH03116559U (en) | 1990-03-07 | 1990-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03116559U (en) |
-
1990
- 1990-03-07 JP JP2219790U patent/JPH03116559U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH03116559U (en) | ||
| JPS583586B2 (en) | scanning electron microscope | |
| JPS6111688Y2 (en) | ||
| JPH01164659U (en) | ||
| JPS5920752Y2 (en) | Sample fine movement device | |
| JPH0128686Y2 (en) | ||
| JPS6391152U (en) | ||
| JPH0427498B2 (en) | ||
| JPS5837940B2 (en) | Sample fine movement device | |
| JPH0371550U (en) | ||
| JPH0322731Y2 (en) | ||
| JPS6423864U (en) | ||
| JPH01124654U (en) | ||
| JPH02102651U (en) | ||
| JPS6336925Y2 (en) | ||
| JPS5834353U (en) | Sample fine movement device | |
| JPH0112192Y2 (en) | ||
| JPH03100351U (en) | ||
| JPH0463314A (en) | Sample holding tool for microscope | |
| JPS6176674U (en) | ||
| JPH01160413U (en) | ||
| JPH02126357U (en) | ||
| JPH0188457U (en) | ||
| JPH0459815U (en) | ||
| JPS6177543U (en) |