JPS5834353U - Sample fine movement device - Google Patents
Sample fine movement deviceInfo
- Publication number
- JPS5834353U JPS5834353U JP12797781U JP12797781U JPS5834353U JP S5834353 U JPS5834353 U JP S5834353U JP 12797781 U JP12797781 U JP 12797781U JP 12797781 U JP12797781 U JP 12797781U JP S5834353 U JPS5834353 U JP S5834353U
- Authority
- JP
- Japan
- Prior art keywords
- fine movement
- sample
- movement device
- sample fine
- mechanisms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例の側面図、第２図は上面図、
第３図は従来の試料微動装置の移動範囲を示した図、第
４図は本考案の試料微動装置の移動範囲を示した図であ
る。
４・・・試料、５・・・Ｘ機構、６・・・Ｔ機構、７・
・・移動台、８・・・Ｘ機構、９・・・Ｙ機構、１０・
・・Ｒ機構、１３・・・レール、１４・・・シャフト、
１５・・・クランク軸、１６・・・軸受台、１７・・・
軸、１８・・・つまみ。Figure 1 is a side view of an embodiment of the present invention, Figure 2 is a top view,
FIG. 3 is a diagram showing the movement range of the conventional sample fine movement device, and FIG. 4 is a diagram showing the movement range of the sample fine movement device of the present invention. 4...sample, 5...X mechanism, 6...T mechanism, 7.
...Moving table, 8...X mechanism, 9...Y mechanism, 10.
...R mechanism, 13...rail, 14...shaft,
15... Crankshaft, 16... Bearing stand, 17...
Axis, 18...knob.
Claims (1)
電子顕微鏡において、垂直方向・傾斜方向、水平方向、
回転方向に試料を微動させる機構の全て、又はいずれか
を組合せてなる試料微動機構の中に一定量の早送り機構
を１つ以上組み込んだことを特徴とする試料微動装置。 ２ 実用新案登録請求の範囲第１項において、１つの早
送り機構をいずれかの微動機構の中に組み込んだことを
特徴とする試料微動装置。[Scope of Claim for Utility Model Registration] 1. A scanning electron microscope that has a mechanism for moving a sample to a desired position for observation, in the vertical direction, tilted direction, horizontal direction,
1. A sample fine movement device, characterized in that one or more fast-forwarding mechanisms of a fixed amount are incorporated into a sample fine movement mechanism that is a combination of all or any of the mechanisms for finely moving a sample in a rotational direction. 2. A sample fine movement device as set forth in claim 1 of the utility model registration claim, characterized in that one fast-forwarding mechanism is incorporated into any of the fine movement mechanisms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12797781U JPS5834353U (en) | 1981-08-31 | 1981-08-31 | Sample fine movement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12797781U JPS5834353U (en) | 1981-08-31 | 1981-08-31 | Sample fine movement device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5834353U true JPS5834353U (en) | 1983-03-05 |
Family
ID=29921691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12797781U Pending JPS5834353U (en) | 1981-08-31 | 1981-08-31 | Sample fine movement device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5834353U (en) |
-
1981
- 1981-08-31 JP JP12797781U patent/JPS5834353U/en active Pending
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