JPH0326478Y2 - - Google Patents
Info
- Publication number
- JPH0326478Y2 JPH0326478Y2 JP1983058435U JP5843583U JPH0326478Y2 JP H0326478 Y2 JPH0326478 Y2 JP H0326478Y2 JP 1983058435 U JP1983058435 U JP 1983058435U JP 5843583 U JP5843583 U JP 5843583U JP H0326478 Y2 JPH0326478 Y2 JP H0326478Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- direction moving
- substrate
- convex portion
- moving member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 description 6
- 238000000386 microscopy Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
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- Details Of Measuring And Other Instruments (AREA)
- Microscoopes, Condenser (AREA)
Description
【考案の詳細な説明】
本考案は顕微鏡等に用いられる傾角可能なステ
ージに関するものである。[Detailed Description of the Invention] The present invention relates to a tiltable stage used in a microscope or the like.
顕微鏡において、落射照明による観察に加え
て、二光束干渉法による検鏡時に用いることを目
的とした従来実用化されているステージは第１図
ａ，ｂ，ｃに示すような構造であつた。第１図ａ
のＡ−Ａ矢視断面図である第１図ｂにおいて、回
転載物台１は取付板２に回転可能に支持され、取
付板２を固定したＸ方向移動部材３はＹ方向移動
部材４にアリ嵌合し、つまみ３′によつてＸ方向
に移動せられ、Ｙ方向移動部材４は基板５にアリ
嵌合し、つまみ４′にてＹ方向に移動せられる。
基板５の下面には円錐座６が３ケ所で設けられて
おり、この円錐座６には下方中央に貫通孔を有す
る球面座８が対向している。円錐座６と球面座８
の間に調節棒７先端の救面部分７′が挟持され、
球面座８を上方へ押圧するウエーブワツシヤーバ
ネ９によつて密着が保たれている。調節棒７は調
節ノブ１０内を慣通し、下端にバネ押え板１２が
固定されている。調節ノブ１０はステージ本体１
１に螺合し、調節ノブ１０とバネ押え板１２との
間にはバネが配設されている。 In a microscope, stages that have been put to practical use in the past for use in microscopy using two-beam interferometry in addition to observation using epi-illumination have structures as shown in FIGS. 1a, b, and c. Figure 1a
In FIG. 1b, which is a cross-sectional view taken along the line A-A of FIG. The member 4 is dovetail-fitted and moved in the X direction by the knob 3', and the Y-direction moving member 4 is dovetail-fitted to the substrate 5 and moved in the Y direction by the knob 4'.
Three conical seats 6 are provided on the lower surface of the substrate 5, and a spherical seat 8 having a through hole at the center of the lower side faces the conical seats 6. Conical seat 6 and spherical seat 8
The relief surface portion 7' at the tip of the adjustment rod 7 is held between the
Close contact is maintained by a wave washer spring 9 that presses the spherical seat 8 upward. The adjustment rod 7 passes through the adjustment knob 10, and has a spring press plate 12 fixed to its lower end. The adjustment knob 10 is the stage body 1
1, and a spring is disposed between the adjustment knob 10 and the spring holding plate 12.
以上の部材１，２で回転移動を、部材３，３′，
４，４′，５でＸ−Ｙ移動を行なつている。また、
部材６，７，８，９，１０，１１，１２は第１図
ｂのＢ矢視図に示したように３点に配置されてい
るので、各調節ノブ１０を回転することにより傾
角が可能となる。 The above members 1 and 2 perform rotational movement, members 3, 3',
4, 4', and 5 perform X-Y movement. Also,
Since the members 6, 7, 8, 9, 10, 11, and 12 are arranged at three points as shown in the B arrow view in FIG. 1b, the tilt angle can be adjusted by rotating each adjustment knob 10. becomes.
すなわち、傾角をさせるには例えばいずれか１
つの調節ノブ１０を回転させることにより、ステ
ージ本体１１に対して調節棒７を上下方向へ動か
す。すなわち、調節ノブ１０が上下方向へ動く
と、部材１０の上面に当接している調節棒７の大
径部によつて、部材７は直接上方向へ移動され、
調節ノブ１０が下方向へ動くと、バネ押え板１２
との間のバネの力によつて調節棒７はその大径部
が部材１０の上面に当接する如く移動する。この
とき移動されない調節棒７の球面部分の中心を結
んだ辺上の１点を支点として回転載物台１の傾角
が行われる。 In other words, to make the angle of inclination, for example, either one
By rotating the two adjustment knobs 10, the adjustment rod 7 is moved up and down with respect to the stage body 11. That is, when the adjustment knob 10 moves in the vertical direction, the member 7 is directly moved upward by the large diameter portion of the adjustment rod 7 that is in contact with the upper surface of the member 10.
When the adjustment knob 10 moves downward, the spring holding plate 12
The adjustment rod 7 is moved by the force of the spring between the adjustment rod 7 so that its large diameter portion comes into contact with the upper surface of the member 10. At this time, the rotary stage 1 is tilted using a point on the side connecting the centers of the spherical portions of the adjustment rods 7 that are not moved as a fulcrum.
ところが、このような傾角ステージの場合、対
物レンズの焦点面と傾角の支点が離れているため
に、傾角に伴つて像移動、焦点ズレが生じる。そ
のため高倍率の対物レンズを使用する際は、対物
レンズの視野、焦点深度に対して、傾角に伴う像
移動および焦点ズレがきわめて大きく、必要な傾
角度を得るまで標本位置焦点を修正しなければな
らず、操作性が悪いという欠点があつた。 However, in the case of such a tilting stage, since the focal plane of the objective lens and the fulcrum of the tilting angle are far apart, image movement and defocus occur as the tilting angle changes. Therefore, when using a high-magnification objective lens, the image shift and focus shift due to the tilt angle are extremely large compared to the field of view and depth of focus of the objective lens, and the specimen position focus must be corrected until the required tilt angle is obtained. However, it had the disadvantage of poor operability.
また、傾角の支点が各調節棒７の球面部分７′
の中心が成す三角形の辺上を移動するため傾角状
態の再現がきわめて困難であつた。 Also, the fulcrum of the inclination is the spherical portion 7' of each adjustment rod 7.
It was extremely difficult to reproduce the inclination state because the center moved along the sides of the triangle formed by the center.
本考案はこれらの欠点を解決し、傾角を行う際
の試料像の像移動、焦点ズレを極めて小さくする
と共に、再現性の良いステージを得ることを目的
とする。 The purpose of the present invention is to solve these drawbacks, to minimize image movement and defocus of the sample image during tilting, and to obtain a stage with good reproducibility.
本考案の傾角ステージによれば曲率中心線が交
差する２層のかまぼこ形嵌合面を形成したので、
傾角を行なう際の試料像の像移動、焦点ズレを極
めて小さくすることができるばかりでなく、再現
性の良いステージを得ることができる。また、傾
角を行なう際の試料像の像移動、焦点ズレを極め
て小さくするために試料と対物レンズの光軸との
交点を回転中心とする球面座を用いて傾角を行な
うステージも提案されているが（実公昭53−3807
号）、この提案になるステージは、球面座を用い
ているため、光軸を中心とする回転方向での規制
が行なわれず、特別の規制手段を設けない場合に
は、あらかじめ設定した試料の回転方向位置が狂
つてしまうという欠点があるばかりでなく、傾角
度の保持を弾性体の弾性力のつり合いにより行う
構造であるから、ハンドルの操作量に対する傾角
度の変化量および変化方向の予測が困難であり、
操作性が劣るし、振動の影響を受けるので像が振
動する問題があるが、本考案によれば、上記球面
座を用いたステージの持つ問題点も解消する。 According to the inclination stage of the present invention, a two-layer semicircular mating surface with intersecting center lines of curvature is formed.
Not only can image movement and defocus of the sample image during tilting be extremely small, but also a stage with good reproducibility can be obtained. In addition, in order to minimize image movement and defocus of the sample image during tilting, a stage has been proposed that tilts using a spherical seat whose rotation center is the intersection of the sample and the optical axis of the objective lens. (Jikko Sho 53-3807
Since the stage proposed in this proposal uses a spherical seat, the rotation direction around the optical axis is not restricted, and if no special restriction means are provided, the rotation of the sample set in advance cannot be controlled. Not only does it have the disadvantage of causing the directional position to go out of order, but because the structure maintains the tilt angle by balancing the elastic force of the elastic body, it is difficult to predict the amount and direction of change in the tilt angle relative to the amount of operation of the handle. and
Although the operability is poor and the image vibrates due to the influence of vibration, the present invention also solves the problems associated with the stage using the spherical seat.
以下、図面に示した実施例に基づいて本考案を
説明する。 The present invention will be described below based on embodiments shown in the drawings.
第２図ａは一実施例の部分断面図、第２図ｂは
傾角調節つまみ１４の部分を断面とした第２図ａ
のＣ−Ｃ矢視断面図、第２図ｃは第２図ｂのＤ矢
視図である。回転載物台１、取付板２、Ｙ方向移
動部材３、つまみ３′、Ｙ方向移動部材４、つま
み４′は従来のものがそのまま使える。第２図ｂ
において、Ｘ方向移動部材４用の雌アリを有する
基板５の下面は紙面に垂直な方向（Ｘ方向）へ延
在するかまぼこ形の凸面部が形成されこの凸面部
は対物レンズの光軸を含みＹ方向に平行な平面内
の断面図である第２図ｂの断面において、光軸が
試料に交叉する点Ｐを中心とする半径R1の円弧
となつている。つまり、凸面部の曲率中心線（第
２図ｂの紙面に垂直）が点Ｐを通るわけである。
基板５の下面の凸面部は中間部材１３の上面に形
成した円弧状溝に嵌合している。中間部材１３の
下面には、第２図ａ（この図は、対物レンズの光
軸を含みＸ方向に平行な平面内の部分断面図であ
る。）において紙面に垂直な方向へ延在するかま
ぼこ形の凸面部が形成され、この凸面部は同図に
おいて点Ｐを中心とする半径R2の円弧となつて
いる。すなわち、中間部材１３の凸面の曲率中心
線（第２図ａの紙面に垂直）が点Ｐを通るわけで
ある。中間部材１３の下面の凸面部はステージ本
体１１の上面に形成した円弧状溝に嵌合してい
る。半径R1とR2は中間部材１３の厚さをｈとす
ればR1＋ｈ＝R2なる関係にあり、ステージ本体
１１には第２図ｃに示した如く、顕微鏡鏡基への
取付用雌アリ１３０が固設されている。 FIG. 2a is a partial cross-sectional view of one embodiment, and FIG. 2b is a cross-sectional view of the inclination adjustment knob 14.
FIG. 2c is a sectional view taken along line C-C in FIG. 2b. Conventional rotary stage 1, mounting plate 2, Y-direction moving member 3, knob 3', Y-direction moving member 4, and knob 4' can be used as they are. Figure 2b
, the lower surface of the substrate 5 having the female dovetail for the X-direction moving member 4 is formed with a semicylindrical convex portion extending in a direction perpendicular to the plane of the paper (X direction), and this convex portion includes the optical axis of the objective lens. In the cross section of FIG. 2b, which is a cross-sectional view in a plane parallel to the Y direction, the optical axis forms an arc of radius R 1 centered at the point P where it intersects the sample. In other words, the center line of curvature of the convex portion (perpendicular to the paper plane of FIG. 2b) passes through point P.
A convex portion on the lower surface of the substrate 5 fits into an arcuate groove formed on the upper surface of the intermediate member 13. On the lower surface of the intermediate member 13, there is a semi-cylindrical hole extending in a direction perpendicular to the plane of the paper in FIG. A convex portion of the shape is formed, and this convex portion is an arc of radius R 2 centered on point P in the figure. That is, the center line of curvature of the convex surface of the intermediate member 13 (perpendicular to the paper plane of FIG. 2a) passes through the point P. A convex portion on the lower surface of the intermediate member 13 fits into an arcuate groove formed on the upper surface of the stage main body 11. The radii R 1 and R 2 have the relationship R 1 + h = R 2 if the thickness of the intermediate member 13 is h, and the stage body 11 has a structure for attaching it to the microscope base as shown in Fig. 2c. A female ant 130 is fixedly installed.
使用状態において（第２図ａの如き向きであ
る）ステージ本体１１の手前側左右下面にくるよ
うに、傾角調節つまみ１４，１５が配設されてい
る。傾角調節つまみ１４，１５とステージ本体１
１との間には球面座１４′が設けられている。一
端を傾角調節つまみ１４，１５に螺合された軸１
６，１７は、ステージ本体１１の貫通孔を通して
基板５に固定されている（第２図ｂ）。軸１６，
１７と平行にかつ等距離の位置に配設された軸１
８の一端はステージ本体１１の貫通孔を通して基
板５に螺合しており、軸１８の他端にはステージ
本体との間に圧縮コイルバネ１９を保持するため
のバネ押え板２０が固設されている。圧縮コイル
バネ１９は、基板５に点Ｐを中心とする回転モー
メントを与え、調節つまみ１４，１５をステージ
本体１１の球面座に押圧している。従つて、第２
図ｃ下側の傾角調節つまみ１４を回転すれば、つ
まみ１４に対して軸１６が出入りし、その結果、
部材１，２，３，４，５は一体になつたまま点Ｐ
を中心として揺動する。その方向はほぼ第２図ｃ
に示した矢印Ａの方向である。また、第２図ｃ下
側の傾角調節つまみ１５を回転すると、つまみ１
５に対して軸１７が出入りし、その結果、部材
１，２，３，４，５は一体になつたまま点Ｐを中
心として揺動する。その方向はほぼ第２図ｃに示
した矢印Ｂの方向である。 Inclination adjustment knobs 14 and 15 are disposed so as to be located on the left and right lower surfaces of the front side of the stage main body 11 in the state of use (in the orientation as shown in FIG. 2A). Tilt adjustment knobs 14, 15 and stage body 1
1 is provided with a spherical seat 14'. A shaft 1 whose one end is screwed to the inclination adjustment knobs 14 and 15
6 and 17 are fixed to the substrate 5 through through holes in the stage body 11 (FIG. 2b). axis 16,
Axis 1 arranged parallel to and equidistant from 17
One end of the shaft 18 is screwed into the substrate 5 through a through hole in the stage main body 11, and a spring holding plate 20 for holding a compression coil spring 19 between it and the stage main body is fixed to the other end of the shaft 18. There is. The compression coil spring 19 applies a rotational moment about the point P to the substrate 5 and presses the adjustment knobs 14 and 15 against the spherical seat of the stage body 11. Therefore, the second
By rotating the inclination adjustment knob 14 on the lower side of Figure c, the shaft 16 moves in and out of the knob 14, and as a result,
Members 1, 2, 3, 4, and 5 remain together at point P
oscillates around the center. The direction is approximately Fig. 2c
This is the direction of arrow A shown in . Also, if you turn the tilt angle adjustment knob 15 on the lower side of Fig. 2c, the knob 1
The shaft 17 moves in and out of the shaft 5, and as a result, the members 1, 2, 3, 4, and 5 swing about the point P while remaining integral. Its direction is approximately the direction of arrow B shown in FIG. 2c.
したがつて、実施例の装置は常に点Ｐを中心と
して傾角を行う。この場合、試料厚さがｔに等し
ければ、傾角を行つても、視野中心では像移動、
焦点ズレは起こらない。また試料厚さがｔと等し
くなくても、通常の顕微鏡で検鏡可能な範囲の試
料厚なら従来の装置と比較して、傾角中心と試料
表面の距離が小さいので、像移動、焦点ズレはき
わめて小さい。 Therefore, the device of the embodiment always performs the tilting angle with the point P as the center. In this case, if the sample thickness is equal to t, even if the tilt angle is performed, the image will move at the center of the field of view.
No defocus occurs. In addition, even if the sample thickness is not equal to t, if the sample thickness is within the range that can be examined with a normal microscope, the distance between the center of inclination and the sample surface is smaller than with conventional equipment, so image movement and defocus will be avoided. Extremely small.
さらに、傾角中心が一定位置にあるため、傾角
度の再現がきわめて容易であるという利点、傾角
動作の操作部が従来の装置が３ケ所であつたのに
対し、本装置では２ケ所となり操作性がきわめて
向上した。また、傾角が２方向に独立して調整で
きるので、傾角時に回転方向の誤差が生ずること
なく、再現性に勝れている。 Furthermore, since the center of the tilt angle is located at a fixed position, it is extremely easy to reproduce the tilt angle, and whereas the conventional device had three operation parts, this device has two operation parts, making it easier to operate. has improved significantly. Furthermore, since the tilt angle can be adjusted independently in two directions, there is no error in the rotation direction when tilting, and the reproducibility is excellent.
第３図は、本考案の傾角ステージと併用するに
最適な調整装置であり試料の厚さに応じて載物台
表面の高さを変られるよう回転載物台が回転部材
１ａと回転部材１ａにねじ嵌合し光軸方向へ移動
可能な載物台１ｂとから構成されている。この構
造により、試料表面と傾角中心を一致させると傾
角させたときに、像移動、焦点ズレを生じること
なく検鏡することができる。 Figure 3 shows an adjustment device that is most suitable for use with the inclination stage of the present invention, in which the rotary stage has a rotating member 1a and a rotary member 1a, so that the height of the surface of the stage can be changed according to the thickness of the sample. The stage 1b is screw-fitted to the stage 1b and is movable in the optical axis direction. With this structure, when the sample surface and the center of the tilt angle are made to coincide with each other, it is possible to perform microscopy without causing image movement or defocus when the sample surface is tilted.
本考案は、互いの曲率中心線が交叉する２つの
かまぼこ形の案内を設けたので、光軸を中心とし
た回転方向の動きは規制され、かつ第２棒部材と
第３棒部材とにそれぞれ螺合した２つのつまみの
ねじ込み量により傾角が決定されるので、傾角の
操作および、その再現が容易かつ確実である。 The present invention is provided with two semicylindrical guides whose curvature center lines intersect with each other, so that movement in the rotational direction about the optical axis is restricted, and the second and third rod members are respectively Since the inclination angle is determined by the screwing amount of the two screwed together knobs, the inclination angle can be easily and reliably manipulated and reproduced.
さらに、本考案によれば、バネ部材を十分強く
することで外部振動等の影響を受け難く、安定し
た像を観察できるようになる。従つて、顕微鏡で
の二光束干渉検鏡用ステージとして用いるに最適
である。 Further, according to the present invention, by making the spring member sufficiently strong, it is difficult to be affected by external vibrations, etc., and a stable image can be observed. Therefore, it is most suitable for use as a stage for two-beam interference microscopy in a microscope.
さらに、本装置を使えば一般の落射照明検鏡、
外重干渉検鏡に用いると、平行度が良くない試料
表面の平行出しの操作が容易に行える。 Furthermore, with this device, you can use a general epi-illumination speculum.
When used in external gravity interference microscopy, it is easy to parallelize the surface of a sample with poor parallelism.
第１図ａ，ｂ，ｃは従来使用されていた傾角ス
テージの一例であり、第１図ａは正面から見た部
分断面図、第１図ｂは第１図ａのＡ−Ａ矢視断面
図、第１図ｃは第１図ｂのＣ矢視図、第２図ａ，
ｂ，ｃは本考案による一実施例の傾角ステージで
あり、第２図ａは正面から見た部分断面図、第２
図ｂは傾角調節つまみ１４を断面とした第２図ａ
のＣ−Ｃ矢視断面図、第２図ｃは第２図ｂのＤ矢
視図、第３図は本考案の傾角ステージに併用する
に最適の調整装置の一例を示す断面部分図であ
る。
主要部分の符号の説明、１……回転載物台、３
……Ｙ方向移動部材、４……Ｘ方向移動部材、５
……基板、１１……ステージ本体、１３……中間
部材、１６……第２棒部材、１７……第３棒部
材、１８……第１棒部材。
Figures 1a, b, and c are examples of conventionally used tilting stages, with Figure 1a being a partial cross-sectional view seen from the front, and Figure 1b being a cross-sectional view taken along the line A-A in Figure 1a. Figure 1c is a view from arrow C in Figure 1b, Figure 2a,
b and c are tilt angle stages according to an embodiment of the present invention, and Fig. 2a is a partial sectional view seen from the front;
Figure b is Figure 2 a, with the inclination adjustment knob 14 in cross section.
FIG. 2c is a cross-sectional view taken along the line C-C of FIG. 2b, and FIG. . Explanation of symbols of main parts, 1...Rotating stage, 3
...Y-direction moving member, 4...X-direction moving member, 5
...Substrate, 11... Stage main body, 13... Intermediate member, 16... Second bar member, 17... Third bar member, 18... First bar member.
Claims (1)
Ｙ方向移動部材３と、該Ｙ方向移動部材を載置す
るＸ方向移動部材４と、該Ｘ方向移動部材を載置
し、曲率中心線が前記回転載物台の上方にあるか
まぼこ形の凸面部を下面に有する基板５と、該基
板の凸面部に嵌合する案内溝を上面に有すると共
に、曲率中心線が前記凸面部の曲率中心線に交叉
するかまぼこ形の凸面部を下面に有する中間部材
１３と、該中間部材の凸面部に嵌合する案内溝を
有すると共に、三角形を形成するように配置した
３つの貫通孔を有するステージ本体１１と、該本
体の貫通孔の一つを通して一端が前記基板に固定
されると共に、他端にバネ押え板２０が固定され
た第１棒部材１８と、該第１棒部材のバネ押え板
と前記ステージ本体との間に配設されたバネ部材
１９と、前記貫通孔のうち残りの貫通孔それぞれ
を通して一端が前記基板に固定された第２棒部材
１６及び第３棒部材１７と、前記ステージ本体と
球嵌合すると共に、前記第２棒部材及び第３棒部
材の他端にそれぞれ螺合する２つのつまみ１４，
１５と、から構成されることを特徴とする傾角ス
テージ。 A rotary stage 1, 2, a Y-direction moving member 3 on which the rotary stage is placed, an X-direction moving member 4 on which the Y-direction moving member is placed, and a Y-direction moving member 4 on which the X-direction moving member is placed. , a substrate 5 having a semicylindrical convex portion on the lower surface whose center line of curvature is above the rotary stage, and a guide groove that fits into the convex portion of the substrate on the upper surface; An intermediate member 13 having a semicylindrical convex portion on the lower surface that intersects the center line of curvature of the intermediate member, and three through holes arranged to form a triangle and having a guide groove that fits into the convex portion of the intermediate member. a first rod member 18 having one end fixed to the substrate through one of the through holes of the main body and a spring presser plate 20 fixed to the other end; A spring member 19 disposed between the spring holding plate and the stage main body, and a second rod member 16 and a third rod member 17 whose one ends are fixed to the substrate through the remaining through holes, respectively. and two knobs 14 that are ball-fitted with the stage body and screwed onto the other ends of the second rod member and the third rod member, respectively.
15. An inclination stage characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5843583U JPS6033685U (en) | 1983-04-19 | 1983-04-19 | Tilt stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5843583U JPS6033685U (en) | 1983-04-19 | 1983-04-19 | Tilt stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6033685U JPS6033685U (en) | 1985-03-07 |
| JPH0326478Y2 true JPH0326478Y2 (en) | 1991-06-07 |
Family
ID=30188713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5843583U Granted JPS6033685U (en) | 1983-04-19 | 1983-04-19 | Tilt stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6033685U (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2869977B2 (en) * | 1988-09-06 | 1999-03-10 | 日本電気株式会社 | Jig for cross section observation of semiconductor integrated circuit |
| KR101193532B1 (en) * | 2010-10-26 | 2012-10-19 | 송무헌 | The stage |
| JP6401979B2 (en) * | 2014-09-04 | 2018-10-10 | オリンパス株式会社 | Microscope system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533807U (en) * | 1976-06-29 | 1978-01-13 |
-
1983
- 1983-04-19 JP JP5843583U patent/JPS6033685U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533807U (en) * | 1976-06-29 | 1978-01-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6033685U (en) | 1985-03-07 |
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