JP6401979B2 - Microscope system - Google Patents

Description

The present invention relates to a microscope system, in particular, it relates to a microscope system having a tilting stage device having a eucentric properties.

Conventionally, when observing an observation target with a microscope or the like, an inclined stage device for observing the observation target with being tilted has been used.
By using a tilt stage device that has eucentric properties, even if the observation object is tilted, the focus state of the observation object does not change, and the observation area of the observation object does not move, and the observer observes the observation object. can do.

  For example, Japanese Patent Laid-Open No. 9-236755 discloses a microscope sample stage position correction method and a sample stage that correct positional deviation in the Z-axis direction while ensuring eucentricity.

JP-A-9-236755

  However, in the case of the sample stage disclosed in Japanese Patent Laid-Open No. 9-236755, only one axis can rotate the observation target, and the rotation mechanism is a mechanism that uses a rotating rail, so that it can rotate. There is a problem that the angle is also limited to the range of the rotating rail.

Therefore, an object of the present invention is to provide a microscope system having an inclined stage device having eucentric properties, which has two rotatable shafts and can be adjusted in the Z-axis direction.

According to an aspect of the present invention, in the microscope system including the tilt stage device and the objective lens, the tilt stage device includes a first frame rotatable around a first axis, and the first frame. disposed, and the second frame rotatably supported by the second axis perpendicular to the first axis by the first frame, the sample is a fixable, before Symbol second axis A third frame movable relative to the second frame along a third axial direction orthogonal to the first frame, and a first frame for fixing the first frame at an arbitrary rotation angle around the first axis. 1 fixing member, a second fixing member for fixing the second frame at an arbitrary rotation angle around the second axis, and the third frame at an arbitrary position in the third axial direction. A third fixing portion for fixing to the second frame; If, it has a, wherein said second axis and the first axis a third axis is arranged so as to pass through the predetermined intersection point, the objective lens, the first, the second and the first A microscope system is provided in which the focal position can be adjusted to the predetermined intersection of three axes, and the optical axis of the objective lens passes through the predetermined intersection and is rotatable about an axis passing through the predetermined intersection. be able to.

ADVANTAGE OF THE INVENTION According to this invention, the microscope system which has a tiltable stage apparatus which has two rotative axis | shafts and can adjust the position in a Z-axis direction and has eucentric property can be provided.

It is a perspective view for demonstrating the mode of observation by the microscope using the inclination stage apparatus concerning embodiment of this invention. It is a perspective view of the inclination stage apparatus concerning embodiment of this invention. It is a top view of the inclination stage apparatus concerning embodiment of this invention. It is a front view of the inclination stage apparatus concerning embodiment of this invention. It is sectional drawing of the inclination stage apparatus along the VV line of FIG. It is a figure which shows the rotation range of the flame | frame 12 concerning embodiment of this invention. It is a figure which shows the rotation range of the flame | frame 13 concerning embodiment of this invention. FIG. 4 is a perspective view of the tilt stage device 3 according to the embodiment of the present invention in which the frame 12 is rotated around the X axis and the frame 13 is rotated around the Y axis. 1 is a perspective view of a digital microscope system 100 in which an imaging unit including an objective lens 6 according to an embodiment of the present invention can rotate around an axis passing through an intersection point O of an X axis, a Y axis, and a Z axis.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view for explaining a state of observation by a microscope using the tilt stage device according to the present embodiment. FIG. 1 shows a state in which a sample that is an observation target mounted on an inclined stage device is observed using a microscope system. FIG. 2 is a perspective view of the tilt stage device. FIG. 3 is a top view of the tilt stage apparatus. FIG. 4 is a front view of the tilt stage device. FIG. 5 is a cross-sectional view of the tilt stage device taken along line VV in FIG.
(Configuration of microscope system)
As shown in FIG. 1, the microscope system 1 includes a microscope 2 and an inclined stage device 3. The microscope 2 includes a base 4, a support plate 5, and an objective lens 6. A support plate 5 is fixed to the base 4, and an optical system of the microscope 2 having the objective lens 6 is fixed to the support plate 5 via an arm member (not shown). The microscope 2 may be an optical microscope or a digital microscope.

The tilt stage device 3 is fixed to the base 4 of the microscope 2 with screws 4a. The observer fixes the sample S to the tilt stage 3 so that the observation region of the sample S is located at an intersection O of the X axis, the Y axis, and the Z axis, which will be described later. The optical axis LA of the objective lens 6 passes through the intersection point O. The observer can observe the sample S fixed on the tilt stage device 3 by adjusting the focus of the objective lens 6. The tilt stage apparatus 3 has eucentric properties so that the focus state of the observation area of the sample S does not change and the observation area of the sample S does not move even if the tilt stage apparatus 3 is tilted.
(Configuration of tilt stage device)
The tilt stage device 3 includes a support member 11 and three frames 12, 13, and 14. The frame 12 is a rectangular cylinder, and the frames 13 and 14 are cylinders.

  The support member 11 is a plate member that is bent in a U-shape and has bent portions 11A and 11B on both sides and a flat central portion 11C between the two bent portions 11A and 11B. In the central portion 11C of the support member 11, four holes 11c for fixing the support member 11 to the base 4 with four screws 4a are formed.

  The frame 12 having a rectangular cylindrical shape is supported by the support member 11 so as to be rotatable around the X axis between the two bent portions 11A and 11B. The frame 12 having a rectangular cylindrical shape has four side walls 12A, 12B, 12C, and 12D.

In each of the two side walls 12A and 12B facing the inner wall surfaces 12a and 12b, a hole (not shown) is formed along the X axis which is the rotation axis of the frame 12.
A hole (not shown) along the X-axis serving as the rotation axis of the frame 12 is also formed in each of the upper portions of the two bent portions 11A and 11B of the support member 11.

  The shaft screw 15A is inserted into the hole formed in the bent portion 11A and the hole formed in the side wall 12A, and the shaft screw 15B is inserted into the hole formed in the bent portion 11B and the hole formed in the side wall 12B. As a result, the frame 12 is configured to be rotatable around the X axis.

A stopper member 16 is provided on the shaft screw 15B. By rotating the stopper member 16 in a predetermined direction, the frame 12 moves in the X-axis direction and is pressed by a step portion (not shown) of the shaft screw 15A so that the frame 12 does not rotate around the X-axis. Can be fixed. When the stopper member 16 is rotated in a direction opposite to the predetermined direction in a state where the frame 12 does not rotate around the X axis, the stepped portion of the shaft screw 15A of the frame 12 is not pressed, and the frame 12 It can be rotated around.
Therefore, the stopper member 16 constitutes a fixing member that fixes the frame 12 at an arbitrary rotation angle around the X axis.

  The frame 13 having a cylindrical shape is supported inside the rectangular cylindrical frame 12 so as to be rotatable around the Y axis. Holes 12c1 and 12d1 along the Y axis, which is the rotation axis of the frame 13, are formed in the two side walls 12C and 12D, respectively, whose inner wall surfaces 12c and 12d face each other (FIG. 5). Holes 13a1 and 13a2 are formed in the frame 13 along the Y axis, which is the rotation axis of the frame 13 (FIG. 5).

  The shaft screw 17A is inserted into the hole 12c1 formed in the side wall 12C and the hole 13a1 formed in the frame 13, and the thumb screw 17B is inserted into the hole 12d1 formed in the side wall 12D and the hole 13a2 formed in the frame 13. The frame 13 is configured to be rotatable around the Y axis.

  By turning the thumbscrew 17B in a predetermined direction, the frame 13 moves in the Y-axis direction and is pressed by the stepped portion 17A1 of the shaft screw 17A so that the frame 13 does not rotate around the Y-axis. it can. If the thumbscrew 17B is rotated in a direction opposite to the predetermined direction in a state where the frame 13 does not rotate about the Y axis, the stepped portion 17A1 of the shaft screw 17A of the frame 13 is not pressed, and the frame 13 It can be rotated around the axis.

Therefore, the thumbscrew 17B constitutes a fixing member that fixes the frame 13 at an arbitrary rotation angle around the Y axis.
As described above, the frame 13 is disposed in the frame 12 and is supported by the frame 12 so as to be rotatable around the Y axis orthogonal to the X axis.

  FIG. 6 is a diagram illustrating the rotation range of the frame 12. FIG. 7 is a diagram illustrating the rotation range of the frame 13. As shown in FIG. 6, the frame 12 is supported by the support member 11 so as to be rotatable in the range of +90 degrees to −90 degrees around the X axis. As shown in FIG. 7, the frame 13 is supported by the frame 12 so as to be rotatable in the range of +90 degrees to −90 degrees around the Y axis.

  When the sample S is tilted and observed, the observer rotates at least one of the frames 12 and 13. Since the focal length of the objective lens 6 is determined in advance, the distance between the objective lens 6 and the sample S cannot be changed.

However, when the frame 12 rotates around the X axis, the positions of the side walls 12C and 12D change in the Z axis direction. Therefore, as shown in FIG. 3, the width L1 of the side walls 12C and 12D is larger than the width L2 of the side walls 12A and 12B so that the frame 12 does not hit the objective lens 6 when the frame 12 rotates around the X axis. Is also narrower. That is, the length of the frame 12 in the Y-axis direction is shorter than the length in the X-axis direction.
Accordingly, the observer can rotate the frame 12 around the X axis while observing the sample S without worrying that the frame 12 hits the objective lens 6.

  Further, since the frame 13 disposed inside the frame 12 has a cylindrical shape, the observer does not worry about the frame 13 hitting the objective lens 6 while observing the sample S. It can also be rotated around the Y axis.

The frame 14 having a cylindrical shape can fix the sample S and is configured to be movable with respect to the frame 13 along the Z-axis direction orthogonal to the X-axis and the Y-axis.
As shown in FIG. 5, the cylindrical frame 14 has a partition wall 14A at the center. A holder 18 can be mounted on the upper portion of the partition wall portion 14A. The sample 18 to be observed is mounted on the holder 18. A recess 14A1 is formed in the central portion on the upper surface side of the partition wall 14A. A hole 14A2 is formed at the center of the partition wall 14A.

  A hole 18 a is formed at the center of the holder 18. A thumbscrew 19 is inserted into a hole 14A2 formed in the partition wall 14A and a hole 18a formed in the holder 18, and the holder screw 19 is fixed to the frame 14 by turning the thumbscrew 19 in a predetermined direction. When the screw 19 is rotated in a direction opposite to the predetermined direction, the holder 18 can be removed from the frame 14.

Further, on the upper surface side of the holder 18, four leaf springs 20 are provided as fixtures for fixing the sample S. One end of each leaf spring 20 is fixed to the holder 18, and the other end of each leaf spring 20 is located away from the upper surface of the holder 18, and the sample S placed on the holder 18 is moved by the spring force to the holder 18. The four leaf springs 20 are provided on the holder 18 so as to be pressed toward the upper surface side.
Note that a belt, a net, or the like may be used as the fixture instead of the leaf spring 20.

  A male screw portion is formed at the upper portion of the outer peripheral surface of the frame 14, and a female screw portion is formed at the lower portion of the inner peripheral surface of the frame 13, and the male screw portion of the frame 14 and the female screw portion of the frame 13 are formed. A threaded portion SC is formed by the screw portion (FIG. 5).

  When the frame 14 is rotated about the axis of the cylindrical frame 14, the threaded portion SC can be moved up and down along the Z-axis direction with respect to the frame 13. When the frame 14 is rotated around the axis in a predetermined direction, the frame 14 moves upward along the Z-axis direction with respect to the frame 13, and when the frame 14 is rotated around the axis in a direction opposite to the predetermined direction. The frame 14 moves downward along the Z-axis direction with respect to the frame 13.

  That is, the frame 14 is screwed to the frame 13 so as to be rotatable around the Z axis, and the position of the frame 14 in the Z axis direction can be adjusted by rotating the frame 14 around the Z axis. Yes.

  A screw hole 13b into which a set screw 21 is screwed is formed below the frame 13 (FIG. 5). When the screw 21 rotates in a predetermined direction, the screw 21 moves toward the frame 14 along the screw hole 13b. When the screw 21 rotates in a direction opposite to the predetermined direction, the screw 21 moves away from the frame 14 along the screw hole 13b. .

  Therefore, when the screw 21 is rotated in a predetermined direction, the tip of the screw 21 comes into contact with the frame 14, and the frame 14 can be fixed to the frame 13 so that the frame 14 does not rotate. That is, the screw 21 constitutes a fixing member that fixes the frame 14 to the frame 13 at an arbitrary position in the Z-axis direction.

Therefore, the observer can finely adjust the position in the height direction, that is, the Z-axis direction, by rotating the frame 14 around the axis.
(Function)
As shown in FIG. 1, the tilt stage device 3 is fixed to the base 4 of the microscope 2. The sample S to be observed is mounted on the holder 18, and the sample S is fixed to the holder 18 by four plate springs 20 that are fixtures.

Then, the observer operates the stopper member 16 to adjust and fix the frame 12 to a desired angle around the X axis, and operates the thumbscrew 17B to bring the frame 13 to the desired angle around the Y axis. It can be adjusted and fixed.
Further, the observer can fix the frame 14 by adjusting the screw 14 to a desired position, that is, height in the Z-axis direction.

  Even if the frame 12 is changed to a desired angle around the X axis in a state where the focal position of the objective lens 6 is at the intersection point O of the X axis, Y axis and Z axis, the focal position of the objective lens 6 does not change. In addition, the observation area of the sample S does not change.

  Furthermore, even if the frame 13 is changed to a desired angle around the Y axis in a state where the focal position of the objective lens 6 is at the intersection point O of the X axis, the Y axis, and the Z axis, the focal position of the objective lens 6 is changed. In addition, the observation area of the sample S does not change.

FIG. 8 is a perspective view of the tilt stage device 3 in which the frame 12 is rotated about the X axis and the frame 13 is rotated about the Y axis.
As shown in FIG. 8, the observer observes the sample S by rotating the sample S around the X axis and the Y axis of the sample S and adjusting the position in the Z axis direction by the tilt stage device 3. be able to. Therefore, the observer can move the sample S in all directions while performing eucentric observation.

  As described above, according to the above-described embodiment, it is possible to provide an inclined stage device having two centric axes and capable of adjusting the position in the Z-axis direction and having eucentricity.

In the above-described embodiment, the objective lens 6 can be adjusted in focus, but is fixed to the tilt stage device 3.
However, the objective lens 6 may be rotatable around an axis passing through the intersection point O of the X axis, the Y axis, and the Z axis.

FIG. 9 is a perspective view of the digital microscope system 100 in which the imaging unit including the objective lens 6 can rotate around an axis passing through the intersection point O of the X axis, the Y axis, and the Z axis.
As shown in FIG. 9, the tilt stage device 3 described above is fixed to the base portion 31. The base portion 31 is fixed to the fixed plate 32 via a height adjustment mechanism 33.

  The support plate 34 is fixed to the fixed plate 32 so as to extend in a direction of 90 degrees with respect to the surface of the fixed plate 32. A rotation unit 35 is fixed to the support plate 34. The rotating unit 35 includes a rotating plate 36 that can rotate around a predetermined axis W. Here, the axis W coincides with the Y axis described above, but it does not have to coincide.

  A connection unit 37 is fixed to the rotary plate 36, and an imaging unit 38 having the objective lens 6 is fixed to the connection unit 37. The connection unit 37 is provided with an operation lever 37a. By operating the operation lever 37a, the connection unit 37 is moved in the direction of the arrow A1 and the direction of the arrow A2 opposite to the direction of the arrow A1 in FIG. 37 and the imaging unit 38 can be rotated around the axis W.

  As described above, the objective lens 6 of the imaging unit 38 can adjust the focal position at the intersection point O of the X axis, the Y axis, and the Z axis, and can rotate within a predetermined range around the intersection point O. . The tilt stage device 3 described above can also be applied to such a microscope system 100.

  The present invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the scope of the present invention.

1 microscope system, 2 microscope, 3 tilt stage device, 4 base, 4a screw, 5 support plate, 6 objective lens, 11 support member, 11A bent part, 11B bent part, 11C central part, 11c hole, 12 frame, 12A side wall 12B side wall, 12C side wall, 12D side wall, 12a inner wall surface, 12c inner wall surface, 12c1 hole, 12d1 hole, 13 frame, 13a1 hole, 13a2 hole, 13b screw hole, 14 frame, 14A partition wall part, 14A1 recessed part, 14A2 hole, 15A shaft screw, 15B shaft screw, 16 stopper member, 17A shaft screw, 17A1 stepped portion, 17B screw, 18 holder, 18a hole, 19 screw, 20 leaf spring, 21 screw, 31 base portion, 32 fixing plate, 33 adjustment mechanism 34 Support plate 35 Rotation unit 36 Rotation plate 37 Connection unit 37a Operation lever, 38 imaging unit, 100 microscope system.

Claims (8)

In a microscope system having an inclined stage device and an objective lens,
The tilt stage device is:
A first frame rotatable about a first axis;
A second frame disposed within the first frame and supported rotatably by the first frame about a second axis perpendicular to the first axis;
Samples at a fixable, before SL along the third axis direction perpendicular to the second axis, the third frame movable relative to said second frame,
A first fixing member that fixes the first frame at an arbitrary rotation angle around the first axis;
A second fixing member for fixing the second frame at an arbitrary rotation angle around the second axis;
A third fixing member for fixing the third frame to the second frame at an arbitrary position in the third axial direction;
I have a,
The first axis, the second axis, and the third axis are arranged to pass through a predetermined intersection;
The objective lens is capable of adjusting a focal position at the predetermined intersection of the first, second and third axes;
The optical axis of the objective lens passes through the predetermined intersection and is rotatable around an axis passing through the predetermined intersection.
A microscope system characterized by that. The microscope system according to claim 1, wherein a length of the first frame in the second axial direction is shorter than a length of the first axial direction. Having a support member,
The microscope system according to claim 1, wherein the first frame is supported by the support member. The microscope system according to claim 3, wherein the first frame is supported by the support member so as to be rotatable in a range of +90 degrees to -90 degrees around the first axis. 5. The first frame according to claim 1, wherein the second frame is supported by the first frame so as to be rotatable in a range of +90 degrees to −90 degrees around the second axis. The microscope system according to one . The second frame and the third frame have a cylindrical shape,
The third frame is screwed to the second frame so as to be rotatable about the third axis;
6. The position of the third frame in the third axial direction can be adjusted by rotating the third frame around the third axis. The microscope system according to one . The third is fixed to the frame, the microscope system according to any one of claims 1 to 6, characterized in that it comprises a holder for mounting the sample. The microscope system according to claim 7, further comprising a fixture for fixing the sample to the holder.

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