JP2010266549A - Microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope that prevents a microscope body and a specimen or specimen placing table from interfering with each other. <P>SOLUTION: The microscope 1 used in the fields of biology, medical science, semiconductor, etc., includes: the specimen placing table 10 having a placing surface for placing a specimen W thereon; the microscope body 20 having an objective lens 21 for condensing and emitting illumination light from at least a light source 24 to the specimen W on the specimen placing table 10; and a generating section 46 for generating the position information of the microscope body 20 and top of the specimen W; a determining section 45 for determining whether position information has exceeded a prescribed position; and an output section 43 for informing that the position information has exceeded the prescribed position when the determining section 45 determines the position information has exceeded the prescribed position. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an upright microscope used in the fields of biology, medicine, semiconductors, and the like.

  Conventionally, microscopes are used for various purposes such as observation of cells in the fields of medicine and biology, inspection of IC wafers and magnetic heads, quality control of metallographic structures, and research and development of new materials in the industrial field. It's being used. In recent years, many microscope apparatuses equipped with an imaging device such as a CCD camera are used for recording an observation image. Further, as a technique for observing a sample from different angles, there is a microscope in which an optical system including an objective lens is attached to a stand device having an elevating mechanism and a rotating mechanism (see, for example, Patent Document 1). According to the microscope having the configuration described in Patent Document 1, the optical axis of the objective lens is inclined with respect to the sample as the rotation mechanism of the stand device rotates. Thereby, the sample can be observed from different angles.

JP 2001-59999 A

  However, in the technique disclosed in Patent Document 1, when the rotation angle of the rotation mechanism is increased, the microscope body including the objective lens interferes with the sample mounting table or the sample. In addition, there is a risk of interference with the sample even when the microscope body is moved up and down.

  This invention is made | formed in view of the above, Comprising: It aims at providing the microscope which prevents that a microscope main body and a sample or a sample mounting base interfere.

  In order to solve the above-described problems and achieve the object, the present invention condenses observation light from a sample mounting table having a mounting surface on which the sample is mounted and at least the sample on the sample mounting table. A microscope main body having an objective lens, a generation unit that generates position information between the microscope main body and the upper surface of the sample, a determination unit that determines whether the position information exceeds a predetermined position, And a notification unit for notifying that the position information exceeds a predetermined position when the determination unit determines that the position information exceeds a predetermined position.

  The microscope according to the present invention further includes a support column that supports the microscope main body and moves the microscope main body in a vertical direction with respect to the mounting surface of the sample mounting table in the above invention, An altitude detection unit that detects an altitude of the microscope main body is provided, and the generation unit generates the position information based on altitude information of the microscope main body detected by the altitude detection unit.

  In the microscope according to the present invention, in the above invention, the microscope body includes an imaging device that images the observation light from the sample, and the generation unit calculates a focal length from information obtained by the imaging device. Position information between the objective lens and the sample or the sample mounting table is generated by calculation.

  The microscope according to the present invention is the above-described invention, wherein the microscope is provided at the column end, and the rotation unit rotates the column so that the optical axis of the objective lens of the microscope main body is inclined with respect to the sample. An angle detection unit that is coupled to the rotation unit and detects an inclination angle of the support column, and the generation unit generates the position information based on the inclination angle detected by the angle detection unit. The determination unit determines whether the generated position information exceeds a predetermined position.

  The microscope according to the present invention further includes an input unit that inputs a height of the sample with respect to the sample mounting table in the above invention, and the generation unit is based on the height input by the input unit. The position information is generated.

  In the microscope according to the present invention, in the above invention, a position detection unit that acquires position information with respect to the sample or the sample mounting table is provided at the lower end of the microscope main body, and the determination unit includes the position detection unit. Based on the position information obtained from the above, it is determined whether or not the position information is a predetermined value or more.

  In the microscope according to the present invention as set forth in the invention described above, the position information and the predetermined position are distance information and / or angle information.

  According to the present invention, the position information of the microscope body is compared with a predetermined value set in advance to determine whether notification processing is necessary, and when the microscope body is in the corresponding position, the microscope body is notified. And it is effective in preventing that a sample or a sample mounting base interferes.

FIG. 1 is a schematic diagram illustrating a configuration of a microscope according to the present embodiment, with a part thereof cut away. FIG. 2 is a longitudinal side view showing the configuration in the vicinity of the rotating part shown in FIG. FIG. 3 is a front view showing the microscope main body and the sample mounting table shown in FIG. FIG. 4 is a front view showing a state in which the support column is set to rotate. FIG. 5 is an enlarged schematic view showing the vicinity of the microscope main body and the sample shown in FIG. FIG. 6 is a flowchart showing position information determination processing according to the embodiment of the present invention. FIG. 7 is a schematic diagram illustrating an example of a pop-up screen displayed as the notification process. FIG. 8 is a schematic diagram showing a modification of the microscope according to the embodiment of the present invention. FIG. 9 is a schematic diagram illustrating a first modification of the position information determination process according to the embodiment of the present invention. FIG. 10 is a schematic diagram illustrating an example of a pop-up screen displayed as the notification process. FIG. 11 is a schematic diagram illustrating a second modification of the position information determination process according to the embodiment.

  Hereinafter, the best mode for carrying out the microscope of the present invention will be described with reference to the drawings. The present invention is not limited to the embodiments and modifications illustrated below, and various modifications can be made without departing from the spirit of the present invention.

  FIG. 1 is a schematic diagram showing a configuration of the microscope according to the present embodiment with a part cut away, and FIG. 2 is a longitudinal side view showing the configuration in the vicinity of the rotating device. The microscope 1 according to the present embodiment schematically includes a fixed base 11, a sample mounting base 10, a microscope main body 20, a rotating unit 30, and a control mechanism 40.

  The fixed base 11 is used for flatly setting the microscope 1 at a desired place. The sample mounting table 10 has a mounting surface on which the sample W is mounted and is mounted on the fixed table 11. A mounting table driving unit 10 a that moves the sample mounting table 10 in the horizontal direction is provided between the sample mounting table 10 and the fixed table 11. The sample mounting table 10 can be arbitrarily driven by the mounting table driving unit 10a, and the sample W is moved so that the observation position of the sample W mounted on the sample mounting table 10 is on the optical axis L. be able to.

  The microscope main body 20 is mounted with components for enlarged imaging observation such as an objective lens 21, an imaging lens 22, an imaging device 23, a light source 24, and a half mirror 25, and is disposed above the placement surface 10a. The imaging lens 22, the imaging device 23, and the half mirror 25 are disposed on the optical axis L of the objective lens 21. In the microscope body 20, the illumination light emitted from the light source 24 is reflected by the half mirror 25, thereby changing the direction in the direction of the optical axis L. Then, the illumination light is focused and irradiated on the sample W by passing through the objective lens 21. The reflected light from the sample W passes through the objective lens 21 and the half mirror 25 again, enters the imaging lens 22, and is imaged on the imaging device 23 by the imaging lens 22. The imaging device 23 includes a CCD camera or the like. As a result, the imaging device 23 captures an enlarged image of the sample W, and outputs and displays the imaging data on the control unit 41, thereby enabling the observation of the sample W in an enlarged manner. When the support column 31 is arranged perpendicular to the fixed base 11 (parallel to the vertical line V), the microscope main body 20 is also arranged parallel to the vertical line V.

  Moreover, the rotation part 30 is provided between the convex parts 11a and 11b arrange | positioned at the fixed base 11, and as shown in FIG. 2, the rotating shaft 32 integrated with the lower end of the support | pillar 31 is made into the convex parts 11a and 11b. The support holes 3a and 3b are formed in a rotatable manner via a cylindrical bearing 33. Thereby, the support | pillar 31 is supported so that rotation around the horizontal axis line H of the front-back direction is possible. The rotary shaft 32 is prevented from rotating by loosening the knob 34 because the tip of the knob 34 with a set screw 34a fastened to the female screw portion around the support hole 3 of the fixed base 11 is pressed against the rotating shaft 32. It is comprised so that it can rotate freely. In addition, an angle sensor 32a is attached to the other end portion of the rotation shaft 32, and the rotation angle of the column 31 that the generation unit 46 rotates in conjunction with the rotation shaft 32 is determined based on rotation information detected by the angle sensor 32a. Generated as position information. Note that pulse information may be output using a rotary encoder as the angle sensor 32a, and a voltage or resistance value change may be output using a potentiometer.

  Here, the support column 31 is provided so as to extend upward in the same length as the microscope main body 20. A main body attachment portion 35 is attached to the upper end side of the support column 31, and the microscope main body 20 is attached to the distal end side of the main body attachment portion 35, thereby connecting the rotary support column 31 and the microscope main body 20. The position of the main body attachment portion 35 is fixed by pressing the tip of a knob 36 with a set screw 36 a fastened to the female screw portion of the main body attachment portion 35 to a slider 37 formed in the longitudinal direction of the support column 31. The mounting structure is slidable by loosening, and can be fixed to an arbitrary position of the column 31. Thereby, the position of the objective lens 21 with respect to the sample W can be variably set. The rotating unit 30 is configured to be able to rotate the microscope main body 20 so that the optical axis L of the objective lens 21 is inclined with respect to the sample W by rotating the column 31 portion. In addition, on the side surface of the column 31, an elevation detection unit 31 a capable of detecting the pressure contact of the slider 37 is provided in order to observe the altitude of the main body attachment unit 35. The elevation detection unit 31a outputs a detection signal detected by a piezoelectric element or the like to the generation unit 46.

  In addition, the microscope 1 includes a control mechanism 40. The control unit 41 is configured using a CPU or the like, and controls processing and operation of each unit of the microscope 1. The control unit 41 performs predetermined input / output control on information input / output to / from each component and performs predetermined information processing on this information.

  The input unit 42 is configured using a keyboard, a mouse, and the like, and acquires various information necessary for analyzing the sample, instruction information for the analysis operation, and the like from the outside. The output unit 43 serving as a notification unit is configured using a monitor, a printer, a communication mechanism, and the like, outputs various information including the analysis result of the sample, and performs a notification process according to the determination of the determination unit 45. You may provide the mechanism which outputs light, such as sound or LED, as needed. The storage unit 44 is configured using a hard disk that magnetically stores information and a memory that loads various programs related to the process from the hard disk and stores them electrically when the microscope 1 executes the process. Various information including the analysis results and the like is stored. The storage unit 44 may include an auxiliary storage device that can read information stored in a storage medium such as a CD-ROM, a DVD-ROM, or a PC card. The determination unit 45 compares the microscope main body 20 and the sample or the sample mounting table 10 generated by the generation unit 46 with the predetermined value set in advance, and whether or not a notification process by the output unit 43 is necessary. Determine whether. The generation unit 46 generates position information based on information output from the altitude detection unit 31a and the angle sensor 32a.

  With the microscope 1 configured as described above, the light emitted from the light source 24 is reflected by the half mirror 25 toward the objective lens 21, and the light reflected from the sample enters the imaging device 23 through the imaging lens 22. Thus, the enlarged observation of the sample can be performed. In the usage of the microscope 1 of the present embodiment, first, the microscope main body 20 is fixed to the distal end of the main body attachment portion 35 attached to the rotary column 31. Thereafter, the sample W is placed on the placement surface 10a of the stage 10, and the microscope main body 20 including the objective lens 21 is lowered or raised by operating the knob 36 while observing the liquid crystal monitor, as shown in FIG. As described above, the knob 36 is fixed so as to coincide with the position of the focal length D1 where the surface of the sample W is in focus. Thereby, the enlarged observation of the sample W is possible.

  Here, the up-and-down movement of the microscope body 20 will be described with reference to FIG. FIG. 3 is a front view showing the microscope main body 20 and the sample mounting table 10 of the microscope 1 shown in FIG. In FIG. 3, a notification distance Dth is set in advance so that the microscope body 20 and the sample W do not come into contact with the focal length D1 between the microscope body 20 and the sample W placed on the sample mounting table 10. The When the focal length D1 between the lower end of the microscope main body 20 and the sample W becomes smaller than the notification distance Dth due to the raising and lowering of the microscope main body 20, the output unit 43 shown in FIG. Notify that the distance between them is a collision risk distance.

  The focal length D1 is calculated by the generation unit 46 that has received the detection signal output from the elevation detection unit 31a provided in the column 31 to convert the signal, so that the main body attachment unit 35 and the microscope main body 20 lower end are converted. The focal length D1 can be obtained by generating the position information based on the distance information. When the focal distance D1 is obtained, the control unit 41 outputs position information to the determination unit 45 and compares it with the notification distance Dth to determine whether the notification process is necessary. Further, the focal length may be calculated based on the imaging data output from the imaging device 23 to the control unit 41.

  Next, the case where the column 31 is rotated by the rotating unit 30 will be described with reference to FIG. FIG. 4 is a front view showing a state where the support column 31 is set to rotate at the inclination angle θ1. The microscope body 20 rotates around the intersection point P <b> 1 between the vertical line V and the upper surface of the sample mounting table 10 in conjunction with the rotation of the column 31. At this time, an angle at which the microscope main body 20 is inclined with respect to the vertical line V is defined as an inclination angle θ1. The inclination angle θ <b> 1 is an angle formed by the vertical line V and the optical axis L of the objective lens 21, and also corresponds to the inclination angle of the column 31. The rotation of the column 31 allows the sample W to be observed obliquely from above.

  Further, position information calculation when the microscope body 20 is tilted will be described with reference to FIG. FIG. 5 is an enlarged schematic diagram showing the vicinity of the microscope main body 20 and the sample W shown in FIG. In FIG. 5, the angle formed between the vertical line V and the upper plane of the sample mounting table 10 is an inclination angle θ <b> 1 formed by the vertical line V and the optical axis L of the objective lens 21, the rotation center P <b> 1, and the lower end of the microscope body 20. It is divided into a fixed angle θ2 formed by the line segment L1 connecting P2 and the optical axis L, and a rotation angle θ3 formed by the upper plane of the sample mounting table 10 and the line segment L1. Here, the fixed angle θ <b> 2 is a fixed value determined by the microscope body 20. Based on the tilt angle θ <b> 1 and the rotation angle θ <b> 3 that change with the rotation of the microscope body 20, the generation unit 46 calculates the distance between the lower end P <b> 2 of the microscope body 20 and the upper plane of the sample mounting table 10.

  The generation unit 46 calculates the approach distance D2 based on the inclination angle θ1 corresponding to the inclination angle of the column 31 received from the angle sensor 32a, and generates position information. Here, let P3 be the intersection of a line segment parallel to the plane of the sample mounting table 20 at the lower end P2 and the vertical line V, and pay attention to the triangle composed of the intersection P1, the lower end P2, and the point P3. A distance (D2 + Dh) can be calculated. When the height Dh of the sample W is known, the height Dh is input from the input unit 42. When the height Dh is unknown, the focal length information from the imaging device 23 and the altitude information from the altitude sensor 31a are input. Based on the above, the height Dh of the sample W is calculated. The approach distance D2 can be obtained by subtracting the height Dh from the distance (D2 + Dh) obtained by the equation (1). The obtained approach distance D2 is output as position information by the generation unit 46 to the control unit 41, and the control unit 41 compares the approach distance D2 with the notification distance Dth to determine whether the notification process is necessary. Instruct.

  L1sin (θ1 + θ2) = D2 + Dh (1)

  Here, the position information determination process performed by the control unit 41 will be described with reference to FIG. FIG. 6 is a flowchart showing position information determination processing according to the embodiment of the present invention. First, when the control unit 41 acquires position information from the generation unit 46 (step S102), the control unit 41 instructs the determination unit 45 to determine whether the position information is notified or not (step S104). The determination unit 45 that has received the notification necessity determination processing instruction from the control unit 41 compares the approach distances D1 and D2 as the position information generated by the generation unit 46 with a predetermined value set as the notification distance Dth. Then, it is determined whether or not the approach distances D1 and D2 are less than a predetermined value, and the necessity of the notification process is output to the control unit 41 (step S106). Here, the control part 41 complete | finishes a positional infomation determination process, when the judgment to the effect that an alerting | reporting process is not required is obtained (step S106: No). When it is determined that the notification process is required (step S106: Yes), the process proceeds to step S108 and the output unit 43 is instructed to perform the notification process that the approach distances D1 and D2 are within a predetermined value. . By repeating the above-described process as appropriate, collision with the sample W or the sample mounting table 10 due to movement of the microscope main body can be prevented.

  Note that the notification processing in step S108 may be notified by sound using an alarm device or the like, or may be notified visually using an LED or the like. Further, a pop-up screen may be displayed on the monitor or the like, or the above-described notification may be combined. FIG. 7 is a schematic diagram illustrating an example of a pop-up screen displayed as the notification process. The pop-up screen T1 shown in FIG. 7 displays the approach distance when the approach distances D1 and D2 are less than a predetermined value set in advance as the notification distance Dth. Here, for example, the notification distance Dth is set to 25 mm, and the approach distances D1 and D2 are 20 mm. The person in charge of the apparatus can close the screen by specifying and operating the OK button B1 displayed on the pop-up screen T1 after confirming the approach distance. In this pop-up screen T1, not only the approach distances D1 and D2 but also the notification distance Dth can be displayed.

  Further, the focal length with respect to the sample W may be adjusted by the Z-axis drive unit 26. FIG. 8 is a schematic diagram showing a modification of the microscope 1 according to the embodiment of the present invention. The Z-axis drive unit 26 shown in FIG. 8 can adjust the focus of light passing through the objective lens 21 by being driven in a direction parallel to the vertical line V by a stepping motor under the control of the control unit 41. . Further, it is possible to calculate the focal length D1 based on the driving amount of the Z-axis drive unit 26 and the imaging data from the imaging device, and to perform notification necessity determination processing with the notification distance Dth shown in FIG. The Z-axis drive unit 26 may be a servo motor or a motor having an external scale.

  According to the embodiment described above, even when the microscope main body is moved up and down or rotated, it is possible to avoid contact by informing before the microscope main body and the sample or the sample mounting table come into contact with each other. Further, even when the microscope main body is moving up and down or rotating, the position information can be continuously monitored by each sensor, and notification can be made by performing determination processing.

  Here, the necessity determination of the notification process in FIG. 5 may be determined from the inclination angle. FIG. 9 is a schematic diagram illustrating a first modification of the position information determination process according to the embodiment. The lower end portion P2 of the microscope body 20 moves on the arc A in conjunction with the rotation of the support column 31 shown in FIG. Here, the notification angle θ4 determined by the determination unit 45 is, for example, based on the intersection P4 between the arc A and the upper end of the notification distance Dth as a notification reference, the determination unit 45 moves on the arc A in the direction of the sample mounting table 10. When it moves and the lower end P2 exceeds the intersection P4, that is, when it exceeds the set notification angle θ4, it becomes a notification target. When the tilt limit angle is set, an angle obtained by subtracting 10 ° from the tilt limit angle may be set as the notification angle. Instead of subtraction, for example, the tilt angle may be 90% of the tilt limit range. You may set so that it may become alerting | reporting object, when exceeding (namely, when the remaining inclination possible range becomes 10% or less).

  As the notification angle θ4, a notification distance Dth is set, and the notification angle θ4 formed by the vertical line V, the rotation center P1, and the intersection point P4 corresponding to the intersection point P4 on the arc A that changes according to the altitude of the sample W is appropriately set. You may make it calculate automatically. The notification distance Dth can be arbitrarily set, and may be set to 0 or a plurality may be set depending on circumstances. Further, the altitude of the sample W may be input when known, or may be calculated based on imaging data obtained from the imaging device.

  FIG. 10 is a schematic diagram illustrating an example of a pop-up screen displayed as the notification process. The pop-up screen T2 shown in FIG. 10 displays the tiltable limit angle and the current tilt angle. In FIG. 10, for example, the current tilt angle is a case where the tiltable limit angle is set to 60 ° and the notification angle is set to 50 °, and the rotation angle (θ1 + θ2) of the microscope body 20 is 50 °. When this happens, a pop-up screen T2 is displayed. When the person in charge of the device presses the OK button B2 after confirmation, the screen is closed. The pop-up screen T2 may display a notification angle θ4, a remaining rotation possible angle, and the like.

  In addition, the notification necessity determination process in the present embodiment may be performed by a sensor provided at the lower end of the microscope body 20. FIG. 11 is a schematic diagram illustrating a second modification of the position information determination process according to the embodiment. The microscope main body 20 shown in FIG. 11 is provided with sensors 27 and 28 at the lower end of the microscope main body 20. The detection signal from the sensors 27 and 28 is generated and converted by the generation unit 46 as position information. Is determined based on a predetermined value whether or not the generated position information is in an area for performing the notification process. The control unit 41 instructs the output unit 43 to notify in accordance with the determination of the determination unit 45. Here, the sensors 27 and 28 are preferably installed on the side surface of the microscope body 20 in the rotational direction in which the microscope body 20 rotates. As the sensors 27 and 28, inductive proximity sensors can be used, and they are detected by using impedance changes of detection coils inside the sensors 27 and 28. A sensor using infrared rays, capacitance, ultrasonic waves, or electromagnetic waves can also be used.

  In this modification, the notification distance Dth can be arbitrarily set, and may be set to 0 or a plurality may be set depending on circumstances. When a plurality of notification distances Dth are set, visual notification processing such as sound or LED is preferably changed according to each notification distance. In the present embodiment, the height of the sample W is used as a reference. However, when the microscope main body 20 and the sample W do not come into contact with each other due to the rotation of the microscope main body 20, the reference of the rotation notification angle is used as the reference for the sample mounting table 10. It may be set to the upper plane.

  Furthermore, even in a microscope having a revolver and having a plurality of objective lenses, it is possible to determine whether or not notification processing is necessary for each objective lens. If position information between the microscope main body 20 and the sample W can be calculated by the imaging device, the elevation detection unit 31a may not be provided.

  As described above, the microscope according to the present invention is useful for a microscope that observes a sample via an optical system, and is particularly suitable for an upright microscope that observes a sample placed on a stage from above. Yes.

DESCRIPTION OF SYMBOLS 1 Microscope 10 Sample mounting base 10a Mounting base drive part 11 Fixed base 20 Microscope main body 21 Objective lens 22 Imaging lens 23 Imaging device 24 Light source 25 Half mirror 26 Z-axis drive part 31 Support | pillar 32 Rotating shaft 33 Cylindrical bearing 40 Control mechanism 41 Control Unit 42 Input unit 43 Output unit 44 Storage unit 45 Judgment unit 46 Generation unit W Sample

Claims (7)

A sample mounting table having a mounting surface on which the sample is mounted;
A microscope main body having at least an objective lens for condensing observation light from the sample on the sample mounting table;
A generating unit for generating positional information between the microscope main body and the upper surface of the sample;
A determination unit for determining whether or not the position information exceeds a predetermined position;
A notification unit for notifying that the position information exceeds a predetermined position when the determination unit determines that the position information exceeds a predetermined position;
A microscope comprising: The microscope main body is further supported, and the microscope main body further includes a support column that moves the microscope main body in a vertical direction with respect to the mounting surface of the sample mounting table,
The support column includes an altitude detection unit that detects the altitude of the microscope body,
The microscope according to claim 1, wherein the generation unit generates the position information based on altitude information of the microscope main body detected by the altitude detection unit. The microscope body has an imaging device that images the observation light from the sample,
The microscope according to claim 1, wherein the generation unit generates position information between the objective lens and the sample or the sample mounting table by calculating a focal length from information obtained by the imaging device. . A rotating unit that is provided at an end of the column and rotates the column so that the optical axis of the objective lens of the microscope main body is inclined with respect to the sample;
An angle detection unit connected to the rotating unit and detecting an inclination angle of the support;
With
The generation unit generates the position information based on the tilt angle detected by the angle detection unit,
The microscope according to claim 1, wherein the determination unit determines whether the generated position information exceeds a predetermined position. An input unit for inputting a height of the sample with respect to the sample mounting table;
The microscope according to any one of claims 1 to 3, wherein the generation unit generates the position information based on the height input by the input unit. In the lower end of the microscope main body, a position detection unit for obtaining position information with the sample or the sample mounting table is provided,
5. The determination unit according to claim 1, wherein the determination unit determines whether the position information is a predetermined value or more based on the position information obtained from the position detection unit. The microscope described.   The microscope according to any one of claims 1 to 6, wherein the position information and the predetermined position are distance information and / or angle information.

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