JP5893313B2 - Microscope system - Google Patents

Description

  The present invention relates to a microscope system including an imaging unit.

  Conventionally, in the field of microscopes, an imaging unit such as a CCD camera is used in the observation optical system for the purpose of observing a sample at the same time by multiple observers, or for placing an enlarged image of a sample on a business document such as a report document. A device equipped with is often used. As such a microscope system, an optical head integrated with an observation optical system and a CCD camera provided at an end thereof is arranged above the stage, and an image taken by the CCD camera is displayed on application software on a personal computer, For the purpose of focusing, an electric focusing unit that drives the optical head is remotely controlled by application software on a personal computer.

  In recent years, a microscope system has also been proposed in which the optical head is rotated around a point on the stage so that the optical head is tilted so that the specimen can be observed from various angles other than directly above the stage. (For example, refer to Patent Document 1).

JP 2010-102344 A

  By the way, in the case of a microscope capable of tilting the optical head, there is a problem that when the optical head is tilted, the observation point and the focus position once aligned are shifted. For example, as shown in FIG. 20, when the rotation center O of the optical head 90 is set to a predetermined height on the stage 91, the optical axis R of the optical head 90 is orthogonal to the surface of the stage 91. When the optical head 90 is tilted after focusing on the surface of the specimen 92, the observation point is shifted from the position P1 to the position P2 by the distance dX. Further, the focal point is also shifted from the position P1 to the position P3 by the distance dZ.

  Further, as shown in FIG. 21, in order to observe the observation point (position P4) on the surface of the specimen 92 from an oblique direction, the optical axis R of the optical head 90 is inclined with respect to the axis Z0 orthogonal to the surface of the stage 91. When the optical head 90 is focused on the surface of the specimen 92, the observation point is also shifted from the position P4 to the position P5.

  In order to solve such a problem, in Patent Document 1, the focus of the optical head is adjusted to the sample mounting surface in a state where the height of the sample mounting surface of the stage is matched with the height of the rotation center of the optical head. Thus, after the focal position of the optical head and the rotation center are matched, the specimen is placed on the stage, and the height of the stage is adjusted to focus on the specimen.

  However, in this case, a step of once focusing the optical head on the specimen mounting surface must be executed, and the operation is complicated. In particular, when observing a specimen having a different thickness or a specimen having a step inside, such a step must be executed every time the height of the specimen is changed, and thus the observation takes time.

  The present invention has been made in view of the above, and in a microscope system capable of tilting the optical head, even when the optical head is tilted, the positional deviation of the observation point and the focus can be reduced without performing complicated operations. An object of the present invention is to provide a microscope system capable of suppressing the occurrence of deviation.

  In order to solve the above-described problems and achieve the object, a microscope system according to the present invention includes an observation optical system on which light corresponding to a specimen placed on a specimen stage is incident, and an emission from the observation optical system Image signal generating means for receiving light to generate an image signal, electric head operating means for performing focusing operation by moving the observation optical system along the optical axis of the observation optical system, and the observation optical A rotating means for tilting the optical axis with respect to an axis orthogonal to the sample stage by rotating the system and the image signal generating means about an axis orthogonal to the optical axis; and a focus of the observation optical system And storage means for storing information relating to a state in which the rotation axis of the observation optical system coincides with, and control means for performing control for causing the electric head operation means to coincide with the rotation axis based on the information. And wherein the Rukoto.

  In the above microscope system, the observation optical system includes an objective lens, and the objective lens is replaceable with a second objective lens having a different focal length from the objective lens.

  In the microscope system, the control unit performs the control for each objective lens installed on the optical axis.

  The microscope system further includes an objective lens discriminating unit that discriminates an objective lens installed on the optical axis, and the control unit matches the focal point with the rotation axis according to a discrimination result by the objective lens discriminating unit. It is characterized in that control is performed.

  In the microscope system, the objective lens determination unit includes an identifier having identification information and a detection unit capable of detecting the identification information, and the identifier is provided in the objective lens.

  The microscope system includes a plurality of holding units capable of holding a plurality of objective lenses having different focal lengths, and one of the plurality of objective lenses is installed on the optical axis. The objective lens discrimination means includes an identifier having identification information and a detection means capable of detecting the identification information, and the identifier is provided in each of the plurality of holding units. And

  In the microscope system, the storage unit further stores a correspondence relationship between the identifier and the objective lens.

  In the microscope system, the information is generated based on a reference value of the confocal distance corresponding to the objective lens, and input means for receiving input of information relating to a difference between the confocal distance of the objective lens and the reference value In addition, the control means corrects the information according to the difference.

  In the microscope system, the observation optical system includes a zoom unit that can change a focal length, and the information is generated according to a reference value of each focal length that the zoom unit can change. The information processing apparatus further includes an input unit that receives an input of information regarding a difference between a focal length and the reference value, and the control unit corrects the information according to the difference.

  The microscope system further includes a vertical operation unit that integrally moves the observation optical system, the image signal generation unit, and the electric head operation unit along the optical axis, and the control unit includes the vertical operation unit. By controlling the means, the focal point is made to coincide with the rotation axis.

  The microscope system further includes stage operation means for holding the specimen stage so as to be movable in a direction orthogonal to the main surface of the specimen stage.

  The microscope system further includes an input unit that receives an input of an instruction to switch the operation of moving the observation optical system between the valid state and the invalid state by the electric head operation unit, and the control unit is configured to respond to the instruction, Control that switches between the valid state and the invalid state is performed.

  In the microscope system, the image signal generation means includes a CCD.

  The microscope system may further include second up / down operation means for moving the rotation means in a direction orthogonal to the main surface of the specimen stage.

  According to the present invention, information related to the state in which the focal point of the observation optical system and the rotation axis of the observation optical system coincide with each other is stored in the storage unit, and based on this information, the control unit determines the focal point and rotation axis of the observation optical system. Therefore, even when the optical head is tilted, it is possible to suppress the occurrence of the positional deviation of the observation point and the deviation of the focal point without performing a complicated operation.

FIG. 1 is a diagram illustrating a configuration example of a microscope system according to Embodiment 1 of the present invention. FIG. 2 is an enlarged schematic view of the position detection unit shown in FIG. FIG. 3 is a flowchart showing the operation of the microscope system shown in FIG. FIG. 4A is a schematic diagram illustrating a state in which the microscope apparatus is in a eucentric state. FIG. 4B is a schematic diagram illustrating a state in which the optical head is focused on the surface of the specimen after the microscope apparatus is placed in the eucentric state. FIG. 4C is a schematic diagram illustrating a state in which the optical head is tilted. FIG. 5A is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to Embodiment 2 of the present invention. FIG. 5B is a schematic diagram illustrating a partial configuration of the microscope apparatus included in the microscope system according to Embodiment 2 of the present invention. FIG. 6 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to Embodiment 3-1 of the present invention. FIG. 7 is an enlarged schematic view of the position detection unit shown in FIG. FIG. 8 is a flowchart showing the operation of the microscope system according to Embodiment 3-1. FIG. 9 is a schematic diagram illustrating an example of a screen displayed on the display unit. FIG. 10 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to Embodiment 3-2. FIG. 11 is a flowchart showing the operation of the microscope system according to Embodiment 3-2. FIG. 12 is a schematic diagram illustrating an example of a screen displayed on the display unit. FIG. 13 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to Embodiment 3-3. FIG. 14 is an enlarged schematic diagram showing the revolver shown in FIG. 13 and its vicinity. FIG. 15 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to the fourth embodiment. FIG. 16 is a schematic diagram illustrating an example of a screen displayed on the display unit during the same focal length correction operation. FIG. 17 is a schematic diagram illustrating an example of a screen displayed on the display unit of the microscope system according to the fifth embodiment. FIG. 18 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to the sixth embodiment. FIG. 19 is a schematic diagram showing a state in which a specimen is arranged in the microscope apparatus shown in FIG. FIG. 20 is a diagram showing a state in which the optical head is tilted in a conventional microscope apparatus. FIG. 21 is a diagram showing a state in which the optical head is tilted in a conventional microscope apparatus.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to these embodiments.
(Embodiment 1)
FIG. 1 is a diagram illustrating a configuration example of a microscope system according to the first embodiment. As shown in FIG. 1, the microscope system 1 according to the first embodiment displays a microscope apparatus 10 that generates an observation image of a specimen, an observation image generated by the microscope apparatus 10, and controls the operation of the microscope apparatus 10. And a control device 15 for performing the operation.

  The microscope apparatus 10 includes a base 100, a support column 103 installed on the base 100 via a rotating shaft 101 and a bearing 102, an XY stage 110 on which a specimen S is placed, and an XY stage 110 that moves in the vertical direction in the figure. A stage holder 111 that can be held, a stage operation unit 112 that changes the height of the stage holder 111 with respect to the base 100, an optical head 120 that is an observation optical system provided on the XY stage 110, and a column 103. And an optical head holding unit 130 that holds the optical head 120 movably. In addition, the microscope apparatus 10 may include an illumination optical system that illuminates the specimen S. The configuration of the illumination optical system may be a transmission illumination optical system provided below the XY stage 110 or an epi-illumination optical system provided above the XY stage 110. Alternatively, it may be an oblique illumination optical system that irradiates the sample S with light obliquely (that is, from a direction intersecting with an axis orthogonal to the mounting surface of the sample S). In the following description, the left-right direction of the figure is the X-axis direction, the depth direction of the figure is the Y-axis direction, and the vertical direction of the figure is the Z-axis direction, and the microscope apparatus 10 uses the XY stage 110 as the X-axis and Y-axis. It shall be installed so that it may become parallel to the surface which consists of.

  The rotation shaft 101 is fixed to the base 100. The bearing 102 is fixed to the end portion of the column 103 so that the axis R1 common to the rotating shaft 101 is orthogonal to the axis R2 of the column 103. By fitting the bearing 102 to the rotary shaft 101, the axis R2 of the support column 103 is orthogonal to the axis R1, and the support column 103 is rotatable about the axis R1. That is, the bearing 102 and the rotating shaft 101 constitute rotating means having the axis R1 of the optical head 120 connected to the support column 103 via the optical head holding unit 130 as a rotating axis. Thereby, the optical head can be tilted in the YZ plane. In the configuration shown in FIG. 1, the tilting operation of the optical head 120 is performed manually, but the optical head 120 may be tilted electrically using a motor or the like. The tiltable angle is not particularly limited.

  The stage operation unit 112 is realized by, for example, a handle 112a and a linear guide 112b that can be manually rotated by a user. When the user rotates the handle 112a, the stage holder 111 moves in a direction (vertical direction in FIG. 1) orthogonal to the main surface of the sample stage 110 according to the rotation direction and the rotation amount.

  The optical head 120 includes a lens barrel 121, an objective lens 122 provided at the end of the lens barrel 121 on the XY stage 110 side, a zoom lens group 123a provided inside the lens barrel 121, and the zoom lens group 123a. The motor-driven zoom 123 includes a motor 123b for driving, and the focal length can be changed. The imaging unit 124 is provided at the end of the lens barrel 121 opposite to the objective lens 122. Among these, the objective lens 122 and the zoom lens group 123a constitute an observation optical system into which observation light corresponding to the specimen S placed on the specimen stage 110 is incident. The imaging unit 124 is an image signal generation unit that includes an imaging element such as a CCD, for example, receives observation light that has passed through the observation optical system, and outputs an electrical signal (imaging signal) corresponding to the observation light.

The optical head holding unit 130 includes an electric head operation unit 131 fixed to the optical head 120 side, and a support 132 fixed to the support column 103 side.
The support tool 132 is fastened to the support column 103 by a fixed handle 133. In addition, the support 103 is provided with a lower stopper 134, which prevents the support 132 from slipping down. Note that the position of the support 132 with respect to the support column 103 can be manually adjusted by the user, for example, by loosening the fixed handle 133 once.

  The electric head operation unit 131 includes, for example, a linear guide 131a provided to be parallel to both the axis R2 and the optical axis L1 of the optical head 120, and a motor 131b. The electric head operation unit 131 is connected to the support tool 132 via the linear guide 131a, and changes the position in the axis R2 direction with respect to the support tool 132 by the operation of the motor 131b. Thereby, the optical head 120 becomes movable along the axis R2.

  The electric head operation unit 131 is provided with a position detection unit 135 that detects the position of the electric head operation unit 131 with respect to the support 132, in other words, the position of the optical head 120 with respect to a predetermined reference position.

  FIG. 2 is a schematic diagram showing the position detection unit 135 in an enlarged manner. As shown in FIG. 2, the position detection unit 135 includes a frame 136 provided on the electric head operation unit 131 side, a contact sensor 137 provided on the frame 136, and a flag provided on the support 132 side. (Mark member) 138. The contact sensor 137 outputs a detection signal when the flag 138 comes into contact. This detection signal is input to the control unit 154 described later.

  On the other hand, the control device 15 includes a control device main body 150 realized by a personal computer, a workstation, and the like, and a display unit 160 realized by a monitor device such as a liquid crystal panel or an organic EL panel.

  The control device main body 150 performs predetermined image processing on the operation input unit 151 that receives input of various information and commands from the outside and the image signal generated by the imaging unit 124, thereby generating an image signal for display. An image processing unit 152 to be generated, a storage unit 153, and a control unit 154 for controlling each of these units and the operation of the microscope apparatus 10 are included.

  The operation input unit 151 includes a keyboard, various input buttons and switches, a pointing device such as a mouse to which a signal is input in response to a point operation on the screen of the display unit 160, and signals input through these input devices. Is input to the control unit 154.

  The storage unit 153 is realized by a semiconductor memory such as a flash memory, a RAM, and a ROM, a recording medium such as an HDD, MO, CD-R, and DVD-R, and a drive device that drives the recording medium. A program for executing various operations, various information used during the execution of the program, an image signal input from the imaging unit 124, and the like are stored. In addition, the storage unit 153 stores information regarding a state in which the focal point FP of the optical head (observation optical system) 120 and the rotation center axis R1 of the optical head 120 overlap. Hereinafter, a state where the focal point FP of the optical head 120 and the rotation center axis R1 overlap each other is referred to as a eucentric state. Further, the information regarding the eucentric state is referred to as eucentric information.

  The eucentric information includes, for example, the same focal length of the objective lens 122, the state of each part of the microscope apparatus 10 in the eucentric state (when the motor 131b is a stepping motor, the number of pulses from the origin position of the stepping motor, Information such as an output value of the position detection unit 135).

  The control unit 154 controls the autofocus operation in the microscope apparatus 10. At that time, the control unit 154 causes each unit to perform an operation of transitioning to the eucentric state based on the information stored in the storage unit 153 according to the signal input from the operation input unit 151. For example, when the motor 131b is a stepping motor and the number of pulses from the origin position of the stepping motor is stored as eucentric information, the control unit 154 operates the motor 131b according to the number of pulses.

  The display unit 160 displays various information on the screen based on the control of the control unit 154 in addition to the observation image captured by the imaging unit 124. The display unit 160 may be realized by a monitor device on which a touch panel to which a signal is input by a touch operation on the screen is superimposed, and the display unit 160 and the operation input unit 151 may be integrated.

Next, the operation of the microscope system 1 will be described with reference to FIG. FIG. 3 is a flowchart showing the operation of the microscope system 1.
First, in step S100, the microscope system 1 is activated. In subsequent step S <b> 101, the control unit 154 displays the observation image 161 based on the image signal input from the imaging unit 124 on the display unit 160 and also displays the home position button 162. Here, the home position button 162 is a button (icon) used when the user inputs an instruction to shift the microscope apparatus 10 to the eucentric state.

  In step S102, when the operation input unit 151 detects a touch (or click) on the home position button 162 (step S102: Yes), the operation input unit 151 inputs an instruction to transition to the eucentric state to the control unit 154 (step S103).

In step S <b> 104, the control unit 154 reads eucentric information from the storage unit 153.
In step S105, the control unit 154 controls each unit of the microscope apparatus 10 based on the eucentric information, so that the focal point FP of the optical head 120 coincides with the rotation center axis R1, as shown in FIG. 4A. Is realized.

  Thereafter, as shown in FIG. 4B, the user operates the stage operation unit 112 in the Z-axis direction to focus on the surface of the specimen S placed on the XY stage 110. Then, as shown in FIG. 4C, desired observation is performed by tilting the optical head 120 in that state. During this time, the state in which the focal point FP and the rotation center axis R1 coincide with each other is maintained. Therefore, even when the optical head 120 is tilted, the observation point and the focal point FP are not displaced.

  When a signal for turning off the power is input (Step S106: Yes), the microscope system 1 ends the operation of each unit. On the other hand, when the signal to turn off the power is not input (step S106: No), the operation of the microscope system 1 returns to step S101. In step S102, when the touch on the home position button 162 is not detected (step S102: No), the operation of the microscope system 1 proceeds to step S106.

  As described above, according to the first embodiment, since the centric information is stored in the storage unit 153 in advance, the user can quickly shift the microscope apparatus 10 to the eucentric state at a desired timing. it can. Therefore, the user can easily and easily observe an observation image obtained by photographing the sample S from a desired angle without performing a troublesome operation of once focusing on the surface of the XY stage 110.

  In the first embodiment, the surface of the sample S is focused by moving the XY stage 110 in the Z-axis direction, but the state where the focal point FP of the optical head 120 coincides with the rotation center axis R1 is maintained. If possible, the focusing operation on the specimen S may be performed by other methods. For example, when the imaging unit 124 is movable with respect to the lens barrel 121, focusing may be performed by moving the imaging unit 124 along the optical axis L1. Further, when the objective lens 122 is movable with respect to the lens barrel 121, focusing may be performed by moving the objective lens 122 along the optical axis L1.

  In the first embodiment, the sample S is placed on the XY stage 110 that can be operated by the stage operation unit 112. However, the sample S may be placed on a simple plane stage. In this case, when searching for a desired observation area on the specimen S, the user may move the specimen S directly with his / her hand.

(Modification 1)
Next, a modification of the first embodiment will be described.
In step S105 illustrated in FIG. 3, the control unit 154 may cause each unit to perform an operation of transitioning to the eucentric state based on the output signal from the position detection unit 135. In this case, the flag 138 of the position detection unit 135 is provided at a position where it comes into contact with the contact sensor 137 when the eucentric state is reached. Then, when an instruction to transition to the eucentric state is input, the control unit 154 operates the motor 131b until the position detection unit 135 outputs a detection signal of the flag 138.

(Embodiment 2)
Next, a second embodiment of the present invention will be described.
5A and 5B are schematic diagrams illustrating a partial configuration of a microscope apparatus provided in the microscope system according to Embodiment 2. FIG. As shown in FIGS. 5A and 5B, the microscope apparatus 20 according to the second embodiment has a configuration in which a plurality of objective lenses 201 and 202 having different focal lengths can be exchanged. FIG. 5A shows a state in which an objective lens 201 having the same focal length D1 (for example, a magnification of 3) is set on the optical head 120. FIG. FIG. 5B shows a state where the objective lens 202 having the same focal length D2 (D2> D1, for example, the magnification is 1) is set on the optical head 120.

  Further, the support 103 is provided with an upper stopper 203 that prevents the support 132 from coming off. The configuration of the microscope apparatus 20 is the same as that shown in FIG. 1 except that the upper stopper 203 and the objective lens can be replaced.

  As described above, in the microscope system provided with a plurality of types of objective lenses that can be exchanged, the operation when only the eucentric information corresponding to one of the objective lenses (for example, the objective lens 201) is stored in the storage unit 153. Will be described.

  When observation is performed using the objective lens 201 whose eucentric information is stored in the storage unit 153, the control unit 154 moves the microscope device 20 to the Eusen by the same operation as in the first embodiment (see FIG. 3). Transition to trick state.

  When observation is performed using the other objective lens 202, the control unit 154 first causes the microscope apparatus 20 to perform an operation of shifting to the eucentric state based on the eucentric information corresponding to the objective lens 201. . Thereafter, the support 132 is moved relative to the support column 103 in the direction of the axis R2, that is, along the optical axis L1, by the same focal length difference (D2-D1), and the eucentric state is corrected. The height of the support tool 132 may be adjusted manually by the user, or the support tool 132 may be driven by an electric motor, and the control unit 154 may perform automatic control. In this case, the support tool 132 and the electric motor constitute vertical operation means for moving the optical head 120 and the electric head operation unit 131 integrally along the optical axis L1.

  According to the second embodiment described above, a eucentric state corresponding to the same focal length of each objective lens can be realized even in the microscope apparatus 20 capable of exchanging objective lenses. Further, in the case of the second embodiment, if the eucentric information corresponding to the objective lens having the shorter focal length is used, the stroke in the vertical direction of the optical head 120 can be reduced. Can be miniaturized.

(Embodiment 3-1)
Next, Embodiment 3-1 of the present invention will be described.
FIG. 6 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to Embodiment 3-1. As shown in FIG. 6, the microscope apparatus 30-1 according to Embodiment 3-1 is similar to the microscope apparatus 20 shown in FIG. 5A, and includes a plurality of objective lenses (first objective lens 301, second objective lens) having different focal lengths. The objective lens 302) is replaceable, and is different in that a position detection unit 303 is provided instead of the position detection unit 135. FIG. 6 shows a state where the first objective lens 301 is attached by a solid line, and shows a state where the second objective lens 302 is attached by a one-dot chain line. Further, the number of replaceable objective lenses may be three or more.

FIG. 7 is an enlarged schematic diagram illustrating the position detection unit 303. As shown in FIG. 7, the position detection unit 303 includes a frame 304 provided on the electric head operation unit 131 side, a contact sensor 305 provided on the frame 304, and different positions on the support 132 side. The first flag 306 and the second flag 307 are provided. The first flag 306 is provided at a position where the contact sensor 305 can be detected in a eucentric state when, for example, the first objective lens 301 having a magnification of 1 is set on the optical head 120. On the other hand, the second flag 307 is provided at a position where the contact sensor 305 can be detected in a eucentric state when, for example, the second objective lens 302 having a magnification of 3 is set on the optical head 120.
In addition, the storage unit 153 stores correspondence relationships between the first flag 306 and the first objective lens 301, and the second flag 307 and the second objective lens 302.

  Next, the operation of the microscope system according to Embodiment 3-1 will be described. FIG. 8 is a flowchart showing the operation of the microscope system according to Embodiment 3-1. The operations in steps S100 and S106 shown in FIG. 8 correspond to these steps shown in FIG.

  In step S310, the control unit 154 causes the display unit 160 to display the observation image 161 based on the image signal input from the imaging unit 124, as illustrated in FIG. Further, the control unit 154 causes the display unit 160 to display a home position 1 button 311 and a home position 2 button 312 that can be selected by the user on the same screen. The home position 1 button 311 is a button (icon) for inputting an instruction to shift the microscope apparatus 30-1 to the eucentric state corresponding to the first objective lens 301. On the other hand, the home position 2 button 312 is a button (icon) for inputting an instruction to shift the microscope apparatus 30-1 to the eucentric state corresponding to the second objective lens 302.

  In subsequent step S311, when the operation input unit 151 detects a touch (or click) on the home position 1 button 311 (step S311: Yes), the operation input unit 151 controls an instruction to shift to the eucentric state corresponding to the first objective lens 301. The data is input to the unit 154 (step S312).

In step S313, the control unit 154 causes the position detection unit 303 to start detecting the first flag 306.
In step S314, the control unit 154 starts the operation of the motor 131b.

  In step S315, when the control unit 154 detects a detection signal from the position detection unit 303 (step S315: Yes), the control unit 154 stops the operation of the motor 131b (step S316). On the other hand, when the control unit 154 does not detect the detection signal from the position detection unit 303 (step S315: No), the control unit 154 waits until the detection signal is detected (step S315).

  In step S311, when the operation input unit 151 does not detect a touch on the home position 1 button 311 (step S311: No), it determines whether a touch (or click) on the home position 2 button 312 has been detected. Confirmation is made (step S317). When the operation input unit 151 detects a touch on the home position button 312 (step S317: Yes), the operation input unit 151 inputs an instruction to transition to the eucentric state corresponding to the second objective lens 302 to the control unit 154 (step S318). .

  In step S319, the control unit 154 causes the position detection unit 303 to start detecting the second flag 307. Thereafter, the operation of the microscope system proceeds to step S314.

  If no touch on the home position button 312 is detected in step S317 (step S317: No), the operation of the microscope system proceeds to step S106.

  As described above, according to Embodiment 3-1, even when a plurality of objective lenses having different focal lengths are provided, it is possible to easily realize the eucentric state corresponding to each objective lens. Become.

(Embodiment 3-2)
Next, Embodiment 3-2 of the present invention will be described.
FIG. 10 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to Embodiment 3-2. As shown in FIG. 10, the microscope apparatus 30-2 in the embodiment 3-2 is different from the microscope 30-1 shown in FIG. 6 in a plurality of interchangeable objective lenses (first objective lenses) having the same focal length. 321 and second objective lens 322) are provided with objective lens discriminating means. In FIG. 10, the state where the first objective lens 321 is attached is indicated by a solid line, and the state where the second objective lens 322 is attached is indicated by a one-dot chain line.

The objective lenses 321 and 322 are provided with IC chips 321a and 322a, respectively, as identifiers having their own identification information (for example, identification flags).
On the other hand, below the optical head 120 (in the vicinity of the objective lenses 321 and 322), an IC chip sensor 323 is provided as detection means capable of detecting identification information of the IC chips 321a and 322a. The IC chip sensor 323 detects identification information transmitted from the IC chip 321a when the first objective lens 321 is attached to the optical head 120, and outputs a detection signal of the identification information. On the other hand, when the second objective lens 322 is attached to the optical head 120, the IC chip sensor 323 detects the identification information transmitted by the IC chip 322a and outputs a detection signal of the identification information. By combining the IC chips 321a and 322a and the IC chip sensor 323, an objective lens discrimination unit is realized.

  In this case, the storage unit 153 stores the correspondence between the identification information of the IC chip 321a and the first objective lens 321 and the correspondence between the identification information of the IC chip 322a and the second objective lens 322. .

  Next, the operation of the microscope system according to Embodiment 3-2 will be described. FIG. 11 is a flowchart showing the operation of the microscope system according to Embodiment 3-2. The operations in step S100, steps S314 to S316, and step S106 shown in FIG. 11 correspond to these steps shown in FIG.

In step S320, the control unit 154 causes the display unit 160 to display the observation image 161 and the home position button 162, as shown in FIG.
In subsequent step S321, when the operation input unit 151 detects a touch (or click) on the home position button 162 (step S321: Yes), the operation input unit 151 inputs an instruction to transition to the eucentric state to the control unit 154 (step S322). .

  In step S323, the control unit 154 detects the type (magnification or focal length) of the objective lens currently attached to the optical head 120 based on the detection signal output from the IC chip sensor 323. At this time, when the detection signal corresponds to the identification information of the IC chip 321a (step S323: first chip), the control unit 154 causes the position detection unit 303 to start detecting the first flag 306 ( Step S324). On the other hand, when the detection signal corresponds to the identification information of the IC chip 322a (step S323: second chip), the control unit 154 causes the position detection unit 303 to start detecting the second flag 307 (step S323). S325).

  At this time, the control unit 154 may read out information related to the objective lens currently attached to the optical head 120 from the storage unit 153 based on the identification information detected by the IC chip sensor 323 and display the information on the display unit 160. For example, in FIG. 12, a magnification display field 324 indicating the magnification of the objective lens is provided. As indicated by the solid line in FIG. 10, when the objective lens 321 is attached to the optical head 120, a numerical value “1” indicating the magnification (times) of the objective lens 321 is displayed in the magnification display field 324.

  In step S321, when the touch on the home position button 162 is not detected (step S321: No), the operation of the microscope system proceeds to step S106.

  As described above, according to Embodiment 3-2, since the microscope system automatically recognizes the objective lens attached to the optical head 120, the user is not aware of the in-focus difference of the objective lens. Observations can be made.

(Modification 3-2)
As the objective lens discriminating means, various configurations other than the combination of an IC chip and an IC chip sensor can be used. For example, a magnet that generates a magnetic field corresponding to the identification information may be used as the identifier, and a Hall sensor may be used as the detection means. Alternatively, a barcode may be used as the identifier, and a barcode reader may be used as the detection means.

(Embodiment 3-3)
Next, Embodiment 3-3 of the present invention will be described.
FIG. 13 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to Embodiment 3-3. As shown in FIG. 13, the microscope apparatus 30-3 according to the embodiment 3-3 can switch a plurality of objective lenses 331 and 332 having the same focal length with respect to the microscope apparatus 30-2 shown in FIG. The revolver 330 is further provided.

  FIG. 14 is an enlarged schematic diagram showing the revolver 330 and its vicinity. As shown in FIG. 14, the revolver 330 includes holding units 333 and 334 that hold the objective lenses 331 and 332, respectively. An IC chip 335 that is an identifier for the objective lens 331 is attached to the holding unit 333, and an IC chip 336 that is an identifier for the objective lens 332 is attached to the holding unit 334.

  In Embodiment 3-3, when such a revolver 330 is provided, since the user can quickly switch the objective lens, the operability of the microscope system can be further improved.

  Further, according to Embodiment 3-3, since the IC chips 335 and 336 that are identifiers of the objective lenses 331 and 332 are provided on the revolver 330 (holding portions 333 and 334) side, the IC chips are used as the objective lenses 331 and 332, respectively. It is possible to use a general-purpose objective lens instead of a dedicated product with built-in components. In this case, the type of objective lens (magnification, focal length, etc.) to be attached to the holding units 333 and 334 is registered in advance (stored in the storage unit 153), so that the objective lens detected by the IC chips 335 and 336 is detected. Automatic recognition is possible.

Note that the mounting positions of the IC chips 335 and 336 may be on the objective lenses 331 and 332 side as in the case of the embodiment 3-2 instead of the holding units 333 and 334.
Further, the objective lens discriminating means is not limited to the combination of the IC chip and the IC chip sensor, and other configurations such as a magnet and a hall sensor may be used.

(Embodiment 4)
Next, a fourth embodiment of the present invention will be described.
FIG. 15 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to the fourth embodiment. As shown in FIG. 15, the microscope apparatus 40 according to the fourth embodiment includes an electric head operation unit 400 instead of the electric head operation unit 131 shown in FIG. 13, and a position detection unit 410 instead of the position detection unit 303. Prepare. The configuration of the microscope apparatus 40 other than the electric head operation unit 400 and the position detection unit 410 is the same as that shown in FIGS. 13 and 14.

  The electric head operation unit 400 includes a linear guide 401 and a stepping motor 402. The electric head operation unit 400 is connected to the support tool 132 via the linear guide 401, and changes the position of the electric head operation unit 400 in the direction of the axis R <b> 2 with respect to the support tool 132 by the operation of the stepping motor 402.

  The position detection unit 410 has the same configuration as the position detection unit 135 shown in FIG. 2, and includes a frame body 411 provided on the electric head operation unit 400 side and a contact sensor 412 provided on the frame body 411. And a flag 413 provided on the support 132 side. The flag 413 is installed at a position where the contact sensor 412 can be detected when the electric head operation unit 400 is arranged at the position of the origin indicated by the alternate long and short dash line.

  Here, the eucentric information stored in the storage unit 153 is usually based on a reference value (design value) of the same focal length corresponding to the objective lenses 331 and 332, for each focal length that can be changed in the electric zoom 123. It is generated according to the reference value (design value). On the other hand, since there is an individual difference between the objective lenses 331 and 332 attached to the microscope apparatus 40, a difference may occur between the actual same focal length of the objective lenses 331 and 332 and the reference value. Also in the electric zoom 123, a difference may occur between the actual focal length and the reference value due to individual differences in the built-in zoom lens group 123a. For this reason, when the microscope apparatus 40 is shifted to the eucentric state based on the eucentric information stored in the storage unit 153, a slight shift occurs between the focal point FP of the optical head 120 and the rotation center axis R1. May end up. The microscope system according to the fourth embodiment is characterized by correcting such a shift.

This correction is performed as follows.
With the objective lens 321 or 322 set, the user searches the position of the optical head 120 where the field of view or the focus position does not shift by tilting the optical head 120 or the like. At this time, the user adds or subtracts the number of pulses of the stepping motor 402 from the position of the origin of the electric head operation unit 400 to the position in the eucentric state before correction when the deviation is generated. If the offset is calculated by, for example, the position of the optical head 120 where no deviation occurs can be efficiently searched. Then, for each objective lens 321, 322, the focal distance at the searched position is obtained, and the correction amount is calculated. The control unit may automatically measure the in-focus distance at the position searched by tilting or the like by the user, and the correction amount may be automatically calculated.

  FIG. 16 is a schematic diagram illustrating an example of a screen displayed on the display unit 160 during the correction operation. As shown in FIG. 16, in addition to the observation image 161 and the home position button 162, this screen includes a first in-focus correction amount entry column 421, a second in-focus correction amount entry column 422, and a zoom correction amount entry column 423. , And a correction recording button 424 are displayed. The first in-focus correction amount entry column 421 is a column in which a correction amount of the in-focus distance of the objective lens (for example, the objective lens 331) held in the holding unit 333 (hereinafter referred to as the in-focus correction amount) is input. is there. The second in-focus correction amount entry column 422 is a column in which the in-focus correction amount of the objective lens (for example, the objective lens 332) held in the holding unit 334 is input. The zoom correction amount entry column 423 is a column in which the correction amount of the focal length of the electric zoom 123 is input. When the user inputs the correction amount obtained by the search in each entry field 421 to 423 and touches (or clicks) the correction recording button 424, the control unit 154 displays the eucentric information based on the input correction amount. Correction is made and stored in the storage unit 153.

  As another correction operation, information such as the difference (correction amount) between the actual confocal distance of the objective lens 321 or 322 and the optical head 120 and the reference value (design value) is used as an instruction manual for the microscope system. The user inputs the first in-focus correction amount, the second in-focus correction amount, and the zoom correction amount on the screen shown in FIG. 16 with reference to the instruction manual and the like. Also good. In this case, the control unit 154 automatically calculates the optimal eucentric position based on the input zoom information and the zoom magnification to be combined and the type of objective lens (in the case of FIG. 15, objective lens 321 or 322). Thus, the original eucentric information is corrected and stored in the storage unit 153.

  The in-focus correction amount input to the microscope system may be recorded in a rewritable and memorable flash memory or the like, or may be registered in the control device main body 150 by application software.

  According to the fourth embodiment described above, it is possible to transition to the eucentric state even when using an objective lens or the like that is not compatible with the electric zoom 123 and has a large amount of in-focus correction.

(Embodiment 5)
Next, a fifth embodiment of the present invention will be described.
FIG. 17 is a schematic diagram illustrating an example of a screen displayed on the display unit 160 of the microscope system according to the fifth embodiment. In this screen, an on button 501 and an off button 502 used for inputting whether or not to maintain the centric state are further displayed with respect to the screen shown in FIG. The on button 501 and the off button 502 are displayed on the screen after the microscope apparatus enters the eucentric state.

  When the operation input unit 151 detects a touch (or click) on the on button 501, the operation input unit 151 inputs a signal instructing the control unit 154 to maintain the eucentric state. In response to this, the control unit 154 locks the movement of the optical head 120 in the Z-axis direction. On the contrary, when the operation input unit 151 detects a touch (or click) on the off button 502, the operation input unit 151 inputs a signal instructing the controller 154 to cancel the eucentric state maintenance. In response to this, the controller 154 unlocks the movement of the optical head 120 in the Z-axis direction.

  Here, even when the user has observed a specimen having a level difference (change in height) even after the microscope apparatus (for example, the microscope apparatus 40 shown in FIG. 15) is once shifted to the eucentric state, In some cases, the optical head 120 may be moved in the vertical direction without being conscious of the focus operation. In this case, the eucentric state will be destroyed.

  Therefore, in the fifth embodiment, the vertical movement of the optical head 120 can be locked by the user's operation in order to prevent the collapse of the eucentric state unconscious by the user.

  On the other hand, the user moves the optical head 120 up and down to perform a fine focus operation, or to perform a 3D construction operation (a three-dimensional image by capturing and combining a plurality of images having different positions on the Z axis). You may want to perform operations that make up For such a case, in the fifth embodiment, the optical head 120 can be unlocked by a user operation.

  According to the fifth embodiment described above, the user can easily set whether or not to lock the movement of the optical head 120 in the vertical direction, and can prevent unintentional collapse of the eucentric state.

(Embodiment 6)
Next, a sixth embodiment of the present invention will be described.
FIG. 18 is a schematic diagram illustrating a partial configuration of a microscope apparatus included in the microscope system according to the sixth embodiment.
As shown in FIG. 18, the microscope apparatus 60 according to the sixth embodiment has a base 601 and its own axis instead of the base 100, the XY stage 110, the stage holder 111, and the stage operation unit 112 shown in FIG. The second support column 602 fixed to the base 601 so as to be orthogonal to the main surface of 601, the vertical operation unit 603 provided on the second support column 602, and the vertical operation unit 603 with respect to the second support column 602 And a fixed handle 604 for fixing. A rotary shaft 101 that rotatably holds the bearing 102 is attached to the vertical operation unit 603. The microscope apparatus 60 includes a plane stage 610 fixed on the base 601 instead of the XY stage 110 shown in FIG. The plane stage 610 is installed such that its upper surface (specimen placement surface) is parallel to the main surface of the base 601.

  In FIG. 18, the microscope apparatus 60 is in a eucentric state. When observing the specimen with the microscope apparatus 60, as shown in FIG. 19, the specimen S is placed on the plane stage 610, and the vertical operation unit 603 is moved along the second support column 602, so that the optical head 120 is moved. Is adjusted to the surface of the specimen S. Then, the position of the vertical operation unit 603 with respect to the second support column 602 is fixed by the fixed handle 604. In this case, the position of the sample S in the XY direction is determined by the user moving the sample S directly on the plane stage 610.

  By configuring the microscope apparatus 60 in this way, it is not necessary to provide a mechanism for moving the stage (for example, the stage operation unit 111 shown in FIG. 1), and thus the microscope apparatus 60 can be manufactured at low cost. Further, according to such a configuration, even when observing a thick specimen S or a specimen S having a different thickness, the eucentric state is realized without increasing the vertical stroke of the optical head 120. can do.

  In the microscope device 60, when an objective lens having a deep depth of focus on the sample S side, a sufficiently wide field of view, and a low magnification is used, even if the eucentric state is slightly broken during the focusing operation, XY Since the deviation of the visual field and the focal position in the direction do not become so large, a high degree of accuracy is not required for the operation by the vertical operation unit 603 and the fixed handle 604. Therefore, in such a case, the burden on the user who operates the up-and-down operation unit 603 and the fixed handle 604 can be suppressed.

  Note that the present invention is not limited to the above-described first to sixth embodiments and modifications thereof, and various combinations can be made by appropriately combining a plurality of constituent elements disclosed in the respective embodiments and modifications. Can be formed. For example, some constituent elements may be excluded from all the constituent elements shown in each embodiment or modification, or may be formed by appropriately combining the constituent elements shown in different embodiments or modifications. May be.

DESCRIPTION OF SYMBOLS 1 Microscope system 10, 20, 30-1, 30-2, 30-3, 40, 60 Microscope apparatus 100 Base 101 Rotating shaft 102 Bearing 103 Post 110 XY stage 111 Stage holder 112 Stage operation part 112a Handle 112b Linear guide 120 Optical Head (observation optical system)
121 barrel 122, 201, 202, 301, 302, 321, 322, 331, 332
Objective lens 123 Electric zoom 123a Zoom lens group 123b Motor 124 Imaging unit 130 Optical head holding unit 131 Electric head operation unit 131a Linear guide 131b Motor 132 Supporting tool 133 Fixed handle 134 Lower stopper 135, 303, 410 Position detection unit 136, 304 411 Frame 137, 305, 412 Contact sensor 138, 306, 307, 413 Flag 15 Control device 150 Control device main body 151 Operation input unit 152 Image processing unit 153 Storage unit 154 Control unit 160 Display unit 161 Observation image 162 311 312 Home position button 203 Upper stopper 321a, 322a IC chip 323 IC chip sensor 324 Magnification display field 330 Revolver 333, 334 Holding part 335, 336 IC chip 40 Electric head operation unit 401 Linear guide 402 Stepping motor 421 First in-focus correction amount entry field 422 Second in-focus correction amount entry field 423 Zoom correction amount entry field 424 Correction recording button 501 On button 502 Off button 601 Base 602 Second support 603 Up / down operation unit 604 Fixed handle 610 Plain stage 90 Optical head 91 Stage 92 Sample

Claims (14)

An observation optical system in which light corresponding to the specimen placed on the specimen stage is incident;
Image signal generating means for receiving the light emitted from the observation optical system and generating an image signal;
Electric head operation means for performing a focusing operation by moving the observation optical system along the optical axis of the observation optical system;
Rotating means for inclining the optical axis with respect to an axis orthogonal to the sample stage by rotating the observation optical system and the image signal generating means about an axis orthogonal to the optical axis;
Storage means for storing eucentric information relating to the eucentric state in which the focal point of the observation optical system and the rotation center axis of the observation optical system coincide with each other;
Operation input means for receiving an input of an instruction to transition to the eucentric state;
Control means for controlling the electric head operation means to make the focal point coincide with the rotation center axis based on the eucentric information when the operation input means accepts the input of the instruction ;
A microscope system comprising: The observation optical system includes an objective lens,
The microscope system according to claim 1, wherein the objective lens is replaceable with a second objective lens that has a different focal length from the objective lens.   The microscope system according to claim 2, wherein the control unit performs the control for each objective lens installed on the optical axis. An objective lens discriminating means for discriminating an objective lens installed on the optical axis;
The microscope system according to claim 3, wherein the control unit performs control to make the focal point coincide with the rotation center axis according to a determination result by the objective lens determination unit. The objective lens discrimination means includes an identifier having identification information and a detection means capable of detecting the identification information,
The microscope system according to claim 4, wherein the identifier is provided in the objective lens. A plurality of holding units capable of holding a plurality of objective lenses having the same focal length from each other, further comprising an objective lens exchanging means for installing one of the plurality of objective lenses on the optical axis;
The objective lens discrimination means includes an identifier having identification information and a detection means capable of detecting the identification information,
The microscope system according to claim 4, wherein the identifier is provided in each of the plurality of holding units.   The microscope system according to claim 5, wherein the storage unit further stores a correspondence relationship between the identifier and the objective lens. The eucentric information is generated based on a reference value of the same focal length corresponding to the objective lens,
An input unit that receives input of information regarding a difference between the same focal length of the objective lens and the reference value;
The microscope system according to claim 2, wherein the control unit corrects the eucentric information according to the difference. The observation optical system includes a zoom unit capable of changing a focal length,
The eucentric information is generated according to a reference value of each focal length that can be changed by the zoom means,
An input unit that receives input of information on a difference between each focal length of the zoom unit and the reference value;
The microscope system according to claim 2, wherein the control unit corrects the eucentric information according to the difference. A vertical operation means for moving the observation optical system, the image signal generation means, and the electric head operation means integrally along the optical axis;
The microscope system according to claim 1, wherein the control unit controls the vertical operation unit to match the focal point with the rotation center axis.   The microscope system according to any one of claims 1 to 10, further comprising stage operation means for holding the specimen stage so as to be movable in a direction orthogonal to the main surface of the specimen stage. An input unit that receives an input of an instruction to switch the operation of moving the observation optical system by the electric head operation unit between a valid state and an invalid state;
The microscope system according to claim 1, wherein the control unit performs control to switch between the valid state and the invalid state in accordance with the instruction.   The microscope system according to claim 1, wherein the image signal generation unit includes a CCD.   The microscope system according to any one of claims 1 to 13, further comprising second up-and-down operation means for moving the rotation means in a direction orthogonal to the main surface of the specimen stage.

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