JP2010054704A - Observing device, method for controlling the same, and program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To speedily recognize an observing position even when a specimen is observed from an oblique direction. <P>SOLUTION: The observing device includes an objective lens 105a or 105b. A lens barrel 106 is provided with an optical system for obtaining an optical image of a specimen 101 placed on the placing face of a stage 102. A control section controls the aperture diameter of an aperture diaphragm 112 provided in the optical system based on the angle of the inclination of the optical axis of the optical system relative to the placing face, to control the depth of the field of the optical system. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a technique of an observation apparatus that performs magnified observation of a sample, such as a microscope apparatus or a video microscope.

  A conventional observation device that performs magnified observation of a sample, such as a stereomicroscope or a video microscope, can be used from an oblique direction of a sample having a certain height, such as observation of the inner surface of a hole in a workpiece. It was unsuitable for observation.

A technique for observing such a sample from an oblique direction is disclosed in Patent Document 1, for example. This technique makes it possible to observe an arbitrary position of an object from an arbitrary direction by providing a structure in which the camera can be tilted about the focus position of the camera of the microscope.
JP 2001-59999 A

  However, in the technique disclosed in Patent Document 1, only the intersecting line portion of the focusing surface before and after tilting is in focus both before and after tilting the camera. For this reason, it is not easy to recognize which position on the object is being observed without re-adjusting the focus after tilting the camera, particularly when there is a difference in height between the observation sites.

  The present invention has been made in view of the above-described problems, and a problem to be solved is to make it possible to quickly recognize an observation position when observing a sample from an oblique direction.

  An observation apparatus according to one aspect of the present invention includes an objective lens, obtains an optical image of a sample placed on a stage placement surface, and light of the optical system with respect to the placement surface. Control means for controlling the depth of field of the optical system based on the tilt angle of the axis.

  In the observation apparatus described above, the control means is configured to control the depth of field by controlling the aperture diameter of the aperture stop provided in the optical system based on the tilt angle. can do.

At this time, the control means can be configured to further control the aperture diameter based on the type of the objective lens.
Further, at this time, the control means can be configured to further control the aperture diameter based on the magnification set in the zooming device provided in the optical system.

  Alternatively, at this time, after the control of the aperture diameter, the control means changes the relative distance between the sample and the objective lens so that an optical image focused on the sample is obtained by the optical system. The focus control can be further performed.

  In addition, a control apparatus according to another aspect of the present invention is an observation system including an optical system that includes an objective lens and obtains an optical image of a sample placed on a stage placement surface. A control device for controlling the apparatus, the acquisition means for acquiring the input of the tilt angle of the optical axis of the optical system with respect to the mounting surface, and the depth of field of the optical system based on the tilt angle Control means.

  In the control device described above, the control means is configured to control the depth of field by controlling the aperture diameter of an aperture stop provided in the optical system based on the tilt angle. can do.

  At this time, the control means, after controlling the aperture diameter, changes the relative distance between the sample and the objective lens so that an optical image focused on the sample can be obtained by the optical system. The focus control can be further performed.

  According to another aspect of the present invention, a program includes an optical system that includes an objective lens and obtains an optical image of a sample placed on a stage placement surface. A program for causing a computer to control an observation apparatus, comprising: an inclination angle acquisition process for acquiring an input of an inclination angle of the optical axis of the optical system with respect to the placement surface; and the inclination angle and the optical system An aperture diameter acquisition process for acquiring an aperture diameter associated with the tilt angle acquired by the tilt angle acquisition process with reference to a table associated with the aperture diameter of the aperture stop being performed, The computer controls the aperture stop so that the aperture diameter of the aperture stop is set to the aperture diameter acquired by the aperture diameter acquisition process.

  In the above-described program, an optical image acquisition process for acquiring an optical image of the sample obtained by the optical system after the aperture stop is controlled by the aperture diameter control process, and a relative distance between the sample and the objective lens. By changing the value, control is performed to maximize the contrast value of the optical image acquired by the optical image acquisition process so that an optical image focused on the sample can be obtained by the optical system. You may make it make this computer perform a focusing process further.

  According to the present invention, as described above, there is an effect that the observation position can be quickly recognized when the sample is observed from an oblique direction.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
First, FIG. 1A will be described. FIG. 1A shows the configuration of a microscope that is an observation apparatus for carrying out the present invention.

In FIG. 1A, the microscope 1 is provided with a stage 102 on which a sample 101 can be placed on a placement surface, and a revolver 103 facing the stage 102.
The revolver 103 includes a mounter 104, and two objective lenses 105a and 105b having different magnifications (for example, a low magnification objective lens 105a that is 1 × and a high magnification objective lens 105b that is 10 ×) can be installed. In addition, the revolver 103 includes a revolver motor (not shown) that rotates the mounter 104 and a revolver sensor group (not shown).

  The revolver sensor group includes a revolver connection sensor, a revolver sensor, and a movement completion sensor, all of which are not shown. Here, the revolver connection sensor detects that the revolver 103 is connected. The revolver sensor identifies which objective lens is disposed on the optical axis of the optical system of the microscope 1. Further, the movement completion sensor detects completion of insertion of the objective lens into the optical axis.

The revolver 103 may be omitted, and a single objective lens may be fixed to the lens barrel portion 106.
1A is supported by a rotation support unit 107 and passes through the rotation support unit 107 and is centered on an axis perpendicular to the optical axis of the optical system of the microscope 1. 106 can be rotated. That is, when the lens barrel portion 106 is rotated, the optical axis of the optical system of the microscope 1 is inclined with respect to the mounting surface of the stage 102.

  Although not shown, the lens barrel portion 106 has an angle scale, and by observing the angle scale, the observer can view the current rotation angle of the lens barrel portion 106, that is, a microscope with respect to the mounting surface of the stage 102. The tilt angle of the optical axis of one optical system can be known.

  Light for illuminating the sample 101 is emitted from the coaxial incident light source 108 and then guided to the half mirror 110 through the illumination optical system 109. After this light is reflected by the half mirror 110, the sample 101 is irradiated through the objective lens 105 a or 105 b inserted on the optical axis of the optical system of the microscope 1.

  The light reflected by the sample 101 passes through the objective lens 105a or 105b, the half mirror 110, the zoom lens group 111, and the aperture stop 112, and then forms an image of the sample 101 on the light receiving surface of the camera 114 by the imaging lens 113. Let An observer observes the image about the image of the sample 101 obtained by the camera 114 as described later.

  The zoom lens group 111 includes a mechanism (not shown) that realizes observation from a low magnification to a high magnification, a plurality of zoom lenses (not shown), and a zoom lens motor (not shown) that drives each zoom lens. It is configured. The aperture stop 112 includes an adjustment mechanism (not shown) that changes the aperture diameter and an aperture stop drive motor 115 that drives the adjustment mechanism.

Next, FIG. 1B will be described. FIG. 1B shows a configuration of a sample observation system including the microscope 1 shown in FIG. 1A.
A revolver 103, a zoom lens group 111, and a control unit 2 that controls the aperture stop 112, which are electric units provided in the microscope 1, are connected to the microscope 1 via a microscope cable 116. The control unit 2 is also connected to the PC 3 via the control unit cable 117, and receives various instructions issued from the PC 3. The operation unit 4 is connected to the PC 3 via the operation unit cable 118. The PC 3 executes predetermined control processing in accordance with various inputs associated with the operation of the operation unit 4 by the observer, and is connected via the transmission of various instructions to the control unit 2 and the camera cable 119. The camera 114 and the display unit 5 connected via the display unit cable 120 are controlled.

Note that the control unit 2 may be configured in the main body of the microscope 1 or incorporated in the PC 3.
Next, FIG. 2 will be described. FIG. 2 shows a first example of the configuration of the electrical system in the sample observation system shown in FIG. 1B.

  The control unit 2 includes a CPU (Central Processing Unit) 201, a ROM 202 that stores control programs and fixed data, a RAM 203 that stores various types of data such as calculation data, and various electric units and the control unit 2. The connected I / F (interface) units 204a to 204e, the CPU 201, the ROM 202, the RAM 203, and the bus line 205 that connects the various I / F units 204a to 204e to each other.

  The control unit 2 includes, as various I / F units 204a to 204e, an aperture drive I / F unit 204a, a zoom lens I / F unit 204b, a revolver I / F unit 204c, a light source I / F unit 204d, and a PCI / F unit. 204e is provided.

  The aperture drive I / F unit 204a, the zoom lens I / F unit 204b, and the revolver I / F unit 204c, respectively, are an aperture stop drive motor 115, a zoom lens motor 206, and a revolver motor 207 in accordance with a drive instruction from the CPU 201. Are driven by a designated direction and drive amount, and a current position counter (not shown) for specifying the current drive position of these motors. The revolver I / F unit 204c further includes a sensor register (not shown) that holds a detection state of a revolver sensor group (not shown).

  The CPU 201 receives, via the PCI / F unit 204e, control commands to be described later that are issued from the PC 3, and sends drive instructions corresponding to the control commands to the aperture drive I / F unit 204a and the zoom lens I. / F unit 204b and revolver I / F unit 204c. At this time, after giving the drive instruction, the CPU 201 displays the detection results of the sensors provided in the respective electric units as the diaphragm drive I / F unit 204a, the zoom lens I / F unit 204b, and the revolver I / F. Obtained via the F unit 204c. Here, when a change in state according to the drive instruction is recognized in the detection result, information indicating normal termination is returned to the PC 3, and a change in state according to the drive instruction is not recognized in the detection result. In this case, it is assumed that there is an abnormality in the motor or the like, and error information is returned to the PC 3.

The light source I / F unit 204d controls a mechanism (not shown) that changes the amount and direction of light emitted from the coaxial incident light source 108 in accordance with a drive instruction from the CPU 201.
Like the control unit 2, the PC 3 includes a CPU (central processing unit) 301, a ROM 302 that stores control programs and fixed data, a RAM 303 that stores various types of data such as calculation data, and the control unit 2, The operation unit 4, the display unit 5, and the various I / F units 304a to 304d that connect the camera 114 and the PC 3, the CPU 301, the ROM 302, the RAM 303, and the various I / F units 304 are mutually connected. The line 305 is constituted. Here, the PC 3 includes an operation I / F unit 304a, a control I / F unit 304b, a display unit I / F 304c, and a camera I / F unit 304d as various I / F units 304a to 304d.

  The CPU 301 receives an instruction input by the observer from the operation unit 4 via the operation I / F unit 304 a and controls the control signals and information of various electric units with the control unit 2. It transmits and receives via 304b. Further, the information received from the control unit 2 is transferred to the display unit 5 via the display unit I / F 304c and displayed as current information and error information indicating the current state of various electric units. In addition, the CPU 301 instructs the camera 114 to start / stop camera image transfer, transmit camera settings such as a frame rate, and receive camera image information to the camera 114 via the camera I / F unit 304d. The captured image is transferred to the display unit 5 and displayed.

  Note that various processes performed by the control unit 2 and the PC 3 are stored in advance in the ROMs 202 and 302 in order to cause the control unit 2 and the PC 3 to perform the processes. This is realized by reading and executing.

  The camera 114 captures an image of the sample 101 at a frame rate preset by the PC 3. The camera 114 is controlled to transfer a captured image in accordance with a camera image transfer start / stop instruction from the PC 3.

Next, FIG. 3 will be described. FIG. 3 shows an example of a GUI (Graphical User Interface) screen displayed on the display unit 5 by the PC 3.
The GUI screen shown in FIG. 3 includes a camera image display unit 3000, an angle input unit 3001, and a magnification adjustment scroll unit 3002. Here, the camera image display unit 3000 is a display area of an image captured by the camera 114. Further, the angle input unit 3001 is configured to specify the rotation angle of the lens barrel unit 106 using radio buttons as shown in the figure. Further, the magnification adjustment scroll unit 3002 is configured to specify the observation magnification of the microscope 1 using a scroll bar as illustrated in the range from 1 to 100 times.

Next, FIG. 4 will be described. FIG. 4 shows an example of data stored in the RAM 303 in the PC 3.
In the RAM 303, the value indicating the aperture diameter of the aperture stop 112 is stored at the AS_pos address as a value when the fully open is 100. In the zoom_pos address, the magnification value of the zoom lens group 111 is stored in the range of 1 to 10 times. Further, a value indicating the type of the objective lens 105a or 105b disposed on the optical axis of the optical system of the microscope 1 is stored in the revo_pos address. For example, if this value is “0”, it indicates that the low-magnification objective lens 105a is disposed, and if this value is “1”, it indicates that the high-magnification objective lens 105b is disposed. Note that these values are current positions (not shown) that specify the current driving positions of the driving motors from the aperture driving I / F unit 204a, the zoom lens I / F unit 204b, and the revolver I / F unit 204c. The CPU 301 stores the counter values acquired by the control unit 2 and sent to the CPU 301.

  Note that the angle_pos address is a rotation angle designated using the angle input unit 3001 on the GUI screen illustrated in FIG. 3 (that is, the tilt angle of the optical axis of the optical system of the microscope 1 with respect to the mounting surface of the stage 102). Is stored.

Next, FIG. 5 will be described. FIG. 5 shows an example of an aperture diameter table, which is a data table stored in advance in the ROM 302 in the PC 3.
In the table of FIG. 5, current_pos is the observation magnification of the microscope 1, and this value is the product of the value of the aforementioned zoom_pos address and the value of the revo_pos address in the RAM 303. Further, angle_pos is the aforementioned inclination angle specified using the angle input unit 3001 of the GUI screen illustrated in FIG. 3, and is the value of the address_pos in the RAM 303. That is, the table in FIG. 5 is used to obtain an appropriate aperture diameter value of the aperture stop 112 based on the values of the zoom_pos address, the revo_pos address, and the angle_pos address in the RAM 303. Further, the value of the opening diameter shown in this table is a value of the ratio when the fully open is “100”.

This appropriate opening diameter will be described with reference to FIG.
For example, when a so-called 1/3 type CCD (charge coupled device) is used as the imaging device of the camera 114, the field of view of the microscope 1 (CCD image size) is approximately 4.8 mm × 3.6 mm. The field of view F0 in FIG. 6 represents a state in which the rotation angle of the lens barrel 106 is 0, that is, the optical axis of the optical system of the microscope 1 is perpendicular to the mounting surface of the stage 102. Is assumed to be in focus over the entire field of view. In the present embodiment, the tilt angle of the optical axis in this state, that is, in a state where the optical axis of the optical system of the microscope 1 is perpendicular to the mounting surface of the stage 102 is displayed as “0 °”. .

  Here, as shown in FIG. 6, the field of view is rotated by θ around the axis passing through the midpoint of the field of view in the longitudinal direction and orthogonal to the longitudinal direction (that is, the lens barrel 106 is rotated to rotate the field of the microscope 1. The inclination angle of the optical axis of the optical system is θ). Then, the regions at both ends in the longitudinal direction of the field of view are out of focus because they are out of the current depth of field range of the microscope 1, and the focused state is maintained because of the above-described axis. Only the neighboring area (the hatched area in FIG. 6) is obtained. Here, in order to maintain a state where the entire field of view is in focus even if the field of view is rotated in this way, the depth of field may be increased so as to become H in the figure. Therefore, in the sample observation system of FIG. 1B, when the lens barrel 106 is rotated, the entire field of view of the microscope 1 is focused by changing the aperture diameter of the aperture stop 112 and changing the depth of field. Like that. By doing so, the observation position can be quickly recognized when the sample 101 is observed from an oblique direction.

  The depth of field varies depending on the type of the objective lens 105a or 105b used for observation and the magnification of the zoom lens group 111. Therefore, in this sample observation system, the aperture stop based on the magnification value of the zoom lens group 111, the type of the objective lens 105a or 105b, and the tilt angle of the lens barrel 106 is referred to by referring to the table shown in FIG. An appropriate opening diameter of 112 is obtained.

In the present embodiment, this table stores information obtained by conducting actual measurements of appropriate aperture diameter values in advance.
Next, FIG. 7 will be described. FIG. 7 is a flowchart showing the contents of the control process performed by the PC 3 under the configuration of the electrical system shown in FIG.

  First, in step 701, the power source of the sample observation system shown in FIG. 1B is turned on, and supply of power to each unit is started. Then, in the PC 3, the CPU 301 reads out and executes a predetermined control program stored in advance in the ROM 302, thereby starting the processing subsequent to FIG. 7 and displaying the GUI screen illustrated in FIG. 3 on the display unit 5. .

  Next, in step 702, the PC 3 causes the current aperture diameter of the aperture stop 112, the current magnification of the zoom lens group 111, and the objective lens 105 a or 105 b currently disposed on the optical axis of the optical system of the microscope 1. Process to get the type of. That is, the CPU 301 of the PC 3 first gives an instruction to acquire the current aperture diameter of the aperture stop 112 to the control unit 2, and acquires a value indicating the aperture diameter obtained from the aperture drive I / F unit 204 a from the control unit 2. , A process of storing in the AS_pos address of the RAM 303 is performed. Further, the CPU 301 gives an instruction to acquire the current magnification of the zoom lens group 111 to the control unit 2, acquires a value indicating the magnification obtained from the zoom lens I / F unit 204 b from the control unit 2, and addresses zoom_pos in the RAM 303. Process to store in. Further, the CPU 301 gives an instruction to acquire the type of the objective lens 105a or 105b currently arranged on the optical axis of the optical system of the microscope 1 to the control unit 2, and indicates the type obtained from the revolver I / F unit 204c. A value is acquired from the control unit 2 and stored in the revo_pos address of the RAM 303.

  Next, in step 703, the CPU 301 of the PC 3 performs processing for transmitting a camera image transfer start instruction to the camera 114 and instructing the start of capturing an image of the sample 101. At this time, the camera 114 transfers an image obtained by starting imaging to the PC 3. When the PC 3 receives an image from the camera 114, the PC 3 performs a process of fitting and displaying the image on the camera image display unit 3000 on the GUI screen being displayed on the display unit 5.

  Thereafter, in order to observe the sample 101 from an oblique direction, the observer tilts the lens barrel unit 106 and uses the angle input unit 3001 on the GUI screen displayed on the display unit 5 to determine the tilt angle at that time. Specify to PC3. In step 704, the CPU 301 of the PC 3 obtains this designation result and stores it in the angle_pos address of the RAM 303.

  Next, in step 705, the PC 3 performs a process for acquiring an appropriate aperture diameter value of the aperture stop 112. That is, the CPU 301 of the PC 3 first performs a process of calculating the product of the value of the zoom_pos address and the value of the revo_pos address in the RAM 303 to obtain the current observation magnification current_pos of the microscope 1. Subsequently, the CPU 301 refers to the aperture diameter table illustrated in FIG. 5 and stored in advance in the ROM 302, and determines the aperture diameter table from the current observation magnification current_pos of the microscope 1 and the value of the angle_pos address in the RAM 303. The process of acquiring the values of the aperture diameters corresponding to these values is performed. According to this processing, for example, when the zoom lens group 111 is the low magnification objective lens 105a in which the current magnification of the zoom lens group 111 is 3 and the type of the objective lens 105a or 105b is 1 time, the tilt angle is designated. If the angle is 60 °, “60” is obtained from the table of FIG. 5 as the ratio of the appropriate aperture diameter of the aperture stop 112.

  Next, in step 706, the CPU 301 of the PC 3 performs a process of giving an instruction to the control unit 2 to set the aperture diameter of the aperture stop 112 to the value acquired in the previous step. Upon receiving this instruction, the control unit 2 gives a drive instruction corresponding to this instruction to the aperture drive I / F unit 204a, and drives the motor so that the aperture diameter of the aperture stop 112 becomes the ratio acquired in the previous step. Let

When the processing in step 706 is completed, the CPU 301 of the PC 3 returns the processing to step 704, and thereafter repeats the above-described processing.
When the PC 3 performs the above control processing, the aperture diameter of the aperture stop 112 can be changed according to the rotation of the lens barrel portion 106, and the depth of field of the microscope 1 is changed. As a result, even if the lens barrel portion 106 is rotated, the entire field of view of the microscope 1 is in focus, so that the observation position can be quickly recognized even when the sample 101 is observed from an oblique direction, and the operability is high. Provision is possible.

Next, FIG. 8 will be described. FIG. 8 shows a second example of the configuration of the electrical system in the sample observation system shown in FIG. 1B.
The configuration of FIG. 8 is the same as the first example of the configuration shown in FIG. 2 except that a focusing unit drive motor 401 and an aiming unit I / F 402 are added. Therefore, the description about the same component is abbreviate | omitted here.

  In the configuration of FIG. 8, the lens barrel unit 106 of the microscope 1 further includes a focusing unit drive motor 401 that moves the lens barrel unit 106 up and down in the optical axis direction of the optical system of the microscope 1 and an autofocus mechanism (not shown). It has been.

  The control unit 2 includes a focusing unit I / F 402 for driving the focusing unit drive motor 401. A focusing unit I / F 402 is a driver (not shown) that drives the focusing unit drive motor 401 in a specified direction and driving amount in accordance with a drive instruction from the CPU 201, and a current drive position of the focusing unit drive motor 401. And a current position counter (not shown).

Next, FIG. 9 will be described. FIG. 9 is a flowchart showing the contents of the control process performed by the PC 3 under the configuration of the electrical system shown in FIG.
The processing from step 801 to step 806 in FIG. 9 is the same as the processing from step 701 to step 706 in the control processing shown in FIG.

  Following the end of the process in step 806, the CPU 301 of the PC 3 performs the process in step 807. That is, in step 807, the CPU 301 performs a process of giving an instruction to the control unit 2 to increase the light quantity of the coaxial incident light source 108. When the CPU 201 of the control unit 2 receives this instruction, it gives a drive instruction corresponding to this instruction to the aperture light source I / F unit 204d to perform control to increase the amount of light emitted from the coaxial incident light source 108. This process is for compensating for a decrease in the amount of light due to the aperture stop 112 being reduced by the process of step 806.

  In the subsequent processing from step 808 to step 810, the lens barrel portion 106 is moved up and down so that the contrast of the image captured by the camera 114 is maximized, thereby focusing the optical system of the microscope 1 on the sample 101. This is a process for realizing a so-called contrast AF (autofocus) function.

  That is, first, in step 808, the CPU 301 of the PC 3 performs a process of giving an instruction to the control unit 2 to move the lens barrel unit 106 up and down by a predetermined amount in the optical axis direction of the optical system of the microscope 1. Upon receiving this instruction, the CPU 201 of the control unit 2 gives a driving instruction corresponding to this instruction to the focusing unit I / F 402 to drive the focusing unit drive motor 401 to move the lens barrel unit 106 up and down. Control is performed to change the relative distance between the objective lens 105 a or 105 b on the optical axis and the sample 101 placed on the placement surface of the stage 102.

  Next, in step 809, the CPU 301 of the PC 3 performs processing for capturing a captured image of the sample 101 transferred from the camera 114. In subsequent step 810, processing is performed to determine whether or not the captured image is in focus on the sample 101. This determination is made based on whether the captured image has the maximum contrast value. Here, when the CPU 301 determines that the captured image is in focus on the sample 101 (when the determination result is Yes), the CPU 301 ends the process for autofocus and proceeds to step 804. The processing is returned, and thereafter, the above-described processing is repeated. On the other hand, when the CPU 301 determines that the captured image is not in focus on the sample 101 (when the determination result is No), the CPU 301 returns the process to step 808 to further place the lens barrel unit 106. After performing the process for moving the fixed amount up and down, the processes of steps 809 and 810 are performed again.

  By performing the above control processing by the PC 3, the aperture diameter of the aperture stop 112 can be changed according to the rotation of the lens barrel portion 106, and further, autofocus is automatically performed after the lens barrel portion 106 is rotated. Since this is executed and focused on the sample 101, higher operability can be provided.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various improvements and modifications can be made without departing from the scope of the present invention.
For example, the switching between the objective lens 105 a and the objective lens 105 b is eliminated, the magnification of the zoom lens group 111 is fixed, and the aperture diameter of the aperture stop 112 is controlled based only on the tilt angle of the optical axis of the optical system of the microscope 1. Can be done. Further, only the switching between the objective lens 105a and the objective lens 105b is eliminated, and the aperture diameter of the aperture stop 112 is controlled based on the tilt angle of the optical axis of the optical system of the microscope 1 and the magnification of the zoom lens group 111. You can also Furthermore, only the magnification of the zoom lens group 111 is fixed, and the aperture diameter of the aperture stop 112 is controlled based on the tilt angle of the optical axis of the optical system of the microscope 1 and the type of the objective lens 105a or 105b. You can also

  Further, in the control process shown in FIG. 7, after the control of the aperture diameter of the aperture stop 112, in order to compensate for the light amount reduction due to the aperture stop 112 being stopped by the control, the same as the control process shown in FIG. 9. The light quantity of the coaxial incident light source 108 may be increased.

  Further, in the microscope 1 shown in FIG. 1A, the observer manually rotates the lens barrel portion 106. Instead, a rotation motor is provided in the rotation support portion 107, and the lens barrel portion is provided. The rotation of 106 may be electric. Further, by providing the microscope 1 with a sensor that detects the tilt angle of the optical axis of the optical system of the microscope 1 by the rotation of the lens barrel 106, instead of manually inputting the tilt angle to the PC 3, The PC 3 may directly receive the detection result and automatically control the aperture diameter of the aperture stop 112.

  Further, for example, a tilt stage 1000 as shown in FIG. 10 can be used to rotate the sample 101 side, while the lens barrel portion 106 is fixed and the tilt stage 1000 is rotated, so that the sample 101 side can be rotated. The tilt angle of the optical axis of the optical system of the microscope 1 may be changed. In this case, needless to say, the tilt angle of the tilt stage 1000 is input to the angle input unit 3001 on the GUI screen shown in FIG.

  In addition, after the aperture diameter of the aperture stop 112 is controlled, the shutter speed of the camera 114 is decreased instead of increasing the light amount of the coaxial incident light source 108 in order to compensate for the light amount decrease due to the aperture stop 112 being throttled by the control. May be.

  Further, in the control process of FIG. 9, in order to avoid a change in the resolution of the acquired image before and after the rotation of the lens barrel unit 106, the light quantity of the coaxial incident light source 108 and the opening of the aperture stop 112 are opened after the autofocus control process is completed. The aperture may be returned to the state before the start of the autofocus control process.

  Further, instead of obtaining an appropriate aperture diameter value of the aperture stop 112 with reference to the aperture diameter table shown in FIG. 5, an appropriate aperture diameter value is obtained by calculating the inclination angle of the optical axis of the optical system of the microscope 1 and the microscope. A calculation formula calculated from the observation magnification of 1 may be obtained in advance, and an appropriate aperture diameter value may be obtained by substituting a numerical value into this calculation formula.

It is a figure which shows the structure of the microscope which implements this invention. 1B shows a configuration of a sample observation system including the microscope shown in FIG. 1A. FIG. It is a figure which shows the 1st example of a structure of the electric system in the sample observation system shown to FIG. 1B. An example of a GUI screen is shown. It is the figure which showed the example of the storage data in RAM in PC. It is a figure which shows the example of an opening diameter table | surface. It is a figure explaining an appropriate opening diameter. It is the figure which showed the processing content of the control processing performed by PC under the structure of the electric system shown in FIG. 2 with the flowchart. It is a figure which shows the 2nd example of a structure of the electric system in the sample observation system shown to FIG. 1B. It is the figure which showed the processing content of the control processing performed by PC under the structure of the electric system shown in FIG. 8 with the flowchart. It is a figure which shows the example of a tilt stage.

Explanation of symbols

1 Microscope 2 Control unit 3 PC
DESCRIPTION OF SYMBOLS 4 Operation part 5 Display part 101 Sample 102 Stage 103 Revolver 104 Mounter 105a, 105b Objective lens 106 Lens barrel part 107 Rotation support part 108 Coaxial incident light source 109 Illumination optical system 110 Half mirror 111 Zoom lens group 112 Aperture stop 113 Imaging lens 114 Camera 115 Aperture driving motor 116 Microscope cable 117 Control unit cable 118 Operation unit cable 119 Camera cable 120 Display unit cable 201, 301 CPU
202, 302 ROM
203, 303 RAM
204a Aperture drive I / F unit 204b Zoom lens I / F unit 204c Revolver I / F unit 204d Light source I / F unit 204e PCI / F unit 205, 305 Bus line 304a Operation unit I / F unit 304b Control unit I / F unit 304c Display unit I / F unit 304d Camera I / F unit 401 Focusing unit drive motor 402 Focusing unit drive I / F
1000 Tilt stage 3000 Camera image display unit 3001 Angle input unit 3002 Magnification adjustment scroll unit

Claims (10)

An optical system that includes an objective lens and obtains an optical image of the sample placed on the stage placement surface;
Control means for controlling the depth of field of the optical system based on the tilt angle of the optical axis of the optical system with respect to the placement surface;
An observation apparatus comprising:   2. The depth of field according to claim 1, wherein the control unit controls the depth of field by controlling an aperture diameter of an aperture stop provided in the optical system based on the tilt angle. Observation device.   The observation apparatus according to claim 2, wherein the control unit further controls the aperture diameter based on a type of the objective lens.   The observation apparatus according to claim 2, wherein the control unit further controls the aperture diameter based on a magnification set in a zoom device provided in the optical system.   The control means further performs focus control to change a relative distance between the sample and the objective lens so that an optical image focused on the sample is obtained by the optical system after the aperture diameter is controlled. The observation apparatus according to any one of claims 2 to 4, wherein the observation apparatus is provided. A control device that controls an observation device having an optical system that includes an objective lens and has an optical system for obtaining an optical image of a sample placed on a placement surface of a stage,
Obtaining means for obtaining an input of an inclination angle of the optical axis of the optical system with respect to the mounting surface;
Control means for controlling the depth of field of the optical system based on the tilt angle;
A control device comprising:   The said control means controls the said depth of field by controlling the aperture diameter of the aperture stop with which the said optical system is equipped based on the said inclination angle. Control device.   The control means further performs focus control to change a relative distance between the sample and the objective lens so that an optical image focused on the sample is obtained by the optical system after the aperture diameter is controlled. The control device according to claim 7. A program for causing a computer to control an observation apparatus having an optical system that includes an objective lens and obtains an optical image of a sample placed on a placement surface of a stage,
An inclination angle acquisition process for acquiring an input of an inclination angle of the optical axis of the optical system with respect to the placement surface;
With reference to a table in which the tilt angle and the aperture diameter of the aperture stop provided in the optical system are associated, the aperture diameter associated with the tilt angle acquired by the tilt angle acquisition process is Opening diameter acquisition processing acquired from the table;
An aperture diameter control process for controlling the aperture stop so that the aperture diameter of the aperture stop is the aperture diameter acquired by the aperture diameter acquisition process;
A program for causing the computer to execute. The program according to claim 9, wherein
An optical image acquisition process for acquiring an optical image of the sample obtained by the optical system after the control of the aperture stop by the aperture diameter control process;
An optical image focused on the sample by controlling the maximum contrast value of the optical image acquired by the optical image acquisition process by changing the relative distance between the sample and the objective lens. Focusing processing so that can be obtained by the optical system,
Is further executed by the computer.