JP2009074934A - Sample analyzer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample analyzer capable of analyzing light at different wavelength bands using one analyzer. <P>SOLUTION: The sample analyzer comprises: a first movable stage capable of moving a sample in width and depth directions while the sample is placed on the movable stage; a light source for applying X rays, ultraviolet rays, visible light, or infrared rays to the sample; a detector for detecting transmission light or fluorescence generated by the irradiation of light; a second movable stage capable of moving the detector in width and height directions while the detector is mounted to the movable stage; and a casing including the first movable stage, the light source, the detector, and the second movable stage inside. The light source is one of an X-ray light source, an ultraviolet ray light source, a visible light source, and an infrared ray light source, one of the light sources is mounted in the casing so that it can be exchanged with other light sources, and the detector is mounted so that it can be relocated to either a mount position for detecting transmission light or that for detecting fluorescence set to the second movable stage according to the light sources. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sample analyzer that irradiates a sample with X-rays, ultraviolet rays, visible rays, or infrared rays from a light source, and detects and analyzes the transmitted light or fluorescence, and in particular, light that irradiates the sample with a light source and a detector. The present invention relates to a sample analyzer that can be exchanged according to the wavelength.

  There is known an apparatus for analyzing characteristics of a sample by irradiating the sample with light of various wavelengths and analyzing fluorescence and transmitted light generated therefrom.

  For example, an analyzer that uses X-rays as a light source irradiates a sample with X-rays, detects fluorescent X-rays generated from the sample in response to the detection, and includes the X-ray in the sample from the wavelength spectrum of the fluorescent X-rays Can be discriminated. Since the wavelength of the fluorescent X-ray is unique to the element, the element contained in the sample can be determined by analyzing the wavelength of the fluorescent X-ray (Patent Documents 1-6).

  Further, by detecting the X-ray transmitted light, a fluoroscopic image inside the sample is taken, and the internal state can be visualized by nondestructive.

  Furthermore, an analyzer that uses ultraviolet light as a light source can be used to detect the components of the sample by irradiating the sample with ultraviolet light from the light source and analyzing the fluorescence spectrum. It is also possible to obtain information on gene damage.

  In addition, an analyzer that uses infrared light as a light source, for example, irradiates a sample with a biological object such as a blood vessel inside with infrared light, and detects the transmitted light, thereby imaging a blood vessel inside the sample. Can be used for applications.

As described above, the detectable object differs depending on the wavelength of the light source, and it is necessary to change the type and wavelength of the light source according to the type of sample to be analyzed and the purpose of analysis. In addition, it is necessary to prepare a detector that detects fluorescence and transmitted light corresponding to the wavelength of the light source. Further, it is necessary to individually set the arrangement position of the detector according to the sensitivity and characteristics of the detector.
Japanese Patent Laid-Open No. 2002-39972 JP-A-10-26593 JP-A-4-175647 Japanese Patent Laid-Open No. 2-10639 JP-A-2-238349 JP-A-5-126770

  Therefore, conventionally, a separate sample analyzer is manufactured for each type of light source (for each wavelength band such as X-rays, ultraviolet rays, visible light, infrared rays, etc.), and a dedicated device is prepared for each type of light source (wavelength band). There is a need.

  In addition, it is necessary to prepare a detector that detects the fluorescence and transmitted light according to the wavelength of the light source, and the characteristics and sensitivity vary depending on the type of detector, so it is optimal for the light source installed. It is fixed in advance at various positions and mounted on each sample analyzer.

  Therefore, the present invention is to provide a sample analyzer that can analyze light of different wavelength bands with a single device. Note that in this specification, the term “light” is not limited to visible light, but includes electromagnetic waves in a wavelength band other than visible light, such as infrared rays, ultraviolet rays, and X-rays.

  In order to achieve the above object, a first configuration of the sample analyzer of the present invention includes: a first movable stage on which a sample is placed and capable of moving the sample in the width direction and the depth direction; A light source that emits one of ultraviolet light, visible light, and infrared light, a first detector that detects transmitted light or fluorescence generated by light irradiation, and the first detector are attached, and the first detector Including a second movable stage that can move in a width direction and a height direction, the first movable stage, the light source, the first detector, and the second movable stage. The light source is one of an X-ray light source, an ultraviolet light source, a visible light source, and an infrared light source, and any one of the light sources is attached to the inside of the casing so as to be exchangeable with another light source. The first detector is mounted inside the housing Depending on the light source, it is attached to the second movable stage in a replaceable manner, and is further set to either the transmitted light detection mounting position or the fluorescence detection mounting position set on the second movable stage. It is attached so that it can be replaced.

  According to a second configuration of the sample analyzer of the present invention, in the first configuration, the light source is attached to a bottom portion inside the housing, the first movable stage is provided on the light source, The light source is provided with the second movable stage in which the sample is irradiated with light from below the first movable stage, and the first detector is attached to the top of the first movable stage. To do.

  According to a third configuration of the sample analyzer of the present invention, in the first or second configuration, the casing opens and closes a first door for opening and closing a front surface of the casing and a side surface of the casing. It has the 2nd door for doing, It is characterized by the above-mentioned.

  According to a fourth configuration of the sample analyzer of the present invention, in any one of the first to third configurations, an attachment site for detecting the fluorescence adjusts an angle of the first detector with respect to the sample. It is possible.

  According to a fifth configuration of the sample analyzer of the present invention, in any one of the first to fourth configurations, a second detector that is attached to the second stage and detects the surface height of the sample is provided. It is characterized by providing.

  In the sample analyzer of the present invention, light sources having different wavelength bands are interchangeably attached, and a detector corresponding to the attached light source can be positioned and attached at an optimal position, so that one sample analysis can be performed. Depending on the device, it can be used as a general-purpose analyzer using light of different wavelength bands.

  That is, it is not necessary to prepare a separate sample analyzer for each wavelength band, and it is possible to perform measurements in different wavelength bands by simply replacing the light source and detector of the sample analyzer of the present invention.

  Embodiments of the present invention will be described below with reference to the drawings. However, such an embodiment does not limit the technical scope of the present invention.

  FIG. 1 is an external perspective view of a sample analyzer according to an embodiment of the present invention. A housing 1 of the sample analyzer has a substantially rectangular parallelepiped shape with a width of about 50 cm, a depth of about 50 cm, and a height of about 70 cm, and a front door 2 having a window on the front thereof is provided. Opening the front door 2 forms an opening that is wide enough to allow the sample to be placed on the sample stage inside the housing and the light source and detector inside the housing to be replaced. An auxiliary door 3 is also provided on the side surface of the housing 1. By opening the auxiliary door 3, the operator's hand becomes an opening that is wide enough to be inserted into the housing. The worker puts one hand into the housing from the front door 2 and puts the other hand in the housing. By inserting the auxiliary door 3 into the housing, it is possible to insert a hand into the housing from different directions. Therefore, compared with the case where both hands are inserted into the housing from the front door 2, the light source inside the housing It is possible to easily perform attachment and removal work for replacement of the detector. The auxiliary door 3 may be provided with a window. Further, the auxiliary door 3 may be provided on either the left or right side surface, and may be provided on both the left and right side surfaces. The opening direction of the front door 2 and the auxiliary door 3 may be either a top-bottom opening or a left-right opening. In order to use an X-ray light source, the casing is shielded with lead or iron, and the window is made of lead-containing glass.

  FIG. 2 is a diagram showing a first internal configuration example of the sample analyzer according to the embodiment of the present invention. In FIG. 2, the sample is placed on the sample stage 10. The sample stage 10 is a so-called XY stage movable in the width direction (X direction) and the depth direction (Y direction), and the sample is moved with respect to the light source 12 within the movable range of the sample stage 10 as the sample stage 10 moves. Can be moved. The movable distance is, for example, about 25 mm in the width direction and the depth direction, and the positioning accuracy is, for example, 10 μm or more.

  By moving a light irradiation position on the sample in the width direction (X direction) and the depth direction (Y direction) by a control signal from a computer device (not shown) electrically connected to the sample analyzer of the present invention. The fluorescence spectrum for each fine region of the sample can be detected. For example, when used as a fluorescent X-ray analyzer, the distribution state of the sample of the element on the XY plane can be known by mapping the detection result of the fluorescent X-ray with respect to the element to be analyzed.

  The movement of the sample stage 10 is controlled by an operation signal from a computer device via a predetermined interface. The computer apparatus functions not only as the sample stage 10 but also as various operation means and control means such as movement of the detector stage 16 described below, ON / OFF of the irradiation of the light source 12, and ON / OFF of the detector 14. . Further, the computer device receives a detection signal from the detector 14 (or a signal converted through a predetermined interface device (for example, a spectrum analysis device built in the housing 1)), and a predetermined analysis processing algorithm The analysis process and the image process are executed, and the analysis result is displayed on the monitor screen. The mapping process can also display the distribution state of a specific element as a mapping image by associating coordinates with respect to the sample surface and detection results with respect to the coordinate positions. A general-purpose personal computer can be used as the computer device.

  A light source 12 is disposed below the sample stage 10, and the light source 12 emits light in a direction directly above. That is, the sample is irradiated with light from the lower side of the sample placed on the sample stage 10. The sample stage 10 has a hollow portion 10A having an opening corresponding to the optical path from the light source 12, and when the sample is placed on the sample stage 10, a sample table such as a plate or a plate that closes the hollow portion 10A. The sample is placed on the sample stage 10 via 11. The sample stage 11 needs to be formed of a material having a characteristic of transmitting the wavelength of the light source, and is appropriately selected according to the type of the light source.

  The light source 12 includes an X-ray light source that generates X-rays, an ultraviolet light source that generates ultraviolet rays (including an ultraviolet laser), a visible light source that generates visible light (including a light-emitting diode and a visible light laser), and an infrared ray that generates infrared rays. Any one of a plurality of light sources that generate light of different wavelength bands, such as a light source (including an infrared laser and a YAG laser), can be selected, and the selected light source is located below the sample stage 10 and includes a housing. It is fixed to the bottom of the body 1 with a screw or the like.

  For example, a light source mounting plate (not shown) fixed to the housing 1 is provided at the bottom of the housing 1, and the light source mounting plate has a plurality of screw holes for accommodating various sizes and shapes. Is provided. The light source 12 is placed on the light source mounting plate, and the light source 12 is fixed to the light source mounting plate by screws with a metal band such as a steel belt according to the size and shape of the light source. The fixing means is not limited to the metal band, and various other fixing methods can be applied.

  A detector 14 for detecting fluorescence or transmitted light corresponding to light irradiation on the sample is provided on the upper part of the sample stage 10. The detector 14 is attached to the detector stage 16. The detector stage 12 is a so-called XZ stage movable in the width direction (X direction) and the height direction (Z direction), and the position of the detector 14 can be moved by moving the detector stage 16. . The movable distance is, for example, about 200 mm in the width direction and about 100 mm in the height direction.

  The detector stage 16 is provided with, for example, a detector mounting plate 17 fixed to the detector stage 16, and the detector mounting plate 17 includes a plurality of detectors corresponding to various sizes and shapes of the detector 14. A screw hole is provided. The detector 14 is fixed to the detector mounting plate 17 by screwing with a metal band such as a steel belt. The fixing means is not limited to the metal band, and various other fixing methods can be applied. That is, the detector 14 is attached to the detector stage 16 via the detector attachment plate 17. A detector 14 corresponding to the wavelength of the light source 12 is appropriately selected and attached. As the detector 14 for detecting X-rays, for example, an electronically cooled high-sensitivity silicon detector is used.

  The illustrated detector mounting plate 17 has both a fluorescence detection mounting position and a transmitted light detection mounting position as an example. By attaching the detectors 14 to both, fluorescence detection and transmitted light detection can be performed simultaneously. Of course, when one detector 14 is attached, it is attached to either one in a replaceable manner.

As shown in the figure, the detector 14 attached to the attachment position for fluorescence detection is attached obliquely so as to face the sample at a position shifted in the width direction from directly above the sample serving as the optical path of the transmitted light. The detector mounting plate 17 is provided with an angle adjusting mechanism 17A for detecting fluorescence, and the detector 14 is positioned and fixed at an optimum angle. In accordance with the size of the sample, the size of the detector 14, the sensitivity of the detector 14, etc., the detector stage 16 is moved in the width direction and the height direction so that the distance between the detector 14 and the sample is optimal. Move to determine the position of the detector 14.
As shown in the drawing, the detector 14 attached to the attachment position for detecting the transmitted light is attached so as to face directly to the sample at a position directly above the sample serving as an optical path of the transmitted light. The detector stage is moved in the width direction so that the detector 14 is directly above the sample, and the height direction is adjusted so that the distance from the sample is optimal.

  Furthermore, a camera 18 may be attached to the detector mounting plate 17 together with the detector 14. The camera 18 is a CCD camera, for example, and an image taken through the lens 21 is displayed on a predetermined monitor screen of the computer device (described above). A computer device for controlling the sample analyzer of the present invention receives a photographing signal from the camera 18 via a predetermined interface, and displays a captured image on a monitor screen according to a predetermined image processing algorithm. Further, the computer device can further set coordinates in the captured image in advance, and when the operator operates the input means such as a mouse and selects the position of the sample on the screen with the cursor displayed on the screen, The coordinate corresponding to the selected position is determined, and the sample stage 10 is moved so that the light from the light source 12 is irradiated to the coordinate position. An existing technique can be applied to the technique for controlling the movement of the sample stage 10 so that light is irradiated to a position designated from the monitor image.

In the first internal configuration example, the light source 12 is attached to a flat position on the bottom of the housing 1, so that various light sources can be stably put into a stable state regardless of the type, size, shape, and weight of the light source. Can be attached. Then, the light from the light source is irradiated directly above, the sample is irradiated with light from the lower side of the sample stage 10, and the detector 14 transmits light or fluorescence on the sample stage 10, thereby transmitting light. Therefore, the position for detecting fluorescence and the position for detecting fluorescence are relatively close to each other, and therefore, a single small detector stage 16 may be provided with a position for detecting fluorescence and a position for detecting transmitted light. In addition, it is possible to cope with both fluorescence detection and transmitted light detection with a single device having a small casing as shown in FIG. Further, by attaching the detector 14 to the detector stage 16 and making its position movable, it becomes possible to attach a detector corresponding to the type of light source at its optimum position.
FIG. 3 is a diagram illustrating a specific example of assembly in the housing corresponding to the first internal configuration example. 3A is an internal configuration diagram from the front of the housing, and FIG. 3B is an internal configuration diagram from the side of the housing. The sample stage 10 is attached to the bottom of the housing by a support column 15, and the detector stage 16 is attached to a frame 19 fixed to the back of the housing. FIG. 3 shows a state where the detector 14 is attached only to the fluorescence detection position.

  An area 22 for storing a control device group is provided on the rear side of the rear surface of the housing. The control device group includes, for example, a driver and controller for the sample stage 10 and the detector stage 16, a power supply device, an amplifier for the detector 14, a spectrum analysis device, and the like. Since these control device groups are stored in the housing 1, sample analysis can be performed with a simple configuration in which an image display means for analysis results, operation means, and a computer device as control means are connected to the sample analysis apparatus. Is realized.

  FIG. 4 is a diagram illustrating a second internal configuration example of the sample analyzer according to the embodiment of the present invention. The second internal configuration example includes a height measurement detector 20 in addition to the first internal configuration example. The height measurement detector 20 is, for example, a contact displacement sensor, a non-contact laser displacement sensor, a piezo displacement sensor, or the like. By mounting the height measurement detector 20, in addition to fluorescence detection and transmitted light detection in the first internal configuration example, the height and surface shape of the sample can be measured. The height measurement detector 20 can be attached to the detector mounting plate 17, and the height measurement detector 20 can be moved to a desired position by moving the detector stage 16. By disposing the tip of the probe (probe) 20A of the height measurement detector 20 coaxially with the center of the camera 18, the image of the camera 18 is monitored, and the height measurement can be performed while checking the surface position of the sample. It becomes possible.

  Further, when a non-contact type laser displacement sensor is used as the height measurement detector 20, it can be mounted in the lens barrel of the lens 21 of the camera 18. Even in this case, by setting the laser irradiation axis and the center of the camera on the same axis, it is possible to measure the height while monitoring the image of the camera 18 and confirming the surface position of the sample. The lens 21 may be a microscope.

  By having the height measurement detector 20, when the sample analyzer of the present invention is used as an X-ray analyzer, internal information of the sample (identification of elements contained in the sample, element distribution status, transmission by fluorescence detection) Photodetection enables detection of the sample's internal fluoroscopy, as well as detection of external information (for example, height and surface shape) of the sample that cannot be observed with X-rays. It is possible to measure and analyze the inside and outside of the multifaceted.

  In the above-described embodiment, the light source 12 is described as a unit that can be attached to the bottom of the housing 1. However, the present invention is not limited to this. The light emitted from the light source is guided by an optical fiber, and the tip of the optical fiber is fixed to the bottom of the housing 1 from the auxiliary door 3, so that an external light source is used as the light source of the sample analyzer of the present invention. be able to. In this case, the optical fiber introduced into the housing 1 from the outside corresponds to the light source of the sample analyzer of the present invention.

  Moreover, although the wavelength of the light source was divided into X-rays, ultraviolet rays, visible light, and infrared rays for convenience, it is divided to indicate that there are a plurality of types of light sources having different wavelengths, and the division is not limited to this. For example, it does not prevent further division of infrared rays into far infrared rays and near infrared rays.

1 is an external perspective view of a sample analyzer in an embodiment of the present invention. It is a figure which shows the 1st internal structural example of the sample analyzer in embodiment of this invention. It is a figure which shows the specific example of an assembly in the housing | casing corresponding to a 1st internal structural example. It is a figure which shows the 2nd internal structural example of the sample analyzer in embodiment of this invention.

Explanation of symbols

  1: Housing, 2: Front door, 3: Auxiliary door, 10: Sample stage, 10A: Hollow part, 11: Sample stage, 12: Light source, 14: Detector, 15: Support column, 16: Stage for detector, 17 : Detector mounting plate, 17A: Angle adjustment mechanism, 18: Camera, 19: Frame, 20: Height measurement detector, 21: Lens, 22: Control device group storage area

Claims (5)

A first movable stage on which a sample is placed and which can move the sample in the width direction and the depth direction;
A light source that irradiates the sample with X-rays, ultraviolet rays, visible light, or infrared rays;
A first detector for detecting transmitted light or fluorescence generated by light irradiation;
A second movable stage to which the first detector is attached and which allows the first detector to move in a width direction and a height direction;
A housing containing the first movable stage, the light source, the first detector, and the second movable stage;
The light source is one of an X-ray light source, an ultraviolet light source, a visible light source, and an infrared light source, and any one light source is attached to the inside of the casing so as to be exchangeable with another light source,
The first detector is replaceably attached to the second movable stage in accordance with a light source attached to the inside of the housing, and further, transmitted light set on the second movable stage. A sample analyzer, wherein the sample analyzer is attached to either one of a detection mounting position or a fluorescence detection mounting position so as to be replaceable. In claim 1,
The light source is attached to the bottom inside the housing, the first movable stage is provided on the light source, the light source irradiates the sample with light from below the first movable stage, and the first A sample analyzing apparatus, wherein the second movable stage having the first detector attached thereto is provided on an upper part of one movable stage. In claim 1 or 2,
The sample analysis apparatus, wherein the case has a first door for opening and closing a front surface of the case and a second door for opening and closing a side surface of the case. In any one of Claims 1 thru | or 3,
The sample analysis apparatus according to claim 1, wherein the attachment site for detecting the fluorescence is capable of adjusting an angle of the first detector with respect to the sample. In any one of Claims 1 thru | or 4,
A sample analyzer, comprising a second detector attached to the second movable stage and detecting the surface height of the sample.

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