JPS59206756A - 参照電極を一体化したｆｅｔ化学センサ− - Google Patents

参照電極を一体化したｆｅｔ化学センサ−

Info

Publication number
JPS59206756A
JPS59206756A JP58080887A JP8088783A JPS59206756A JP S59206756 A JPS59206756 A JP S59206756A JP 58080887 A JP58080887 A JP 58080887A JP 8088783 A JP8088783 A JP 8088783A JP S59206756 A JPS59206756 A JP S59206756A
Authority
JP
Japan
Prior art keywords
reference electrode
fet
chemical sensor
sensor
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58080887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0469338B2 (en, 2012
Inventor
Keiji Tsukada
啓二 塚田
Hiroyuki Miyagi
宮城　宏行
Takuya Maruizumi
丸泉　琢也
Masao Hotta
正生 堀田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58080887A priority Critical patent/JPS59206756A/ja
Priority to DE19843417137 priority patent/DE3417137C2/de
Publication of JPS59206756A publication Critical patent/JPS59206756A/ja
Publication of JPH0469338B2 publication Critical patent/JPH0469338B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
JP58080887A 1983-05-11 1983-05-11 参照電極を一体化したｆｅｔ化学センサ− Granted JPS59206756A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58080887A JPS59206756A (ja) 1983-05-11 1983-05-11 参照電極を一体化したｆｅｔ化学センサ−
DE19843417137 DE3417137C2 (de) 1983-05-11 1984-05-09 Chemisch empfindliche Feldeffekttransistor-Meßeinrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58080887A JPS59206756A (ja) 1983-05-11 1983-05-11 参照電極を一体化したｆｅｔ化学センサ−

Publications (2)

Publication Number Publication Date
JPS59206756A true JPS59206756A (ja) 1984-11-22
JPH0469338B2 JPH0469338B2 (en, 2012) 1992-11-05

Family

ID=13730852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58080887A Granted JPS59206756A (ja) 1983-05-11 1983-05-11 参照電極を一体化したｆｅｔ化学センサ−

Country Status (2)

Country Link
JP (1) JPS59206756A (en, 2012)
DE (1) DE3417137C2 (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102160U (en, 2012) * 1985-12-18 1987-06-29
JP2012073104A (ja) * 2010-09-28 2012-04-12 Dainippon Printing Co Ltd バイオセンサを用いる測定方法およびバイオセンサ
US8648396B2 (en) 2010-10-18 2014-02-11 Industrial Technology Research Institute Microsystem for analyzing blood

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3519397A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Sensor fuer gasanalyse bzw. -detektion
JPS6283641A (ja) * 1985-10-08 1987-04-17 Sharp Corp 電界効果型半導体センサ
FR2672158B1 (fr) * 1991-01-24 1993-04-09 Commissariat Energie Atomique Capteur pour la detection d'especes chimiques ou de photons utilisant un transistor a effet de champ.
WO2010001277A1 (en) * 2008-06-30 2010-01-07 Nxp B.V. Chip integrated ion sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5672339A (en) * 1979-11-16 1981-06-16 Kuraray Co Ltd Fet multisensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5672339A (en) * 1979-11-16 1981-06-16 Kuraray Co Ltd Fet multisensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102160U (en, 2012) * 1985-12-18 1987-06-29
JP2012073104A (ja) * 2010-09-28 2012-04-12 Dainippon Printing Co Ltd バイオセンサを用いる測定方法およびバイオセンサ
US8648396B2 (en) 2010-10-18 2014-02-11 Industrial Technology Research Institute Microsystem for analyzing blood

Also Published As

Publication number Publication date
DE3417137A1 (de) 1984-11-15
JPH0469338B2 (en, 2012) 1992-11-05
DE3417137C2 (de) 1987-03-26

Similar Documents

Publication Publication Date Title
US5376255A (en) Gas sensor
US4198851A (en) Method and structure for detecting the concentration of oxygen in a substance
US5078855A (en) Chemical sensors and their divided parts
KR960004971B1 (ko) 백금전극을 내장한 감이온 전계효과 트랜지스터를 이용한 바이오센서
US20040079636A1 (en) Biomedical ion sensitive semiconductor sensor and sensor array
US7435610B2 (en) Fabrication of array pH sensitive EGFET and its readout circuit
Poghossian et al. Detecting both physical and (bio‐) chemical parameters by means of ISFET devices
Comte et al. A field effect transistor as a solid-state reference electrode
Tsukada et al. An integrated chemical sensor with multiple ion and gas sensors
JPH11503316A (ja) 測定装置
Seo et al. ISFET glucose sensor based on a new principle using the electrolysis of hydrogen peroxide
EP0432757A2 (en) Planar oxygen sensor
US5039390A (en) Chemically sensitive transducer
Schöning et al. Novel Concepts for Silicon‐Based Biosensors
JPS59206756A (ja) 参照電極を一体化したｆｅｔ化学センサ−
US20090266712A1 (en) Calcium ion sensors and fabrication method thereof, and sensing systems comprising the same
US20070000778A1 (en) Multi-parameter sensor with readout circuit
Meyer et al. Chemical and biochemical sensor array for two-dimensional imaging of anlyte distributions
JP3167022B2 (ja) ガスセンサ
JPH03131749A (ja) 水素ガスセンサ
JPH02129541A (ja) 使い拾て型酵素電極
JPS59176662A (ja) 半導体センサ
KR0141779B1 (ko) 요소측정용 바이오센서 및 그 제조방법
EP0241991A2 (en) Field effect transistor having a membrane overlying the gate insulator
US8410530B2 (en) Sensitive field effect transistor apparatus