JPS59204279A - Ｍｉｓ形半導体集積回路の製造方法 - Google Patents

Ｍｉｓ形半導体集積回路の製造方法

Info

Publication number
JPS59204279A
JPS59204279A JP58079590A JP7959083A JPS59204279A JP S59204279 A JPS59204279 A JP S59204279A JP 58079590 A JP58079590 A JP 58079590A JP 7959083 A JP7959083 A JP 7959083A JP S59204279 A JPS59204279 A JP S59204279A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
silicon film
film
semiconductor substrate
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58079590A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056344B2 (enExample
Inventor
Nobuyuki Takenaka
竹中　信之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP58079590A priority Critical patent/JPS59204279A/ja
Publication of JPS59204279A publication Critical patent/JPS59204279A/ja
Publication of JPH056344B2 publication Critical patent/JPH056344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
JP58079590A 1983-05-06 1983-05-06 Ｍｉｓ形半導体集積回路の製造方法 Granted JPS59204279A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58079590A JPS59204279A (ja) 1983-05-06 1983-05-06 Ｍｉｓ形半導体集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58079590A JPS59204279A (ja) 1983-05-06 1983-05-06 Ｍｉｓ形半導体集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS59204279A true JPS59204279A (ja) 1984-11-19
JPH056344B2 JPH056344B2 (enExample) 1993-01-26

Family

ID=13694206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58079590A Granted JPS59204279A (ja) 1983-05-06 1983-05-06 Ｍｉｓ形半導体集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS59204279A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241023A (ja) * 1988-06-21 1990-02-09 Mitel Corp Ｃｍｏｓアナログクロスポイント・スイッチ・マトリックス

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184248A (en) * 1981-05-08 1982-11-12 Nec Corp Manufacture of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184248A (en) * 1981-05-08 1982-11-12 Nec Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241023A (ja) * 1988-06-21 1990-02-09 Mitel Corp Ｃｍｏｓアナログクロスポイント・スイッチ・マトリックス

Also Published As

Publication number Publication date
JPH056344B2 (enExample) 1993-01-26

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