JPS59200984A - ビ−ム径測定用マ−カ− - Google Patents
ビ−ム径測定用マ−カ−Info
- Publication number
- JPS59200984A JPS59200984A JP7381883A JP7381883A JPS59200984A JP S59200984 A JPS59200984 A JP S59200984A JP 7381883 A JP7381883 A JP 7381883A JP 7381883 A JP7381883 A JP 7381883A JP S59200984 A JPS59200984 A JP S59200984A
- Authority
- JP
- Japan
- Prior art keywords
- marker
- beam diameter
- substrate
- signal
- family
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003550 marker Substances 0.000 title claims abstract description 29
- 239000000463 material Substances 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 101100027969 Caenorhabditis elegans old-1 gene Proteins 0.000 claims 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 241000218645 Cedrus Species 0.000 claims 1
- 229910052790 beryllium Inorganic materials 0.000 claims 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 10
- 238000010521 absorption reaction Methods 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract 2
- 229920001296 polysiloxane Polymers 0.000 abstract 2
- 238000005259 measurement Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 244000257790 Brassica carinata Species 0.000 description 1
- 235000005156 Brassica carinata Nutrition 0.000 description 1
- 244000201986 Cassia tora Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000238557 Decapoda Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241000219094 Vitaceae Species 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 244000022782 cocaer Species 0.000 description 1
- 235000008957 cocaer Nutrition 0.000 description 1
- ZPUCINDJVBIVPJ-LJISPDSOSA-N cocaine Chemical compound O([C@H]1C[C@@H]2CC[C@@H](N2C)[C@H]1C(=O)OC)C(=O)C1=CC=CC=C1 ZPUCINDJVBIVPJ-LJISPDSOSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000021021 grapes Nutrition 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 210000002414 leg Anatomy 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- NCAIGTHBQTXTLR-UHFFFAOYSA-N phentermine hydrochloride Chemical compound [Cl-].CC(C)([NH3+])CC1=CC=CC=C1 NCAIGTHBQTXTLR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7381883A JPS59200984A (ja) | 1983-04-28 | 1983-04-28 | ビ−ム径測定用マ−カ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7381883A JPS59200984A (ja) | 1983-04-28 | 1983-04-28 | ビ−ム径測定用マ−カ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59200984A true JPS59200984A (ja) | 1984-11-14 |
| JPH0449670B2 JPH0449670B2 (enrdf_load_stackoverflow) | 1992-08-12 |
Family
ID=13529113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7381883A Granted JPS59200984A (ja) | 1983-04-28 | 1983-04-28 | ビ−ム径測定用マ−カ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59200984A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140546A (ja) * | 1987-11-27 | 1989-06-01 | Hitachi Ltd | 照射ビーム径評価用素子及び評価方法 |
| JPH11118717A (ja) * | 1997-10-16 | 1999-04-30 | Agency Of Ind Science & Technol | 顕微ラマン分光装置の実効分析領域測定用冶具及びその方法 |
-
1983
- 1983-04-28 JP JP7381883A patent/JPS59200984A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01140546A (ja) * | 1987-11-27 | 1989-06-01 | Hitachi Ltd | 照射ビーム径評価用素子及び評価方法 |
| JPH11118717A (ja) * | 1997-10-16 | 1999-04-30 | Agency Of Ind Science & Technol | 顕微ラマン分光装置の実効分析領域測定用冶具及びその方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449670B2 (enrdf_load_stackoverflow) | 1992-08-12 |
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