JPS59193858U - Substrate holding device in vacuum evaporation equipment - Google Patents
Substrate holding device in vacuum evaporation equipmentInfo
- Publication number
- JPS59193858U JPS59193858U JP8609683U JP8609683U JPS59193858U JP S59193858 U JPS59193858 U JP S59193858U JP 8609683 U JP8609683 U JP 8609683U JP 8609683 U JP8609683 U JP 8609683U JP S59193858 U JPS59193858 U JP S59193858U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holding
- holding device
- holding mechanism
- vacuum evaporation
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例の概略構成図、第２図は本考
案の基板ホールド機構に平板型基板ホルダーを取付ける
場合の詳細図、第３図は本考案の基板ホールド機構に公
転ドーム型基板ホルダーを取付ける場合の詳細図、第４
図は本考案の基板ホールド機構の詳細図である。
１・・・蒸発源、２・・・シャッター、３・・・基板ホ
ールド機構、４・・・平板型基板ホルダー、５・・・公
転ドーム型基板ホルダー、６・・・基板回転用モーター
、７・・・加熱ランプ、８・・・Ｃ，Ａ熱電対、９・・
・膜厚モニター、１０．・・・主バルブ、１１・・・主
ポンプ、１２・・・冷却水、１３・・・真空槽、１４・
・・ホルダー固定用ボルト、１５・・・止めネジ、１６
・・・基板、１７・・・板バネ、１８・・・逃げ穴、１
９・・・基板ストップピン、２０・・・基板ホールド用
スプリング、２１・・・ホルダー止めネジ、２２・・・
ガイド用ピン、２３・・・逃げ穴、２４・・・タップ穴
、２５・・・タップ穴。Figure 1 is a schematic configuration diagram of an embodiment of the present invention, Figure 2 is a detailed diagram of a flat board holder attached to the substrate holding mechanism of the present invention, and Figure 3 is a revolving dome attached to the substrate holding mechanism of the present invention. Detailed drawing for installing the mold board holder, No. 4
The figure is a detailed diagram of the substrate holding mechanism of the present invention. DESCRIPTION OF SYMBOLS 1... Evaporation source, 2... Shutter, 3... Substrate holding mechanism, 4... Flat plate type substrate holder, 5... Revolution dome type substrate holder, 6... Substrate rotation motor, 7 ...Heating lamp, 8...C, A thermocouple, 9...
・Film thickness monitor, 10. ...Main valve, 11...Main pump, 12...Cooling water, 13...Vacuum tank, 14.
... Holder fixing bolt, 15 ... Set screw, 16
... Board, 17... Leaf spring, 18... Evacuation hole, 1
9... Board stop pin, 20... Spring for board holding, 21... Holder fixing screw, 22...
Guide pin, 23... escape hole, 24... tapped hole, 25... tapped hole.
Claims (1)
を回動可能に設置し、蒸発源と対向する該基板ホールド
機構の下面に基板冷却平板ホルダーと公転ドーム型ホル
ダーとを選択的に装着する取付部を設け、該基板ホール
ド機構にホルダーを冷却する冷却部を設けたことを特徴
とする真空蒸着装置における基板ホールド装置。A substrate holding mechanism is rotatably installed above the evaporation source housed in a vacuum chamber, and a substrate cooling flat plate holder and a revolving dome-shaped holder are selectively attached to the lower surface of the substrate holding mechanism facing the evaporation source. 1. A substrate holding device for a vacuum evaporation apparatus, characterized in that the substrate holding mechanism is provided with a cooling section for cooling the holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8609683U JPS59193858U (en) | 1983-06-06 | 1983-06-06 | Substrate holding device in vacuum evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8609683U JPS59193858U (en) | 1983-06-06 | 1983-06-06 | Substrate holding device in vacuum evaporation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59193858U true JPS59193858U (en) | 1984-12-22 |
Family
ID=30216040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8609683U Pending JPS59193858U (en) | 1983-06-06 | 1983-06-06 | Substrate holding device in vacuum evaporation equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59193858U (en) |
-
1983
- 1983-06-06 JP JP8609683U patent/JPS59193858U/en active Pending
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