JPS59190610A - 寸法測定装置 - Google Patents

寸法測定装置

Info

Publication number
JPS59190610A
JPS59190610A JP58063581A JP6358183A JPS59190610A JP S59190610 A JPS59190610 A JP S59190610A JP 58063581 A JP58063581 A JP 58063581A JP 6358183 A JP6358183 A JP 6358183A JP S59190610 A JPS59190610 A JP S59190610A
Authority
JP
Japan
Prior art keywords
sample
electron beam
scanning
detected
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58063581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0372923B2 (enrdf_load_stackoverflow
Inventor
Toshimitsu Hamada
浜田　利満
Tomohiro Kuji
久邇　朝宏
Kazushi Yoshimura
和士 吉村
Takashi Shigemura
重村　隆司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58063581A priority Critical patent/JPS59190610A/ja
Publication of JPS59190610A publication Critical patent/JPS59190610A/ja
Publication of JPH0372923B2 publication Critical patent/JPH0372923B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP58063581A 1983-04-13 1983-04-13 寸法測定装置 Granted JPS59190610A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58063581A JPS59190610A (ja) 1983-04-13 1983-04-13 寸法測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58063581A JPS59190610A (ja) 1983-04-13 1983-04-13 寸法測定装置

Publications (2)

Publication Number Publication Date
JPS59190610A true JPS59190610A (ja) 1984-10-29
JPH0372923B2 JPH0372923B2 (enrdf_load_stackoverflow) 1991-11-20

Family

ID=13233368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58063581A Granted JPS59190610A (ja) 1983-04-13 1983-04-13 寸法測定装置

Country Status (1)

Country Link
JP (1) JPS59190610A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0548573A3 (enrdf_load_stackoverflow) * 1991-11-27 1994-03-09 Hitachi Ltd
JP2008177064A (ja) * 2007-01-19 2008-07-31 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0548573A3 (enrdf_load_stackoverflow) * 1991-11-27 1994-03-09 Hitachi Ltd
US5412209A (en) * 1991-11-27 1995-05-02 Hitachi, Ltd. Electron beam apparatus
EP0810629A1 (en) * 1991-11-27 1997-12-03 Hitachi, Ltd. Electron beam apparatus
JP2008177064A (ja) * 2007-01-19 2008-07-31 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法

Also Published As

Publication number Publication date
JPH0372923B2 (enrdf_load_stackoverflow) 1991-11-20

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