JPS59190209A - シリコン被膜作製方法 - Google Patents

シリコン被膜作製方法

Info

Publication number
JPS59190209A
JPS59190209A JP58063389A JP6338983A JPS59190209A JP S59190209 A JPS59190209 A JP S59190209A JP 58063389 A JP58063389 A JP 58063389A JP 6338983 A JP6338983 A JP 6338983A JP S59190209 A JPS59190209 A JP S59190209A
Authority
JP
Japan
Prior art keywords
silane
silicon
container
reaction
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58063389A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6145707B2 (zh
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP58063389A priority Critical patent/JPS59190209A/ja
Publication of JPS59190209A publication Critical patent/JPS59190209A/ja
Publication of JPS6145707B2 publication Critical patent/JPS6145707B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP58063389A 1983-04-11 1983-04-11 シリコン被膜作製方法 Granted JPS59190209A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58063389A JPS59190209A (ja) 1983-04-11 1983-04-11 シリコン被膜作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58063389A JPS59190209A (ja) 1983-04-11 1983-04-11 シリコン被膜作製方法

Publications (2)

Publication Number Publication Date
JPS59190209A true JPS59190209A (ja) 1984-10-29
JPS6145707B2 JPS6145707B2 (zh) 1986-10-09

Family

ID=13227891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58063389A Granted JPS59190209A (ja) 1983-04-11 1983-04-11 シリコン被膜作製方法

Country Status (1)

Country Link
JP (1) JPS59190209A (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155610A (ja) * 1986-12-18 1988-06-28 Sanyo Electric Co Ltd 半導体膜の製造方法
JPH03150288A (ja) * 1989-11-02 1991-06-26 Osaka Titanium Co Ltd 多結晶シリコンの加熱装置
JP4798719B2 (ja) * 2005-01-26 2011-10-19 株式会社日立メディコ 圧迫部材、超音波探触子及び超音波診断装置
JP2015514656A (ja) * 2012-02-23 2015-05-21 ピルキントン グループ リミテッド ガラス基材上にシリカ被膜を成膜するための化学的気相成長プロセス
US9060737B2 (en) 2005-05-09 2015-06-23 Hitachi Medical Corporation Ultrasonic diagnostic apparatus and ultrasonic image display method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155610A (ja) * 1986-12-18 1988-06-28 Sanyo Electric Co Ltd 半導体膜の製造方法
JPH03150288A (ja) * 1989-11-02 1991-06-26 Osaka Titanium Co Ltd 多結晶シリコンの加熱装置
JP4798719B2 (ja) * 2005-01-26 2011-10-19 株式会社日立メディコ 圧迫部材、超音波探触子及び超音波診断装置
US8622908B2 (en) 2005-01-26 2014-01-07 Hitachi Medical Corporation Pressing member, ultrasonic probe and ultrasonic diagnosing device
US9060737B2 (en) 2005-05-09 2015-06-23 Hitachi Medical Corporation Ultrasonic diagnostic apparatus and ultrasonic image display method
JP2015514656A (ja) * 2012-02-23 2015-05-21 ピルキントン グループ リミテッド ガラス基材上にシリカ被膜を成膜するための化学的気相成長プロセス

Also Published As

Publication number Publication date
JPS6145707B2 (zh) 1986-10-09

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