JPS5918824B2 - 露光装置 - Google Patents

露光装置

Info

Publication number
JPS5918824B2
JPS5918824B2 JP49077668A JP7766874A JPS5918824B2 JP S5918824 B2 JPS5918824 B2 JP S5918824B2 JP 49077668 A JP49077668 A JP 49077668A JP 7766874 A JP7766874 A JP 7766874A JP S5918824 B2 JPS5918824 B2 JP S5918824B2
Authority
JP
Japan
Prior art keywords
frame
exposure
exposure frame
base
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49077668A
Other languages
English (en)
Japanese (ja)
Other versions
JPS516657A (enrdf_load_html_response
Inventor
修司 浅場
門出 奥村
武雄 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP49077668A priority Critical patent/JPS5918824B2/ja
Publication of JPS516657A publication Critical patent/JPS516657A/ja
Publication of JPS5918824B2 publication Critical patent/JPS5918824B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP49077668A 1974-07-05 1974-07-05 露光装置 Expired JPS5918824B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49077668A JPS5918824B2 (ja) 1974-07-05 1974-07-05 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49077668A JPS5918824B2 (ja) 1974-07-05 1974-07-05 露光装置

Publications (2)

Publication Number Publication Date
JPS516657A JPS516657A (enrdf_load_html_response) 1976-01-20
JPS5918824B2 true JPS5918824B2 (ja) 1984-05-01

Family

ID=13640251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49077668A Expired JPS5918824B2 (ja) 1974-07-05 1974-07-05 露光装置

Country Status (1)

Country Link
JP (1) JPS5918824B2 (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010253A (ja) * 1983-06-29 1985-01-19 Dainippon Screen Mfg Co Ltd 焼付装置
JPH043308Y2 (enrdf_load_html_response) * 1985-07-18 1992-02-03

Also Published As

Publication number Publication date
JPS516657A (enrdf_load_html_response) 1976-01-20

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