JPS59182218A - 多結晶シリコンウエハの製造方法 - Google Patents
多結晶シリコンウエハの製造方法Info
- Publication number
- JPS59182218A JPS59182218A JP58054459A JP5445983A JPS59182218A JP S59182218 A JPS59182218 A JP S59182218A JP 58054459 A JP58054459 A JP 58054459A JP 5445983 A JP5445983 A JP 5445983A JP S59182218 A JPS59182218 A JP S59182218A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- melt
- layer
- release agent
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 33
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 28
- 239000010703 silicon Substances 0.000 title claims abstract description 28
- 239000000155 melt Substances 0.000 claims abstract description 28
- 239000011863 silicon-based powder Substances 0.000 claims abstract description 18
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 11
- 239000003960 organic solvent Substances 0.000 claims abstract description 6
- 235000012431 wafers Nutrition 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 28
- 239000006082 mold release agent Substances 0.000 claims description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 11
- 239000000843 powder Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 11
- 238000011109 contamination Methods 0.000 abstract 2
- 238000001035 drying Methods 0.000 abstract 1
- 238000011084 recovery Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 30
- 239000011159 matrix material Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 241000257465 Echinoidea Species 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 206010062717 Increased upper airway secretion Diseases 0.000 description 1
- 206010041662 Splinter Diseases 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 208000026435 phlegm Diseases 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58054459A JPS59182218A (ja) | 1983-03-30 | 1983-03-30 | 多結晶シリコンウエハの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58054459A JPS59182218A (ja) | 1983-03-30 | 1983-03-30 | 多結晶シリコンウエハの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59182218A true JPS59182218A (ja) | 1984-10-17 |
| JPH0314768B2 JPH0314768B2 (enrdf_load_stackoverflow) | 1991-02-27 |
Family
ID=12971255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58054459A Granted JPS59182218A (ja) | 1983-03-30 | 1983-03-30 | 多結晶シリコンウエハの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59182218A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0590623A (ja) * | 1991-09-28 | 1993-04-09 | Nissha Printing Co Ltd | 太陽電池用転写材 |
| CN1073005C (zh) * | 1996-12-19 | 2001-10-17 | 艾利森电话股份有限公司 | 制备弹性凸起的方法 |
-
1983
- 1983-03-30 JP JP58054459A patent/JPS59182218A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0590623A (ja) * | 1991-09-28 | 1993-04-09 | Nissha Printing Co Ltd | 太陽電池用転写材 |
| CN1073005C (zh) * | 1996-12-19 | 2001-10-17 | 艾利森电话股份有限公司 | 制备弹性凸起的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0314768B2 (enrdf_load_stackoverflow) | 1991-02-27 |
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