JPS59181549A - 半導体ウエ−ハのライフタイム測定方法 - Google Patents

半導体ウエ−ハのライフタイム測定方法

Info

Publication number
JPS59181549A
JPS59181549A JP5391883A JP5391883A JPS59181549A JP S59181549 A JPS59181549 A JP S59181549A JP 5391883 A JP5391883 A JP 5391883A JP 5391883 A JP5391883 A JP 5391883A JP S59181549 A JPS59181549 A JP S59181549A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
light
semiconductor
measuring
τeff
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5391883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248377B2 (enrdf_load_stackoverflow
Inventor
Koji Murai
村井　耕治
Akira Usami
宇佐美　晶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON SILICON KK
Mitsubishi Metal Corp
Original Assignee
NIPPON SILICON KK
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON SILICON KK, Mitsubishi Metal Corp filed Critical NIPPON SILICON KK
Priority to JP5391883A priority Critical patent/JPS59181549A/ja
Publication of JPS59181549A publication Critical patent/JPS59181549A/ja
Publication of JPS6248377B2 publication Critical patent/JPS6248377B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP5391883A 1983-03-31 1983-03-31 半導体ウエ−ハのライフタイム測定方法 Granted JPS59181549A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5391883A JPS59181549A (ja) 1983-03-31 1983-03-31 半導体ウエ−ハのライフタイム測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5391883A JPS59181549A (ja) 1983-03-31 1983-03-31 半導体ウエ−ハのライフタイム測定方法

Publications (2)

Publication Number Publication Date
JPS59181549A true JPS59181549A (ja) 1984-10-16
JPS6248377B2 JPS6248377B2 (enrdf_load_stackoverflow) 1987-10-13

Family

ID=12956087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5391883A Granted JPS59181549A (ja) 1983-03-31 1983-03-31 半導体ウエ−ハのライフタイム測定方法

Country Status (1)

Country Link
JP (1) JPS59181549A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418234A (en) * 1987-07-14 1989-01-23 Agency Ind Science Techn Semiconductor evaluation device
JPS6437843A (en) * 1987-08-03 1989-02-08 Kyushu Electron Metal Method and device for measuring lifetime of semiconductor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418234A (en) * 1987-07-14 1989-01-23 Agency Ind Science Techn Semiconductor evaluation device
JPS6437843A (en) * 1987-08-03 1989-02-08 Kyushu Electron Metal Method and device for measuring lifetime of semiconductor

Also Published As

Publication number Publication date
JPS6248377B2 (enrdf_load_stackoverflow) 1987-10-13

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