JPS59178304A - 微小間隙測定方法及び装置 - Google Patents

微小間隙測定方法及び装置

Info

Publication number
JPS59178304A
JPS59178304A JP58052353A JP5235383A JPS59178304A JP S59178304 A JPS59178304 A JP S59178304A JP 58052353 A JP58052353 A JP 58052353A JP 5235383 A JP5235383 A JP 5235383A JP S59178304 A JPS59178304 A JP S59178304A
Authority
JP
Japan
Prior art keywords
wavelength
interference pattern
microgap
wavelengths
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58052353A
Other languages
English (en)
Japanese (ja)
Other versions
JPH059723B2 (enrdf_load_stackoverflow
Inventor
Toshihiko Nakada
俊彦 中田
Yoshisada Oshida
良忠 押田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58052353A priority Critical patent/JPS59178304A/ja
Publication of JPS59178304A publication Critical patent/JPS59178304A/ja
Publication of JPH059723B2 publication Critical patent/JPH059723B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58052353A 1983-03-30 1983-03-30 微小間隙測定方法及び装置 Granted JPS59178304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58052353A JPS59178304A (ja) 1983-03-30 1983-03-30 微小間隙測定方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58052353A JPS59178304A (ja) 1983-03-30 1983-03-30 微小間隙測定方法及び装置

Publications (2)

Publication Number Publication Date
JPS59178304A true JPS59178304A (ja) 1984-10-09
JPH059723B2 JPH059723B2 (enrdf_load_stackoverflow) 1993-02-05

Family

ID=12912441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58052353A Granted JPS59178304A (ja) 1983-03-30 1983-03-30 微小間隙測定方法及び装置

Country Status (1)

Country Link
JP (1) JPS59178304A (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174211U (enrdf_load_stackoverflow) * 1986-04-25 1987-11-05
JPS63205503A (ja) * 1987-02-20 1988-08-25 Mitsubishi Electric Corp 微小すきまの光学的測定装置
JPS6457107A (en) * 1987-08-28 1989-03-03 Hitachi Ltd Measuring method of distribution of film thickness and apparatus therefor
JPH03111713A (ja) * 1989-09-27 1991-05-13 Hitachi Ltd 干渉式傾きもしくは高さ検出装置並びに縮小投影式露光装置及びその方法
JPH06147841A (ja) * 1992-11-06 1994-05-27 Ibm Japan Ltd ヘッド浮上量測定装置
EP0689665A4 (en) * 1993-12-21 1998-05-13 Phase Metrics METHOD AND DEVICE FOR CALIBRATING INTENSITY AND DETECTING THE FRINGER FOLDER FOR THE INTERFEROMETRIC MEASUREMENT OF SMALL SPACES
JP2007279023A (ja) * 2006-03-15 2007-10-25 Hitachi Maxell Ltd スペーシング計測装置及び計測方法
JP2009052989A (ja) * 2007-08-24 2009-03-12 Kagawa Univ 微小物体の光学的計測装置
KR100941981B1 (ko) * 2007-11-06 2010-02-11 한국표준과학연구원 레이저 간섭계식 메코메타
JP2012027009A (ja) * 2010-06-24 2012-02-09 Toray Eng Co Ltd 干渉縞モデル適合による表面形状測定方法およびその装置
JP2012154765A (ja) * 2011-01-26 2012-08-16 Rexxam Co Ltd 光学的計測装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174211U (enrdf_load_stackoverflow) * 1986-04-25 1987-11-05
JPS63205503A (ja) * 1987-02-20 1988-08-25 Mitsubishi Electric Corp 微小すきまの光学的測定装置
JPS6457107A (en) * 1987-08-28 1989-03-03 Hitachi Ltd Measuring method of distribution of film thickness and apparatus therefor
JPH03111713A (ja) * 1989-09-27 1991-05-13 Hitachi Ltd 干渉式傾きもしくは高さ検出装置並びに縮小投影式露光装置及びその方法
JPH06147841A (ja) * 1992-11-06 1994-05-27 Ibm Japan Ltd ヘッド浮上量測定装置
EP0689665A4 (en) * 1993-12-21 1998-05-13 Phase Metrics METHOD AND DEVICE FOR CALIBRATING INTENSITY AND DETECTING THE FRINGER FOLDER FOR THE INTERFEROMETRIC MEASUREMENT OF SMALL SPACES
JP2007279023A (ja) * 2006-03-15 2007-10-25 Hitachi Maxell Ltd スペーシング計測装置及び計測方法
JP2009052989A (ja) * 2007-08-24 2009-03-12 Kagawa Univ 微小物体の光学的計測装置
KR100941981B1 (ko) * 2007-11-06 2010-02-11 한국표준과학연구원 레이저 간섭계식 메코메타
JP2012027009A (ja) * 2010-06-24 2012-02-09 Toray Eng Co Ltd 干渉縞モデル適合による表面形状測定方法およびその装置
JP2012154765A (ja) * 2011-01-26 2012-08-16 Rexxam Co Ltd 光学的計測装置

Also Published As

Publication number Publication date
JPH059723B2 (enrdf_load_stackoverflow) 1993-02-05

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