JPS59173338U - 半導体ウエハの検査装置 - Google Patents

半導体ウエハの検査装置

Info

Publication number
JPS59173338U
JPS59173338U JP6756383U JP6756383U JPS59173338U JP S59173338 U JPS59173338 U JP S59173338U JP 6756383 U JP6756383 U JP 6756383U JP 6756383 U JP6756383 U JP 6756383U JP S59173338 U JPS59173338 U JP S59173338U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
bottle
shaped member
wafer inspection
inspection equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6756383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242538Y2 (enrdf_load_stackoverflow
Inventor
鴨下　実
Original Assignee
有限会社三和無線測器研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 有限会社三和無線測器研究所 filed Critical 有限会社三和無線測器研究所
Priority to JP6756383U priority Critical patent/JPS59173338U/ja
Publication of JPS59173338U publication Critical patent/JPS59173338U/ja
Application granted granted Critical
Publication of JPS6242538Y2 publication Critical patent/JPS6242538Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP6756383U 1983-05-06 1983-05-06 半導体ウエハの検査装置 Granted JPS59173338U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6756383U JPS59173338U (ja) 1983-05-06 1983-05-06 半導体ウエハの検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6756383U JPS59173338U (ja) 1983-05-06 1983-05-06 半導体ウエハの検査装置

Publications (2)

Publication Number Publication Date
JPS59173338U true JPS59173338U (ja) 1984-11-19
JPS6242538Y2 JPS6242538Y2 (enrdf_load_stackoverflow) 1987-10-31

Family

ID=30197752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6756383U Granted JPS59173338U (ja) 1983-05-06 1983-05-06 半導体ウエハの検査装置

Country Status (1)

Country Link
JP (1) JPS59173338U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6242538Y2 (enrdf_load_stackoverflow) 1987-10-31

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