JPS59172174A - Manufacture of digital signal recording and reproducing disk - Google Patents

Abstract

PURPOSE:To improve the reliability of reflecting film formation, by installing three devices for making taking-out and bringing-in of disks, substrate heating, and vapor deposition of reflecting film at three locations in a vacuum vessel and successively performing the disk taking-out and bringing-in, substrate heating, and vapor deposition of reflecting film while a disk is held at the outer periphery of a turntable located at the center of the vacuum vessel and the turntable is rotated. CONSTITUTION:A disk 1 is put into a vacuum vessel 11 through a preliminary vacuum chamber 10 and fitted to a disk taking-out and bringing-in position 13 installed to the outer periphery of a turntable 12. The turntable 12 is rotated and the substrate of the disk 1 is heated by a heater 15 at a substrate heating position 14. The table 12 is further rotated and the disk 1 reaches a sputtering position 16 where Al is sputtered from a target 17 and a reflecting film is formed on the surface of the disk 1. Finally, the disk 1 is moved to the position 13 where the disk 1 is taken out from the vacuum vessel 11 through the preliminary vacuum chamber 10. In this manner, a reflecting film can be formed on the surface of a disk by successively processing the disk surface with the above mentioned three devices, and therefore, reliability of the reflecting film formation can be improved.

Description

[Detailed Description of the Invention] 2. Field of Industrial Application The present invention relates to a method for manufacturing a digital signal recording/playback disc for video discs, digital audio discs (for example, compact discs), still images, document files, etc. It is something.

Conventional structure and problems This type of digital signal recording/reproducing disk is considered promising as an information medium due to its extremely high information density, low S/N ratio, and low noise. It has been commercialized as Nuku.

FIG. 1 shows an overview of a general digital audio system. In this method, a PCM-converted digital signal is recorded in a convex-concave manner on a planutic dinuque, and this is reproduced by a semiconductor laser. In FIG. 1, 1 is the entire Dinuk, 2 is a planutic substrate, 3 is a digital signal carved in a concave-convex shape on the surface of the planutic substrate 2, 4 is a reflective film created on the surface, and 6 is the surface of the reflective film 4. Protective film coated on, 6 is dinu 3
・This is a semiconductor laser for reproduction that is irradiated from the back side of RI1.

Here, the reflective film 4 converts the digital signal 3 into the semiconductor laser 6.
This is necessary for reflecting the irradiated light when reproducing the light.

FIG. 2 shows a conventional method for forming a reflective film using a vacuum evaporation method.

A base material 8 in which the disks 1 are arranged as shown in FIG. 2(b) is placed in a vacuum container 7, and the filament 9 is heated.
The reflective film 4 is created by vapor-depositing metals such as the following on the surface of the Dinuk 1.

In this case, it is difficult to automate the device, there is a limit to the number of disks that can be processed, making it unsuitable for mass production, and there is no mechanism for heating the disk substrate, so the adhesion of the reflective film 4 is weak. However, there are drawbacks such as the complexity of the equipment, which makes it unsuitable for mass production.

Purpose of the Invention The present invention provides a method for manufacturing a digital signal recording/reproducing disk that eliminates these drawbacks and can produce reflective films in large quantities, continuously, quickly, and with stable performance. It is.

Structure of the Invention The present invention provides three devices at three locations on the circumference of a vacuum container for loading and unloading a disk, heating a DINUK substrate, and depositing a reflective film. By holding the Dinuku vertically and rotating this turntable, you can take out and take out the disc.
The substrate of the disk is heated and the reflective film is deposited in sequence to form a reflective film on the surface of the digital signal recording/reproducing Dinuk.

DESCRIPTION OF EMBODIMENTS FIG. 3 shows an embodiment of the method for manufacturing a digital signal recording/reproducing disk of the present invention. Here, the entire device is shown in a top view, since the disk is held vertically.

Figure 3 shows how to take out the disk and heat the board.

A turntable holding the dinuks in a vertical direction was placed in a vacuum container with three functions: vapor deposition of a reflective film.
- An embodiment is shown in which the rotation mechanism is rotated multiple times to sequentially perform the steps of loading and unloading, heating the substrate, and vapor deposition. The manufacturing method will be explained below. The disk 1 is placed into a vacuum container 11 through a preliminary vacuum chamber 10, and is attached to a first rotation position (dinuk take-out position) 13 provided on the outer periphery of the turntable 12. Next, the turn tape) v12 is rotated, and when it reaches the second rotation position (substrate heating position) 14, the substrate of Dinuk 1 is heated by the heater 15. When the turn tape/L' 12 further rotates and reaches the third rotation position (Nupatta position) 16, the mulch 1 is sputtered from the target 17, and a reflective film is created on the surface of the Dinuk. Finally, the disc 1 is moved to the first rotational position 13 and the disc 1 is removed through the pre-vacuum chamber 1o.

FIG. 4 shows another embodiment of the present invention, in which processing is performed at four rotational positions: disk ejection/ejection, substrate heating, vapor deposition, and preliminary processing.

The disk 1 is placed into the vacuum container 11 through the preliminary vacuum chamber 1o, and is held vertically at a first rotation position 13 provided on the outer periphery of the turntable 12.

Next, the turn tape /l/12 rotates, and the disk 1 moves to the second rotational position 14, where the substrate of the Dinuk 1 is heated by the heater 16. Furthermore, turn tape/L'
12 rotates, the disk 1 moves to the fourth rotational position 18. Here, in a spare space, a device (not shown) is installed to perform static electricity removal, etc. Further turn tape/l'1
2 rotates and moves to the third rotational position 16, where fi Al is sputtered onto the target 17 to create a reflective film. Thereafter, the turn tape) v12 is rotated to move the disc 1 to a first rotational position 13, where it is removed through the preliminary vacuum chamber 1o.

Note that the reflective film is desirably created by physical vapor deposition such as vacuum evaporation, sputtering, and ion blasting.

Effects of the Invention As described above, according to the present invention, a 7/゛ disk is vertically placed in a vacuum container that has three devices for taking out and taking out the Dinuk, heating the substrate of the disk, and depositing a reflective film on the disk surface. A turntable held in the same direction is rotated, and as the turntable rotates, the surface of Sidinuk is sequentially processed by the three devices described above to form a reflective film on the surface of Dinuk.

This improves reliability when creating reflective films, and allows for mass production because sinupede amplifiers can be automated.
Discs can be created at low cost.

[Brief explanation of the drawing]

Figures 1 (IL) to (0) are a plan view, a cross-sectional view, and a cross-sectional view of main parts of a general digital signal recording/reproducing Dinuk;
Figures (&) and (b) are diagrams showing an outline of the manufacturing method of a conventional digital signal recording/reproducing Dinuk and a perspective view showing a state in which a disk is attached to the substrate thereof, and Figure 3 is an illustration of an embodiment of the present invention. FIG. 4 is a top view of another embodiment of the present invention. 1...Dinuk, 2...Planutic board, 3...Digital signal, 4...
・Reflection film, 5... Protective film, 10... Preliminary vacuum chamber, 11... Vacuum container, 12...
・Turntable, 13...First rotation position (
DINUK take-out position), 14... Second rotation position (substrate heating position), 15... Heater, 16...
...Third rotation position (Nupatta position), 17...
...Target, 18...Fourth rotation position (preliminary position). Name of agent: Patent attorney Toshio Nakao and 1 other person 2nd
Figure JP-A-59-172174 (4) Figure 3

Claims (1)

[Claims] (1) Three devices are installed at three positions on the circumference of the vacuum chamber to take out and take out the disk, heat the Dinuk substrate, and deposit a reflective film on the disk surface. Digital signal recording on outer circumference 1
By holding the playback disk vertically and rotating the turntable, loading and unloading the disk, heating the substrate of the disk, and depositing a reflective film on the surface of the digital signal recording/reproducing disk are sequentially performed. A method for manufacturing a digital signal recording and reproducing Dinuk characterized by creating.翰) A method of manufacturing a reflective film by vacuum evaporation, sputtering, and idigital signal recording/playback discs.