WO2001031647A1 - Method and device for drying data carrier plates - Google Patents

Method and device for drying data carrier plates Download PDF

Info

Publication number
WO2001031647A1
WO2001031647A1 PCT/DE2000/003706 DE0003706W WO0131647A1 WO 2001031647 A1 WO2001031647 A1 WO 2001031647A1 DE 0003706 W DE0003706 W DE 0003706W WO 0131647 A1 WO0131647 A1 WO 0131647A1
Authority
WO
WIPO (PCT)
Prior art keywords
drying
data carrier
chamber
vacuum
dye
Prior art date
Application number
PCT/DE2000/003706
Other languages
German (de)
French (fr)
Inventor
Thomas Glomb
Original Assignee
Data Disc Robots Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2000107065 external-priority patent/DE10007065A1/en
Application filed by Data Disc Robots Gmbh filed Critical Data Disc Robots Gmbh
Priority to DE10083282T priority Critical patent/DE10083282D2/en
Priority to AU18501/01A priority patent/AU1850101A/en
Publication of WO2001031647A1 publication Critical patent/WO2001031647A1/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F26B5/042—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum for drying articles or discrete batches of material in a continuous or semi-continuous operation, e.g. with locks or other air tight arrangements for charging/discharging

Definitions

  • the invention relates to a method for drying data carrier disks, in which a liquid dye is applied to a plastic disc and the dye is then dried.
  • the invention also relates to a device for drying data carrier disks.
  • a so-called dye is applied to a polycarbonate pane as a writable layer.
  • This dye is applied in the liquid phase and then distributed by a spinning process.
  • the dye is dried under the influence of heat at atmospheric pressure. In this drying process, the residual solvent content is extracted from the dye.
  • the pane is dried for about 20 minutes in a heated dryer at a temperature of about 80 ° C and clean room air of class 100.
  • This drying process is time and energy consuming and there are high costs for the generation of clean room air of class 100.
  • the invention is therefore based on the object of providing a generic method and a device for carrying out the method, which enable the most economical drying possible while maintaining the highest quality standards. This task is solved procedurally by drying the dye under negative pressure.
  • this method offers the advantage that considerable operating costs are saved, since a dryer with high energy consumption and the associated effort for the treatment of conditioned clean air can largely be dispensed with. Since the evaporation of solvent components takes place much faster than under atmospheric pressure, the cycle time for drying The process can be carried out in normal process times of the order of magnitude as they occur in metallization.
  • the vacuum drying method is fundamentally suitable for all optical data storage media in which the active storage layer consists of a medium applied in the liquid phase.
  • the dye is both dried and splintered in a vacuum chamber. If the drying is carried out in the same vacuum apparatus as the metallization, the manufacturing costs can be significantly reduced.
  • the reflection medium is applied using a vacuum coating process. In this step known as splintering, a layer - usually silver - is applied to the pane by sputtering a target in the plasma. Since the dyecoating and the sputtering are successive procedural steps, these steps can be carried out in a simple manner in a single device, in which the vacuum device can be used for both process steps.
  • the dye has a solvent, preferably diacetone alcohol.
  • Diacetone alcohol evaporates at an ambient temperature of 20 ° C at a pressure of 2 mbar. If the pressure in the vacuum chamber is reduced below this value, the solvent evaporates in seconds without external heat.
  • heat and vacuum can also be combined in the method according to the invention in order to provide the optimal process parameters for the respective application.
  • the object on which the invention is based is achieved with a chamber which has at least one vacuum lock and a vacuum pump in order to generate a negative pressure in the chamber.
  • This simple device enables fast, inexpensive drying of data carrier disks.
  • the device preferably has a vacuum measuring device. It is also proposed to provide a pressure control valve.
  • a data carrier transport device can be installed in this device in order to convey the data carrier disks into and out of the device.
  • a sputtering device is advantageously arranged in the chamber. This makes it possible to use the vacuum device for both the drying and the sputtering process.
  • Figure 1 is a schematic representation of an apparatus for drying data carrier disks
  • Figure 2 shows a device according to Figure 1 with a sputtering device.
  • the device 1 shown in FIG. 1 essentially consists of a chamber 2 sealed against atmospheric pressure.
  • This chamber 2 has an inlet side 3 in its longitudinal extension, on which a first vacuum lock 4 is provided and a second vacuum lock 6 on its outlet side 5.
  • a conveyor device 7 allows disk plates 8 to be moved through chamber 2 in the direction of arrows 9 and 10.
  • a vacuum pump 1 1 evacuates the chamber 2 to a pressure below the vapor pressure of the solvent used in each case of the dye layer applied to the data carrier 8.
  • the working pressure is kept constant via the pressure control valve 12 arranged on the chamber 2 and the desired pressure is set with the aid of the vacuum measuring device 13.
  • FIG. 2 A device for vacuum drying and metallizing is shown in Figure 2.
  • This device 20 consists of a drying zone 21 and a sputtering zone 22. Both zones have their own vacuum pumps 23 and 24 and a partition 25 is provided between the zones in order to prevent mutual influences of the work carried out in the zones. To minimize operations.
  • the remaining structure corresponds to the device shown in Figure 1.

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

The invention relates to method for drying data carrier plates (8) wherein a liquid dye is applied to a plastic disk and subsequently dried. Drying occurs under pressure. Rapid, energy-saving drying is achieved without the quality of said data carrier plates being compromised. A device (1) for performing the inventive method has a chamber (2) comprising at least a vacuum lock (4, 6) and a vacuum pump (11) in order to generate negative pressure in the chamber (3). Preferably, a drying process and a sputtering process are performed in said chamber.

Description

Verfahren und Vorrichtung zum Trocknen von Datenträgerplatten Method and device for drying data carrier disks
Die Erfindung betrifft ein Verfahren zum Trocknen von Datenträgerplatten, bei dem auf eine Kunststoffscheibe ein flüssiger Dye aufgetragen wird und der Dye anschließend getrocknet wird. Außerdem betrifft die Erfindung eine Vorrichtung zum Trocknen von Datenträgerplatten.The invention relates to a method for drying data carrier disks, in which a liquid dye is applied to a plastic disc and the dye is then dried. The invention also relates to a device for drying data carrier disks.
Bei der Herstellung von Datenträgerplatten, insbesondere optischen Datenträgern wie CD-Rs oder DVD-Rs wird auf eine Polycarbonatscheibe als beschreibbare Schicht ein sogenannter Dye aufgetragen. Dieser Dye wird in der Flüssigphase aufgetragen und dann durch ein Spinn verfahren verteilt. Sowie eine homogene Verteilung auf der Polycarbonatscheibe erreicht ist, wird der Dye unter Wänneeinwirkimg bei Atmosphärendruck getrocknet. Bei diesem Trocknungsverfahren wird der Rest- Lösungsmittelgehalt dem Dye entzogen. Hierbei wird die Scheibe ca. 20 min in einem beheizten Trockner bei einer Temperatur von etwa 80°C und Reinraumluft der Klasse 100 getrocknet.In the production of data carrier disks, in particular optical data carriers such as CD-Rs or DVD-Rs, a so-called dye is applied to a polycarbonate pane as a writable layer. This dye is applied in the liquid phase and then distributed by a spinning process. As soon as a homogeneous distribution is achieved on the polycarbonate pane, the dye is dried under the influence of heat at atmospheric pressure. In this drying process, the residual solvent content is extracted from the dye. Here, the pane is dried for about 20 minutes in a heated dryer at a temperature of about 80 ° C and clean room air of class 100.
Dieses Trocknungsverfaliren ist zeit- und energieaufwendig und es entstehen hohe Kosten für die Erzeugung der Reinraumluft der Klasse 100.This drying process is time and energy consuming and there are high costs for the generation of clean room air of class 100.
Der Erfindung liegt daher die Aufgabe zu Grunde, ein gattungsgemäßes Verfahren und eine Vorrichtung zur Durchführung des Verfahrens bereitzustellen, die eine möglichst kostengünstige Trocknung unter Beibehaltung höchster Qualitätsmaßstäbe ermöglichen. Diese Aufgabe wird verfahrensmäßig dadurch gelöst, dass der Dye unter Unterdruck getrocknet wird.The invention is therefore based on the object of providing a generic method and a device for carrying out the method, which enable the most economical drying possible while maintaining the highest quality standards. This task is solved procedurally by drying the dye under negative pressure.
Überraschender Weise hat sich herausgestellt, dass die stark erhöhte Dampffransportgeschwindigkeit, die bei der Vakuumtrocknimg entsteht, die kristalline Struktur des Dyes nicht derartig beschädigen konnte, dass die hohen bei optischen Datenträgerplatten notwendigen Qualitätscharakteristiken verändert werden. Röntgendiffraktometrische Vergleichsmes- sungen (XRD-Analysen) von konventionell und vakuumgetrockneten Scheiben haben sogar keinerlei Unterschiede in der Kristallstruktur erkennen lassen. Überraschenderweise gab es bei den im Vakuumverfahren hergestellten Musterscheiben keine Ausfälle wie Brennabbruch, Spurverlust beim Ablesen oder Blocklesefehler. Obwohl damit gerechnet werden muss, dass auf Grund der andersartigen Bewegung des Lösimgsmittels an die Oberfläche des Dyes und die andersartige Verdampfung des Lösungsmittels an der Oberfläche qualitative Veränderungen bei der Be- schichtung entstehen, konnte auch nach dem Beschreiben mit zwei, - vier- und achtfacher Geschwindigkeit kein wesentlicher Unterschied zur thermischen Trocknung festgestellt werden.Surprisingly, it has been found that the greatly increased steam transport speed, which arises during vacuum drying, could not damage the crystalline structure of the dye in such a way that the high quality characteristics required for optical data carrier disks are changed. X-ray diffractometric comparative measurements (XRD analyzes) of conventional and vacuum-dried panes even showed no differences in the crystal structure. Surprisingly, there were no failures such as burn-off, track loss during reading or block reading errors in the sample disks produced using the vacuum process. Although it must be expected that due to the different movement of the solvent on the surface of the dye and the different evaporation of the solvent on the surface, qualitative changes in the coating will occur, even after the description with two, four and eight times Speed no significant difference to thermal drying can be determined.
Gleichzeitig bietet dieses Verfahren den Vorteil, dass man erhebliche Betriebskosten einspart, da auf einen Trockner mit hohem Energieverbrauch und den damit verbundenen Aufwand zur Aufbereitung von konditionier- ter Reinluft weitgehend verzichtet werden kann. Da unter Vakuum das Verdampfen von Lösungsmittelbestandteilen wesentlich schneller abläuft als unter Atmosphärendruck, kann zudem die Zykluszeit für den Trock- nungsprozess in größenordnungsmäßig üblichen Prozesszeiten, wie sie in der Metallisierung stattfinden, durchgeführt werden.At the same time, this method offers the advantage that considerable operating costs are saved, since a dryer with high energy consumption and the associated effort for the treatment of conditioned clean air can largely be dispensed with. Since the evaporation of solvent components takes place much faster than under atmospheric pressure, the cycle time for drying The process can be carried out in normal process times of the order of magnitude as they occur in metallization.
Es hat sich herausgestellt, dass das Vakmimtrocknungs- Verfahren grundsätzlich für alle optischen Datenspeicher geeignet ist, bei denen die aktive Speicherschicht aus einem in der Flüssigphase aufgetragenen Medium besteht.It has been found that the vacuum drying method is fundamentally suitable for all optical data storage media in which the active storage layer consists of a medium applied in the liquid phase.
Vorteilhaft ist es, wenn in einem Unterdruckraum sowohl der Dye getrocknet als auch gesplittert wird. Lässt man die Trocknung im selben Vakuumapparat wie die Metallisierung stattfinden, können zusätzlich die Herstellkosten erheblich reduziert werden. Das Reflektionsmedium wird nach heutigem Stand der Technik mit einem Vakuumbesclnchtungsverfah- ren aufgebracht. Bei diesem als Splittern bezeichneten Verfalirensschritt wird eine Schicht - meistens Silber - durch Zerstäubung eines Targets im Plasma auf die Scheibe aufgebracht. Da das Dyecoating und das Sputtern nacheinander ablaufende Verfalirensschritte sind, sind diese Schritte auf einfache Art und Weise in einer einzigen Vorrichtung durclτzuführen, bei der die Vakuumeinrichtimg für beide Prozessschritte verwendet werden kann.It is advantageous if the dye is both dried and splintered in a vacuum chamber. If the drying is carried out in the same vacuum apparatus as the metallization, the manufacturing costs can be significantly reduced. According to the current state of the art, the reflection medium is applied using a vacuum coating process. In this step known as splintering, a layer - usually silver - is applied to the pane by sputtering a target in the plasma. Since the dyecoating and the sputtering are successive procedural steps, these steps can be carried out in a simple manner in a single device, in which the vacuum device can be used for both process steps.
Ein Ausfuhrungsbeispiel sieht vor, dass der Dye ein Lösungsmittel, vorzugsweise Diacetonalkohol aufweist. Diacetonalkohol verdampft bei einer Umgebungstemperatur von 20°C bei einem Druck von 2 mbar. Senkt man den Druck in der Vakuumkammer unter diesen Wert, verdampft das Lösungsmittel ohne äußere Wärmezufuhr in Sekundenschnelle. Selbstverständlich können bei dem ei mdungsgemäßen Verfahren auch Wärmezufuhr und Unterdruck kombiniert werden, um für den jeweihgen Anwendungsfall die optimalen Prozessparameter bereitzustellen.An exemplary embodiment provides that the dye has a solvent, preferably diacetone alcohol. Diacetone alcohol evaporates at an ambient temperature of 20 ° C at a pressure of 2 mbar. If the pressure in the vacuum chamber is reduced below this value, the solvent evaporates in seconds without external heat. Of course, heat and vacuum can also be combined in the method according to the invention in order to provide the optimal process parameters for the respective application.
Vorrichtungsmäßig wird die der Erfindung zu Grunde liegende Aufgabe mit einer Kammer gelöst, die mindestens eine Vakuumschleuse aufweist und eine Vakuumpumpe, um in der Kammer einen Unterdruck zu erzeugen.In terms of the device, the object on which the invention is based is achieved with a chamber which has at least one vacuum lock and a vacuum pump in order to generate a negative pressure in the chamber.
Diese einfache Vorrichtung ermöglicht eine schnelle, kostengünstige Trocknung von Datenträgerplatten.This simple device enables fast, inexpensive drying of data carrier disks.
Vorzugsweise weist die Vorrichtung ein Vakuummessgerät auf. Außerdem wird vorgeschlagen ein Druckregelventil vorzusehen.The device preferably has a vacuum measuring device. It is also proposed to provide a pressure control valve.
Eine Datenträgertransporteinrichtung kann in dieser Vonϊchtung angebracht werden, um die Datenträgerplatten in die Vorrichtung hinein und aus ihr wieder heraus zu befördern.A data carrier transport device can be installed in this device in order to convey the data carrier disks into and out of the device.
Vorteilhafterweise ist in der Kammer eine Sputtereinrichtiing angeordnet. Dies ermöglicht es, die Unterdruckeinrichtung sowohl für den Trock- nungs- als für den Sputtervorgang zu nutzen.A sputtering device is advantageously arranged in the chamber. This makes it possible to use the vacuum device for both the drying and the sputtering process.
Ein Ausfuhrungsbeispiel der Erfind ung ist in der Zeichnung dargestellt und wird im folgenden näher erläutert. Es zeigt:An exemplary embodiment of the invention is shown in the drawing and is explained in more detail below. It shows:
Figur 1 eine schematische Darstellung einer Vorrichtung vom Trocknen von Datenträgerplatten undFigure 1 is a schematic representation of an apparatus for drying data carrier disks and
Figur 2 eine Vorrichtung gemäß Figur 1 mit einer Sputtereinrichtung.Figure 2 shows a device according to Figure 1 with a sputtering device.
Die in Figur 1 gezeigte Vorrichtung 1 besteht im wesentlichen aus einer gegen Atmosphärendruck abgedichteten Kammer 2. Diese Kammer 2 hat in ihrer Längserstreckung eine Eingangsseite 3, an der eine erste Vakuumschleuse 4 vorgesehen ist und an ihrer Ausgangsseite 5 eine zweite Vakuumschleuse 6. Eine Fördervorrichtung 7 erlaubt es, Datenträgerplatten 8 entsprechend der Richtung der Pfeile 9 und 10 durch die Kammer 2 zu bewegen. Eine Vakuumpumpe 1 1 evakuiert die Kaimner 2 auf einen Druck unterhalb des Dampfdruckes des jeweils eingesetzten Lösungsmittels der auf dem Datenträger 8 aufgebrachten Dye-Schicht. Der Arbeitsdruck wird über das an der Kammer 2 angeordnete Druckregelventil 12 konstant gehalten und der gewünschte Druck wird mit Hilfe des Vakuummessgerätes 13 eingestellt.The device 1 shown in FIG. 1 essentially consists of a chamber 2 sealed against atmospheric pressure. This chamber 2 has an inlet side 3 in its longitudinal extension, on which a first vacuum lock 4 is provided and a second vacuum lock 6 on its outlet side 5. A conveyor device 7 allows disk plates 8 to be moved through chamber 2 in the direction of arrows 9 and 10. A vacuum pump 1 1 evacuates the chamber 2 to a pressure below the vapor pressure of the solvent used in each case of the dye layer applied to the data carrier 8. The working pressure is kept constant via the pressure control valve 12 arranged on the chamber 2 and the desired pressure is set with the aid of the vacuum measuring device 13.
Eine Vorrichtung zum Vakuumtrocknen und Metallisieren ist in Figur 2 gezeigt. Diese Vorrichtung 20 besteht aus einer Trocknungs-Zone 21 und einer Sputtering-Zone 22. Beide Zonen weisen ihre eigene Vakuumpumpe 23 bzw. 24 auf und zwischen den Zonen ist eine Trennwand 25 vorgesehen, um gegenseitige Einflüsse der in den Zonen durchgeführten Arbeits- Vorgänge zu minünieren. Der übrige Aufbau entspricht der in Figur 1 gezeigten Vorrichtung. A device for vacuum drying and metallizing is shown in Figure 2. This device 20 consists of a drying zone 21 and a sputtering zone 22. Both zones have their own vacuum pumps 23 and 24 and a partition 25 is provided between the zones in order to prevent mutual influences of the work carried out in the zones. To minimize operations. The remaining structure corresponds to the device shown in Figure 1.

Claims

Patentansprüche : Claims:
1. Verfahren zum Trocknen von Datenträgerplatten (8), bei dem auf eine Kunststoffscheibe ein flüssiger Dye aufgetragen wird und der Dye anschließend getrocknet wird, dadurch gekennzeichnet dass der Dye unter Unterdruck getrocknet wird.1. A method for drying data carrier plates (8), in which a liquid dye is applied to a plastic disc and the dye is then dried, characterized in that the dye is dried under negative pressure.
2. Verfahren nach Anspruch 1 , dadurch gekennzeichnet dass in einem Unterdruckraum sowohl der Dye getrocknet als auch gesputtert wird.2. The method according to claim 1, characterized in that both the dye is dried and sputtered in a vacuum chamber.
3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet dass der Dye ein Lösungsmittel, vorzugsweise Diacetonalkohol aufweist.3. The method according to claim 1 or 2, characterized in that the dye has a solvent, preferably diacetone alcohol.
4. Vorrichtung zum Trocknen von Datenträgerplatten mit einer Kammer (20), die mindestens eine Vakuumschleuse (4, 5) aufweist und eine Vakuumpumpe (1 1), um in der Kammer (20) einen Unterdruck zu erzeugen.4. Device for drying data carrier disks with a chamber (20) which has at least one vacuum lock (4, 5) and a vacuum pump (1 1) to generate a negative pressure in the chamber (20).
5. Vorrichtung nach Anspruch 4, dadurch gekennzeichnet dass die Vorrichtung ein Vakuummessgerät (13) aufweist.5. The device according to claim 4, characterized in that the device has a vacuum measuring device (13).
6. Vorrichtung nach Anspruch 4 oder 5, dadurch gekennzeichnet dass die Vorrichtung ein Druckregelventil (12) aufweist. 6. The device according to claim 4 or 5, characterized in that the device has a pressure control valve (12).
7. Vorrichtung nach einem der Ansprüche 4 bis 6, dadurch gekennzeichnet dass die Vorrichtung (1) eine Datenträgertransporteinrichtung (7) aufweist.7. Device according to one of claims 4 to 6, characterized in that the device (1) has a data carrier transport device (7).
8. Vorrichtung nach einem der Ansprüche 4 bis 7, dadurch gekennzeichnet dass in der Kammer (2) eine Sputtereinrichung angeordnet ist. 8. Device according to one of claims 4 to 7, characterized in that a sputtering device is arranged in the chamber (2).
PCT/DE2000/003706 1999-10-22 2000-10-20 Method and device for drying data carrier plates WO2001031647A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE10083282T DE10083282D2 (en) 1999-10-22 2000-10-20 Method and device for drying data carrier disks
AU18501/01A AU1850101A (en) 1999-10-22 2000-10-20 Method and device for drying data carrier plates

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19950971.9 1999-10-22
DE19950971 1999-10-22
DE10007065.5 2000-02-16
DE2000107065 DE10007065A1 (en) 2000-02-16 2000-02-16 Drying method for compact disks and digital versatile disks comprises applying liquid dye to plastic disk and drying it under reduced pressure

Publications (1)

Publication Number Publication Date
WO2001031647A1 true WO2001031647A1 (en) 2001-05-03

Family

ID=26004370

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/003706 WO2001031647A1 (en) 1999-10-22 2000-10-20 Method and device for drying data carrier plates

Country Status (3)

Country Link
AU (1) AU1850101A (en)
DE (1) DE10083282D2 (en)
WO (1) WO2001031647A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172174A (en) * 1983-03-18 1984-09-28 Matsushita Electric Ind Co Ltd Manufacture of digital signal recording and reproducing disk
JPS59172173A (en) * 1983-03-18 1984-09-28 Matsushita Electric Ind Co Ltd Manufacture of digital signal recording and reproducing disk
EP0548746A1 (en) * 1991-12-26 1993-06-30 Nikku Industry Co., Ltd. Vacuum drying apparatus
US5232505A (en) * 1991-08-19 1993-08-03 Leybold Aktiengesellschaft Apparatus for the automatic casting, coating, varnishing, testing and sorting of workpieces
GB2272225A (en) * 1992-10-06 1994-05-11 Balzers Hochvakuum Masking a workpiece and a vacuum treatment masking facility
EP0927995A1 (en) * 1997-03-31 1999-07-07 Matsushita Electric Industrial Co., Ltd. Optical recording medium and method of its manufacture

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172174A (en) * 1983-03-18 1984-09-28 Matsushita Electric Ind Co Ltd Manufacture of digital signal recording and reproducing disk
JPS59172173A (en) * 1983-03-18 1984-09-28 Matsushita Electric Ind Co Ltd Manufacture of digital signal recording and reproducing disk
US5232505A (en) * 1991-08-19 1993-08-03 Leybold Aktiengesellschaft Apparatus for the automatic casting, coating, varnishing, testing and sorting of workpieces
EP0548746A1 (en) * 1991-12-26 1993-06-30 Nikku Industry Co., Ltd. Vacuum drying apparatus
GB2272225A (en) * 1992-10-06 1994-05-11 Balzers Hochvakuum Masking a workpiece and a vacuum treatment masking facility
EP0927995A1 (en) * 1997-03-31 1999-07-07 Matsushita Electric Industrial Co., Ltd. Optical recording medium and method of its manufacture

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 009, no. 030 (P - 333) 8 February 1985 (1985-02-08) *

Also Published As

Publication number Publication date
DE10083282D2 (en) 2002-10-10
AU1850101A (en) 2001-05-08

Similar Documents

Publication Publication Date Title
DE69128861T3 (en) Vacuum treatment device and cleaning method therefor
DE4447977B4 (en) Apparatus and method for the plasma treatment of flat workpieces, in particular flat, active screens, and use of the device
DE112019001383B4 (en) Roll coating system for producing multilayer films on flexible substrates
DE69825893T2 (en) DEVICE AND METHOD FOR PRODUCING A RECORDING SUPPORT
DE4210110C2 (en) Semiconductor device manufacturing apparatus and method for manufacturing a semiconductor device
DE2624156C1 (en) Device for the treatment of flat workpieces with fluids
DE2101335C3 (en) Workpiece feed and holding device for processing small workpieces
EP0979169B1 (en) Method and device for gluing two substrates
CH691376A5 (en) Vacuum system for surface machining of workpieces.
DE2812271A1 (en) DEVICE FOR COATING SUBSTRATES IN BATCHS WITH MULTIPLE LOCK CHAMBERS
DE4009797A1 (en) METHOD AND ARRANGEMENT FOR CONDENSING VAPOROUS SUBSTANCES
DE19606463C2 (en) Multi-chamber sputtering device
EP1169145A1 (en) Method and device for cleaning substrates
DE2422157A1 (en) METHOD FOR GLASS SUBSTRATE CLEANING
DE10052889C2 (en) Plasma processing device and plasma processing method for substrates and a semiconductor device
EP0639153B1 (en) Transfer table
DE112009001885T5 (en) Vacuum processing apparatus and vacuum processing method
EP0639747B1 (en) Process and apparatus for drying a cleaned workpiece which has been treated with a cleaning fluid
WO2001031647A1 (en) Method and device for drying data carrier plates
DE3125890A1 (en) "METHOD FOR PRODUCING CARRIERS WITH A HIGH INFORMATION DENSITY"
DE10007065A1 (en) Drying method for compact disks and digital versatile disks comprises applying liquid dye to plastic disk and drying it under reduced pressure
EP0632965B1 (en) Process and apparatus for the stepwise treatment of lump products with process fluids
EP1028176A1 (en) Substrate holder and method for its use
DE69333091T2 (en) HIGH-SPEED CALENDAR METHOD AND DEVICE
DE10147708C5 (en) target arrangement

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP